Composite X-ray waveguide-resonator as a background for the new generation of the material testing equipment for films on Si substrates
V.K. Egorov
1
,
E. V. Egorov,
1
Publication type: Journal Article
Publication date: 2002-01-01
General Medicine
Abstract
Experimental research of the first composite planar X-ray waveguide-resonator (CPXWR) is presented. Model for an X-ray beam penetration across CPXWR is proposed. The model shows that the experimental data can be interpreted as the effect of the X-ray beam angle tunneling across small gap between two waveguide-resonators aligned consecutive. The assumption been made that the effect may open the key for the mechanism understanding of a hard electromagnetic radiation beam's management. Possibilities of the CPXWR practical using for creation of the X-ray new generation equipment for testing of thin film coating on Si substrates are discussed.
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Egorov V., Egorov, E. V. Composite X-ray waveguide-resonator as a background for the new generation of the material testing equipment for films on Si substrates // MRS Proceedings. 2002. Vol. 716. pp. 189-195.
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Egorov V., Egorov, E. V. Composite X-ray waveguide-resonator as a background for the new generation of the material testing equipment for films on Si substrates // MRS Proceedings. 2002. Vol. 716. pp. 189-195.
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TY - JOUR
DO - 10.1557/proc-716-b4.15
UR - https://doi.org/10.1557/proc-716-b4.15
TI - Composite X-ray waveguide-resonator as a background for the new generation of the material testing equipment for films on Si substrates
T2 - MRS Proceedings
AU - Egorov, V.K.
AU - Egorov,, E. V.
PY - 2002
DA - 2002/01/01
PB - Springer Nature
SP - 189-195
VL - 716
SN - 0272-9172
SN - 1946-4274
ER -
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@article{2002_Egorov,
author = {V.K. Egorov and E. V. Egorov,},
title = {Composite X-ray waveguide-resonator as a background for the new generation of the material testing equipment for films on Si substrates},
journal = {MRS Proceedings},
year = {2002},
volume = {716},
publisher = {Springer Nature},
month = {jan},
url = {https://doi.org/10.1557/proc-716-b4.15},
pages = {189--195},
doi = {10.1557/proc-716-b4.15}
}
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