том 7 издание 4 страницы 640-648

Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures

Тип публикацииJournal Article
Дата публикации2013-07-01
scimago Q4
wos Q4
БС4
SJR0.165
CiteScore0.8
Impact factor0.4
ISSN10274510, 18197094
Surfaces, Coatings and Films
Краткое описание
The possibilities of the nondestructive ion-beam diagnostics of planar nanostructures by the Rutherford backscattering (RBS) of H+ and He+ ion beams with energies of 0.9–1.6 MeV is briefly reviewed. The results of the ion-beam testing of Ba1−x Sr x TiO3 deposited onto Si (100), MgO (100), and NdGaO3 (100) single-crystal substrates are discussed. The degree of element inhomogeneity over the thickness of the coatings under study and the level of the diffuse contamination of the films by substrate atoms are determined by means of RBS measurements.
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Instruments and Experimental Techniques
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Egorov V., Egorov, E. V., Afanasev M. S. Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures // Journal of Surface Investigation. 2013. Vol. 7. No. 4. pp. 640-648.
ГОСТ со всеми авторами (до 50) Скопировать
Egorov V., Egorov, E. V., Afanasev M. S. Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures // Journal of Surface Investigation. 2013. Vol. 7. No. 4. pp. 640-648.
RIS |
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TY - JOUR
DO - 10.1134/S1027451013040083
UR - https://doi.org/10.1134/S1027451013040083
TI - Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures
T2 - Journal of Surface Investigation
AU - Egorov, V.K.
AU - Egorov,, E. V.
AU - Afanasev, M S
PY - 2013
DA - 2013/07/01
PB - Pleiades Publishing
SP - 640-648
IS - 4
VL - 7
SN - 1027-4510
SN - 1819-7094
ER -
BibTex |
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@article{2013_Egorov,
author = {V.K. Egorov and E. V. Egorov, and M S Afanasev},
title = {Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures},
journal = {Journal of Surface Investigation},
year = {2013},
volume = {7},
publisher = {Pleiades Publishing},
month = {jul},
url = {https://doi.org/10.1134/S1027451013040083},
number = {4},
pages = {640--648},
doi = {10.1134/S1027451013040083}
}
MLA
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Egorov, V.K., et al. “Possibilities of the use of ion-beam methods for the diagnostics of planar nanostructures.” Journal of Surface Investigation, vol. 7, no. 4, Jul. 2013, pp. 640-648. https://doi.org/10.1134/S1027451013040083.