A Thin-Film Platform for Chemical Gas Sensors
I V Roslyakov
1
,
K. S. Napolskii
1
,
V. S. Stolyarov
2
,
E E Karpov
3
,
A V Ivashev
4
,
V N Surtaev
5
3
OOO Science and Technology Center of Measuring Gas Sensors, Lyubertsy, Moscow oblast, Russia
|
4
OOO Aerotest Company, Tomilino, Moscow oblast, Russia
|
5
Rosneft Oil Company, Moscow, Russia
|
Publication type: Journal Article
Publication date: 2018-07-04
scimago Q4
SJR: 0.194
CiteScore: 0.8
Impact factor: —
ISSN: 10637397, 16083415
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
In the study, a technique for formation of planar microheaters that make it possible to heat an active zone to a temperature higher than 500°С is proposed and successfully implemented. The developed heating elements are distinguished by low power consumption, short response time, and extremely high resistance to impact loads. The synthetic approaches used in the work (anodic oxidation, photolithography, and magnetron sputtering) feature manufacturability and scaling simplicity. This makes planar heating elements a promising platform based on which semiconductor and thermocatalytic sensors of toxic and explosive gases may be created.
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15
Total citations:
15
Citations from 2024:
4
(26%)
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MLA
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GOST
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Roslyakov I. V. et al. A Thin-Film Platform for Chemical Gas Sensors // Russian Microelectronics. 2018. Vol. 47. No. 4. pp. 226-233.
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Roslyakov I. V., Napolskii K. S., Stolyarov V. S., Karpov E. E., Ivashev A. V., Surtaev V. N. A Thin-Film Platform for Chemical Gas Sensors // Russian Microelectronics. 2018. Vol. 47. No. 4. pp. 226-233.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1134/S1063739718040078
UR - https://doi.org/10.1134/S1063739718040078
TI - A Thin-Film Platform for Chemical Gas Sensors
T2 - Russian Microelectronics
AU - Roslyakov, I V
AU - Napolskii, K. S.
AU - Stolyarov, V. S.
AU - Karpov, E E
AU - Ivashev, A V
AU - Surtaev, V N
PY - 2018
DA - 2018/07/04
PB - Pleiades Publishing
SP - 226-233
IS - 4
VL - 47
SN - 1063-7397
SN - 1608-3415
ER -
Cite this
BibTex (up to 50 authors)
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@article{2018_Roslyakov,
author = {I V Roslyakov and K. S. Napolskii and V. S. Stolyarov and E E Karpov and A V Ivashev and V N Surtaev},
title = {A Thin-Film Platform for Chemical Gas Sensors},
journal = {Russian Microelectronics},
year = {2018},
volume = {47},
publisher = {Pleiades Publishing},
month = {jul},
url = {https://doi.org/10.1134/S1063739718040078},
number = {4},
pages = {226--233},
doi = {10.1134/S1063739718040078}
}
Cite this
MLA
Copy
Roslyakov, I. V., et al. “A Thin-Film Platform for Chemical Gas Sensors.” Russian Microelectronics, vol. 47, no. 4, Jul. 2018, pp. 226-233. https://doi.org/10.1134/S1063739718040078.