том 47 издание 4 страницы 226-233

A Thin-Film Platform for Chemical Gas Sensors

Тип публикацииJournal Article
Дата публикации2018-07-04
scimago Q4
БС2
SJR0.194
CiteScore0.8
Impact factor
ISSN10637397, 16083415
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Краткое описание
In the study, a technique for formation of planar microheaters that make it possible to heat an active zone to a temperature higher than 500°С is proposed and successfully implemented. The developed heating elements are distinguished by low power consumption, short response time, and extremely high resistance to impact loads. The synthetic approaches used in the work (anodic oxidation, photolithography, and magnetron sputtering) feature manufacturability and scaling simplicity. This makes planar heating elements a promising platform based on which semiconductor and thermocatalytic sensors of toxic and explosive gases may be created.
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ГОСТ |
Цитировать
Roslyakov I. V. et al. A Thin-Film Platform for Chemical Gas Sensors // Russian Microelectronics. 2018. Vol. 47. No. 4. pp. 226-233.
ГОСТ со всеми авторами (до 50) Скопировать
Roslyakov I. V., Napolskii K. S., Stolyarov V. S., Karpov E. E., Ivashev A. V., Surtaev V. N. A Thin-Film Platform for Chemical Gas Sensors // Russian Microelectronics. 2018. Vol. 47. No. 4. pp. 226-233.
RIS |
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TY - JOUR
DO - 10.1134/S1063739718040078
UR - https://doi.org/10.1134/S1063739718040078
TI - A Thin-Film Platform for Chemical Gas Sensors
T2 - Russian Microelectronics
AU - Roslyakov, I V
AU - Napolskii, K. S.
AU - Stolyarov, V. S.
AU - Karpov, E E
AU - Ivashev, A V
AU - Surtaev, V N
PY - 2018
DA - 2018/07/04
PB - Pleiades Publishing
SP - 226-233
IS - 4
VL - 47
SN - 1063-7397
SN - 1608-3415
ER -
BibTex |
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BibTex (до 50 авторов) Скопировать
@article{2018_Roslyakov,
author = {I V Roslyakov and K. S. Napolskii and V. S. Stolyarov and E E Karpov and A V Ivashev and V N Surtaev},
title = {A Thin-Film Platform for Chemical Gas Sensors},
journal = {Russian Microelectronics},
year = {2018},
volume = {47},
publisher = {Pleiades Publishing},
month = {jul},
url = {https://doi.org/10.1134/S1063739718040078},
number = {4},
pages = {226--233},
doi = {10.1134/S1063739718040078}
}
MLA
Цитировать
Roslyakov, I. V., et al. “A Thin-Film Platform for Chemical Gas Sensors.” Russian Microelectronics, vol. 47, no. 4, Jul. 2018, pp. 226-233. https://doi.org/10.1134/S1063739718040078.