Russian Microelectronics, volume 47, issue 4, pages 226-233
A Thin-Film Platform for Chemical Gas Sensors
Roslyakov I V
1
,
Napolskii K. S.
1
,
Stolyarov V. S.
2
,
Karpov E E
3
,
Ivashev A V
4
,
Surtaev V N
5
3
OOO Science and Technology Center of Measuring Gas Sensors, Lyubertsy, Moscow oblast, Russia
|
4
OOO Aerotest Company, Tomilino, Moscow oblast, Russia
|
5
Rosneft Oil Company, Moscow, Russia
|
Publication type: Journal Article
Publication date: 2018-07-04
Journal:
Russian Microelectronics
Quartile SCImago
Q3
Quartile WOS
—
Impact factor: —
ISSN: 10637397, 16083415
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
In the study, a technique for formation of planar microheaters that make it possible to heat an active zone to a temperature higher than 500°С is proposed and successfully implemented. The developed heating elements are distinguished by low power consumption, short response time, and extremely high resistance to impact loads. The synthetic approaches used in the work (anodic oxidation, photolithography, and magnetron sputtering) feature manufacturability and scaling simplicity. This makes planar heating elements a promising platform based on which semiconductor and thermocatalytic sensors of toxic and explosive gases may be created.
Citations by journals
|
1
2
3
|
|
|
Sensors and Actuators, B: Chemical
|
Sensors and Actuators, B: Chemical
3 publications, 25%
|
|
Surface and Coatings Technology
|
Surface and Coatings Technology
1 publication, 8.33%
|
|
Journal of Materials Chemistry C
|
Journal of Materials Chemistry C
1 publication, 8.33%
|
|
Sensors and Actuators, A: Physical
|
Sensors and Actuators, A: Physical
1 publication, 8.33%
|
|
Electrochimica Acta
|
Electrochimica Acta
1 publication, 8.33%
|
|
Microporous and Mesoporous Materials
|
Microporous and Mesoporous Materials
1 publication, 8.33%
|
|
Sensors
|
Sensors
1 publication, 8.33%
|
|
Talanta
|
Talanta
1 publication, 8.33%
|
|
Journal of Micromechanics and Microengineering
|
Journal of Micromechanics and Microengineering
1 publication, 8.33%
|
|
Micromachines
|
Micromachines
1 publication, 8.33%
|
|
1
2
3
|
Citations by publishers
|
1
2
3
4
5
6
7
8
|
|
|
Elsevier
|
Elsevier
8 publications, 66.67%
|
|
Multidisciplinary Digital Publishing Institute (MDPI)
|
Multidisciplinary Digital Publishing Institute (MDPI)
2 publications, 16.67%
|
|
Royal Society of Chemistry (RSC)
|
Royal Society of Chemistry (RSC)
1 publication, 8.33%
|
|
IOP Publishing
|
IOP Publishing
1 publication, 8.33%
|
|
1
2
3
4
5
6
7
8
|
- We do not take into account publications that without a DOI.
- Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
- Statistics recalculated weekly.
{"yearsCitations":{"type":"bar","data":{"show":true,"labels":[2018,2019,2020,2021,2022,2023,2024],"ids":[0,0,0,0,0,0,0],"codes":[0,0,0,0,0,0,0],"imageUrls":["","","","","","",""],"datasets":[{"label":"Citations number","data":[1,2,3,2,1,2,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":["8.33","16.67","25","16.67","8.33","16.67","8.33"],"barThickness":null}]},"options":{"indexAxis":"x","maintainAspectRatio":true,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"}},"x":{"ticks":{"stepSize":1,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"}}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Citations per year","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"journals":{"type":"bar","data":{"show":true,"labels":["Sensors and Actuators, B: Chemical","Surface and Coatings Technology","Journal of Materials Chemistry C","Sensors and Actuators, A: Physical","Electrochimica Acta","Microporous and Mesoporous Materials","Sensors","Talanta","Journal of Micromechanics and Microengineering","Micromachines"],"ids":[22419,12521,3848,22011,15613,6712,18435,4331,25161,1083],"codes":[0,0,0,0,0,0,0,0,0,0],"imageUrls":["\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/leiAYcRDGTSl5B1eCnwpSGqmDEUEfDPPoYisFGhT_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp"],"datasets":[{"label":"","data":[3,1,1,1,1,1,1,1,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[25,8.33,8.33,8.33,8.33,8.33,8.33,8.33,8.33,8.33],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"}},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"}}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Journals","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}},"publishers":{"type":"bar","data":{"show":true,"labels":["Elsevier","Multidisciplinary Digital Publishing Institute (MDPI)","Royal Society of Chemistry (RSC)","IOP Publishing"],"ids":[17,202,123,2075],"codes":[0,0,0,0],"imageUrls":["\/storage\/images\/resized\/GDnYOu1UpMMfMMRV6Aqle4H0YLLsraeD9IP9qScG_medium.webp","\/storage\/images\/resized\/MjH1ITP7lMYGxeqUZfkt2BnVLgjkk413jwBV97XX_medium.webp","\/storage\/images\/resized\/leiAYcRDGTSl5B1eCnwpSGqmDEUEfDPPoYisFGhT_medium.webp","\/storage\/images\/resized\/LsKy6OnmmmRGcAU6CZgWQvNiP1polbaSLNrN7zqj_medium.webp"],"datasets":[{"label":"","data":[8,2,1,1],"backgroundColor":["#3B82F6","#3B82F6","#3B82F6","#3B82F6"],"percentage":[66.67,16.67,8.33,8.33],"barThickness":13}]},"options":{"indexAxis":"y","maintainAspectRatio":false,"scales":{"y":{"ticks":{"precision":0,"autoSkip":false,"font":{"family":"Montserrat"},"color":"#000000"}},"x":{"ticks":{"stepSize":null,"precision":0,"font":{"family":"Montserrat"},"color":"#000000"}}},"plugins":{"legend":{"position":"top","labels":{"font":{"family":"Montserrat"},"color":"#000000"}},"title":{"display":true,"text":"Publishers","font":{"size":24,"family":"Montserrat","weight":600},"color":"#000000"}}}}}
Metrics
Cite this
GOST |
RIS |
BibTex |
MLA
Cite this
GOST
Copy
Roslyakov I. V. et al. A Thin-Film Platform for Chemical Gas Sensors // Russian Microelectronics. 2018. Vol. 47. No. 4. pp. 226-233.
GOST all authors (up to 50)
Copy
Roslyakov I. V., Napolskii K. S., Stolyarov V. S., Karpov E. E., Ivashev A. V., Surtaev V. N. A Thin-Film Platform for Chemical Gas Sensors // Russian Microelectronics. 2018. Vol. 47. No. 4. pp. 226-233.
Cite this
RIS
Copy
TY - JOUR
DO - 10.1134/S1063739718040078
UR - https://doi.org/10.1134%2FS1063739718040078
TI - A Thin-Film Platform for Chemical Gas Sensors
T2 - Russian Microelectronics
AU - Roslyakov, I V
AU - Napolskii, K. S.
AU - Stolyarov, V. S.
AU - Karpov, E E
AU - Ivashev, A V
AU - Surtaev, V N
PY - 2018
DA - 2018/07/04 00:00:00
PB - Pleiades Publishing
SP - 226-233
IS - 4
VL - 47
SN - 1063-7397
SN - 1608-3415
ER -
Cite this
BibTex
Copy
@article{2018_Roslyakov,
author = {I V Roslyakov and K. S. Napolskii and V. S. Stolyarov and E E Karpov and A V Ivashev and V N Surtaev},
title = {A Thin-Film Platform for Chemical Gas Sensors},
journal = {Russian Microelectronics},
year = {2018},
volume = {47},
publisher = {Pleiades Publishing},
month = {jul},
url = {https://doi.org/10.1134%2FS1063739718040078},
number = {4},
pages = {226--233},
doi = {10.1134/S1063739718040078}
}
Cite this
MLA
Copy
Roslyakov, I. V., et al. “A Thin-Film Platform for Chemical Gas Sensors.” Russian Microelectronics, vol. 47, no. 4, Jul. 2018, pp. 226-233. https://doi.org/10.1134%2FS1063739718040078.