Dry Etching for Microelectronics

Elsevier

ISSN: 0167790X

Journal publications in Cobalt

journal names

Dry Etching for Microelectronics

All time from 2020

Publications

121

Citations

400

h-index

Publications

Citations

Top-3 citing journals

MRS Proceedings (32 citations)

Journal of Applied Physics (11 citations)

Journal of Materials Processing Technology (8 citations)

Top-3 organizations

University of Illinois Urbana-Champaign (3 publications)

University of Southern California (3 publications)

University of Milan (1 publication)

Top-3 countries

USA (48 publications)

Germany (4 publications)

United Kingdom (3 publications)

Most cited in 5 years

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Publications found: 0

Top-100

Citing journals

	5 10 15 20 25 30 35
MRS Proceedings	MRS Proceedings, 32, 8% MRS Proceedings 32 citations, 8%
Journal of Applied Physics	Journal of Applied Physics, 11, 2.75% Journal of Applied Physics 11 citations, 2.75%
Journal of Materials Processing Technology	Journal of Materials Processing Technology, 8, 2% Journal of Materials Processing Technology 8 citations, 2%
International Journal of Advanced Manufacturing Technology	International Journal of Advanced Manufacturing Technology, 7, 1.75% International Journal of Advanced Manufacturing Technology 7 citations, 1.75%
Springer Series in Materials Science	Springer Series in Materials Science, 6, 1.5% Springer Series in Materials Science 6 citations, 1.5%
Materials and Manufacturing Processes	Materials and Manufacturing Processes, 5, 1.25% Materials and Manufacturing Processes 5 citations, 1.25%
Applied Physics A: Materials Science and Processing	Applied Physics A: Materials Science and Processing, 5, 1.25% Applied Physics A: Materials Science and Processing 5 citations, 1.25%
Springer Proceedings in Physics	Springer Proceedings in Physics, 5, 1.25% Springer Proceedings in Physics 5 citations, 1.25%
Journal of Materials Research	Journal of Materials Research, 4, 1% Journal of Materials Research 4 citations, 1%
Defect and Diffusion Forum	Defect and Diffusion Forum, 4, 1% Defect and Diffusion Forum 4 citations, 1%
Journal of Materials Science	Journal of Materials Science, 4, 1% Journal of Materials Science 4 citations, 1%
IEEE Transactions on Electron Devices	IEEE Transactions on Electron Devices, 4, 1% IEEE Transactions on Electron Devices 4 citations, 1%
Journal of Materials Science Letters	Journal of Materials Science Letters, 4, 1% Journal of Materials Science Letters 4 citations, 1%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes	Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 3, 0.75% Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes 3 citations, 0.75%
Materials Science and Technology	Materials Science and Technology, 3, 0.75% Materials Science and Technology 3 citations, 0.75%
Solar Energy Materials and Solar Cells	Solar Energy Materials and Solar Cells, 3, 0.75% Solar Energy Materials and Solar Cells 3 citations, 0.75%
Materialwissenschaft und Werkstofftechnik	Materialwissenschaft und Werkstofftechnik, 3, 0.75% Materialwissenschaft und Werkstofftechnik 3 citations, 0.75%
Applied Surface Science	Applied Surface Science, 3, 0.75% Applied Surface Science 3 citations, 0.75%
Advances in Mechanical Engineering	Advances in Mechanical Engineering, 3, 0.75% Advances in Mechanical Engineering 3 citations, 0.75%
Journal of Manufacturing Science and Engineering, Transactions of the ASME	Journal of Manufacturing Science and Engineering, Transactions of the ASME, 3, 0.75% Journal of Manufacturing Science and Engineering, Transactions of the ASME 3 citations, 0.75%
IETE Journal of Research	IETE Journal of Research, 3, 0.75% IETE Journal of Research 3 citations, 0.75%
Progress in Photovoltaics: Research and Applications	Progress in Photovoltaics: Research and Applications, 3, 0.75% Progress in Photovoltaics: Research and Applications 3 citations, 0.75%
Welding International	Welding International, 3, 0.75% Welding International 3 citations, 0.75%
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture	Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 3, 0.75% Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 3 citations, 0.75%
Materials Science Forum	Materials Science Forum, 2, 0.5% Materials Science Forum 2 citations, 0.5%
Journal of Applied Polymer Science	Journal of Applied Polymer Science, 2, 0.5% Journal of Applied Polymer Science 2 citations, 0.5%
Lasers in Manufacturing and Materials Processing	Lasers in Manufacturing and Materials Processing, 2, 0.5% Lasers in Manufacturing and Materials Processing 2 citations, 0.5%
IETE Technical Review (Institution of Electronics and Telecommunication Engineers, India)	IETE Technical Review (Institution of Electronics and Telecommunication Engineers, India), 2, 0.5% IETE Technical Review (Institution of Electronics and Telecommunication Engineers, India) 2 citations, 0.5%
CISM International Centre for Mechanical Sciences, Courses and Lectures	CISM International Centre for Mechanical Sciences, Courses and Lectures, 2, 0.5% CISM International Centre for Mechanical Sciences, Courses and Lectures 2 citations, 0.5%
Journal of Materials Engineering and Performance	Journal of Materials Engineering and Performance, 2, 0.5% Journal of Materials Engineering and Performance 2 citations, 0.5%
Physica Status Solidi (A) Applications and Materials Science	Physica Status Solidi (A) Applications and Materials Science, 2, 0.5% Physica Status Solidi (A) Applications and Materials Science 2 citations, 0.5%
SIAM Journal on Applied Mathematics	SIAM Journal on Applied Mathematics, 2, 0.5% SIAM Journal on Applied Mathematics 2 citations, 0.5%
Surface Engineering	Surface Engineering, 2, 0.5% Surface Engineering 2 citations, 0.5%
Semiconductors	Semiconductors, 2, 0.5% Semiconductors 2 citations, 0.5%
CIRP Annals - Manufacturing Technology	CIRP Annals - Manufacturing Technology, 2, 0.5% CIRP Annals - Manufacturing Technology 2 citations, 0.5%
Microelectronic Engineering	Microelectronic Engineering, 2, 0.5% Microelectronic Engineering 2 citations, 0.5%
International Journal of Machine Tools and Manufacture	International Journal of Machine Tools and Manufacture, 2, 0.5% International Journal of Machine Tools and Manufacture 2 citations, 0.5%
Physica Scripta	Physica Scripta, 2, 0.5% Physica Scripta 2 citations, 0.5%
Journal of Manufacturing Processes	Journal of Manufacturing Processes, 2, 0.5% Journal of Manufacturing Processes 2 citations, 0.5%
Metallurgical and Materials Transactions B	Metallurgical and Materials Transactions B, 2, 0.5% Metallurgical and Materials Transactions B 2 citations, 0.5%
Progress in Materials Science	Progress in Materials Science, 2, 0.5% Progress in Materials Science 2 citations, 0.5%
Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science	Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science, 2, 0.5% Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science 2 citations, 0.5%
Optical Engineering	Optical Engineering, 2, 0.5% Optical Engineering 2 citations, 0.5%
Materials	Materials, 2, 0.5% Materials 2 citations, 0.5%
phys stat sol (a)	phys stat sol (a), 2, 0.5% phys stat sol (a) 2 citations, 0.5%
Philosophical Magazine A	Philosophical Magazine A, 2, 0.5% Philosophical Magazine A 2 citations, 0.5%
Journal of Multiscale Modelling	Journal of Multiscale Modelling, 2, 0.5% Journal of Multiscale Modelling 2 citations, 0.5%
Solid State Phenomena	Solid State Phenomena, 1, 0.25% Solid State Phenomena 1 citation, 0.25%
Journal of Chemical Physics	Journal of Chemical Physics, 1, 0.25% Journal of Chemical Physics 1 citation, 0.25%
Revista de Metalurgia	Revista de Metalurgia, 1, 0.25% Revista de Metalurgia 1 citation, 0.25%
Physics Letters, Section A: General, Atomic and Solid State Physics	Physics Letters, Section A: General, Atomic and Solid State Physics, 1, 0.25% Physics Letters, Section A: General, Atomic and Solid State Physics 1 citation, 0.25%
Journal of Russian Laser Research	Journal of Russian Laser Research, 1, 0.25% Journal of Russian Laser Research 1 citation, 0.25%
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1, 0.25% Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 1 citation, 0.25%
Microelectronics Journal	Microelectronics Journal, 1, 0.25% Microelectronics Journal 1 citation, 0.25%
International Journal of Numerical Modelling: Electronic Networks, Devices and Fields	International Journal of Numerical Modelling: Electronic Networks, Devices and Fields, 1, 0.25% International Journal of Numerical Modelling: Electronic Networks, Devices and Fields 1 citation, 0.25%
Applied Physics Letters	Applied Physics Letters, 1, 0.25% Applied Physics Letters 1 citation, 0.25%
Journal of Physics Condensed Matter	Journal of Physics Condensed Matter, 1, 0.25% Journal of Physics Condensed Matter 1 citation, 0.25%
Journal of Micro/ Nanolithography, MEMS, and MOEMS	Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1, 0.25% Journal of Micro/ Nanolithography, MEMS, and MOEMS 1 citation, 0.25%
Metals	Metals, 1, 0.25% Metals 1 citation, 0.25%
IEEE Electron Device Letters	IEEE Electron Device Letters, 1, 0.25% IEEE Electron Device Letters 1 citation, 0.25%
AIP Advances	AIP Advances, 1, 0.25% AIP Advances 1 citation, 0.25%
Silicon	Silicon, 1, 0.25% Silicon 1 citation, 0.25%
Science and Technology of Welding and Joining	Science and Technology of Welding and Joining, 1, 0.25% Science and Technology of Welding and Joining 1 citation, 0.25%
Advanced Functional Materials	Advanced Functional Materials, 1, 0.25% Advanced Functional Materials 1 citation, 0.25%
Optics and Laser Technology	Optics and Laser Technology, 1, 0.25% Optics and Laser Technology 1 citation, 0.25%
Journal of the European Ceramic Society	Journal of the European Ceramic Society, 1, 0.25% Journal of the European Ceramic Society 1 citation, 0.25%
Nanomaterials	Nanomaterials, 1, 0.25% Nanomaterials 1 citation, 0.25%
Nano Letters	Nano Letters, 1, 0.25% Nano Letters 1 citation, 0.25%
Optoelectronics, Instrumentation and Data Processing	Optoelectronics, Instrumentation and Data Processing, 1, 0.25% Optoelectronics, Instrumentation and Data Processing 1 citation, 0.25%
Review of Scientific Instruments	Review of Scientific Instruments, 1, 0.25% Review of Scientific Instruments 1 citation, 0.25%
Materials Chemistry and Physics	Materials Chemistry and Physics, 1, 0.25% Materials Chemistry and Physics 1 citation, 0.25%
Progress in Additive Manufacturing	Progress in Additive Manufacturing, 1, 0.25% Progress in Additive Manufacturing 1 citation, 0.25%
Additive Manufacturing	Additive Manufacturing, 1, 0.25% Additive Manufacturing 1 citation, 0.25%
IEEE Journal of Solid-State Circuits	IEEE Journal of Solid-State Circuits, 1, 0.25% IEEE Journal of Solid-State Circuits 1 citation, 0.25%
Sadhana - Academy Proceedings in Engineering Sciences	Sadhana - Academy Proceedings in Engineering Sciences, 1, 0.25% Sadhana - Academy Proceedings in Engineering Sciences 1 citation, 0.25%
Journal of Physical Chemistry B	Journal of Physical Chemistry B, 1, 0.25% Journal of Physical Chemistry B 1 citation, 0.25%
International Journal of Clothing Science and Technology	International Journal of Clothing Science and Technology, 1, 0.25% International Journal of Clothing Science and Technology 1 citation, 0.25%
Acta Physica Polonica A	Acta Physica Polonica A, 1, 0.25% Acta Physica Polonica A 1 citation, 0.25%
Crystals	Crystals, 1, 0.25% Crystals 1 citation, 0.25%
Critical Reviews in Solid State and Materials Sciences	Critical Reviews in Solid State and Materials Sciences, 1, 0.25% Critical Reviews in Solid State and Materials Sciences 1 citation, 0.25%
Nanotechnology	Nanotechnology, 1, 0.25% Nanotechnology 1 citation, 0.25%
Journal of Heat Transfer	Journal of Heat Transfer, 1, 0.25% Journal of Heat Transfer 1 citation, 0.25%
Journal of Vocational Education and Training	Journal of Vocational Education and Training, 1, 0.25% Journal of Vocational Education and Training 1 citation, 0.25%
Procedia Engineering	Procedia Engineering, 1, 0.25% Procedia Engineering 1 citation, 0.25%
Thin Solid Films	Thin Solid Films, 1, 0.25% Thin Solid Films 1 citation, 0.25%
Anti-Corrosion Methods and Materials	Anti-Corrosion Methods and Materials, 1, 0.25% Anti-Corrosion Methods and Materials 1 citation, 0.25%
Journal of Materials Research and Technology	Journal of Materials Research and Technology, 1, 0.25% Journal of Materials Research and Technology 1 citation, 0.25%
Key Engineering Materials	Key Engineering Materials, 1, 0.25% Key Engineering Materials 1 citation, 0.25%
Optics and Lasers in Engineering	Optics and Lasers in Engineering, 1, 0.25% Optics and Lasers in Engineering 1 citation, 0.25%
Surface and Interface Analysis	Surface and Interface Analysis, 1, 0.25% Surface and Interface Analysis 1 citation, 0.25%
Electronics Letters	Electronics Letters, 1, 0.25% Electronics Letters 1 citation, 0.25%
SAE Technical Papers	SAE Technical Papers, 1, 0.25% SAE Technical Papers 1 citation, 0.25%
Journal of Engineering Materials and Technology, Transactions of the ASME	Journal of Engineering Materials and Technology, Transactions of the ASME, 1, 0.25% Journal of Engineering Materials and Technology, Transactions of the ASME 1 citation, 0.25%
Welding in the World, Le Soudage Dans Le Monde	Welding in the World, Le Soudage Dans Le Monde, 1, 0.25% Welding in the World, Le Soudage Dans Le Monde 1 citation, 0.25%
Russian Microelectronics	Russian Microelectronics, 1, 0.25% Russian Microelectronics 1 citation, 0.25%
Materials Today: Proceedings	Materials Today: Proceedings, 1, 0.25% Materials Today: Proceedings 1 citation, 0.25%
Proceedings of the IEEE	Proceedings of the IEEE, 1, 0.25% Proceedings of the IEEE 1 citation, 0.25%
International Journal of Surface Engineering and Interdisciplinary Materials Science	International Journal of Surface Engineering and Interdisciplinary Materials Science, 1, 0.25% International Journal of Surface Engineering and Interdisciplinary Materials Science 1 citation, 0.25%
MRS Bulletin	MRS Bulletin, 1, 0.25% MRS Bulletin 1 citation, 0.25%
Coatings	Coatings, 1, 0.25% Coatings 1 citation, 0.25%

	5 10 15 20 25 30 35

Citing publishers

	10 20 30 40 50 60 70
Springer Nature	Springer Nature, 69, 17.25% Springer Nature 69 citations, 17.25%
Elsevier	Elsevier, 38, 9.5% Elsevier 38 citations, 9.5%
Taylor & Francis	Taylor & Francis, 24, 6% Taylor & Francis 24 citations, 6%
Wiley	Wiley, 19, 4.75% Wiley 19 citations, 4.75%
AIP Publishing	AIP Publishing, 15, 3.75% AIP Publishing 15 citations, 3.75%
	, 14, 3.5% 14 citations, 3.5%
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 13, 3.25% Institute of Electrical and Electronics Engineers (IEEE) 13 citations, 3.25%
Trans Tech Publications	Trans Tech Publications, 8, 2% Trans Tech Publications 8 citations, 2%
MDPI	MDPI, 7, 1.75% MDPI 7 citations, 1.75%
Cambridge University Press	Cambridge University Press, 6, 1.5% Cambridge University Press 6 citations, 1.5%
SAGE	SAGE, 6, 1.5% SAGE 6 citations, 1.5%
ASME International	ASME International, 6, 1.5% ASME International 6 citations, 1.5%
Pleiades Publishing	Pleiades Publishing, 4, 1% Pleiades Publishing 4 citations, 1%
IOP Publishing	IOP Publishing, 4, 1% IOP Publishing 4 citations, 1%
Emerald	Emerald, 3, 0.75% Emerald 3 citations, 0.75%
Society for Industrial and Applied Mathematics (SIAM)	Society for Industrial and Applied Mathematics (SIAM), 3, 0.75% Society for Industrial and Applied Mathematics (SIAM) 3 citations, 0.75%
Japan Society of Applied Physics	Japan Society of Applied Physics, 3, 0.75% Japan Society of Applied Physics 3 citations, 0.75%
SPIE-Intl Soc Optical Eng	SPIE-Intl Soc Optical Eng, 3, 0.75% SPIE-Intl Soc Optical Eng 3 citations, 0.75%
World Scientific	World Scientific, 2, 0.5% World Scientific 2 citations, 0.5%
American Chemical Society (ACS)	American Chemical Society (ACS), 2, 0.5% American Chemical Society (ACS) 2 citations, 0.5%
ASM International	ASM International, 2, 0.5% ASM International 2 citations, 0.5%
EDP Sciences	EDP Sciences, 1, 0.25% EDP Sciences 1 citation, 0.25%
Institution of Engineering and Technology (IET)	Institution of Engineering and Technology (IET), 1, 0.25% Institution of Engineering and Technology (IET) 1 citation, 0.25%
	, 1, 0.25% 1 citation, 0.25%
	, 1, 0.25% 1 citation, 0.25%
Lviv Polytechnic National University	Lviv Polytechnic National University, 1, 0.25% Lviv Polytechnic National University 1 citation, 0.25%
Centre for Evaluation in Education and Science (CEON/CEES)	Centre for Evaluation in Education and Science (CEON/CEES), 1, 0.25% Centre for Evaluation in Education and Science (CEON/CEES) 1 citation, 0.25%
IGI Global	IGI Global, 1, 0.25% IGI Global 1 citation, 0.25%
SAE International	SAE International, 1, 0.25% SAE International 1 citation, 0.25%
Research Square Platform LLC	Research Square Platform LLC, 1, 0.25% Research Square Platform LLC 1 citation, 0.25%
	10 20 30 40 50 60 70

Publishing organizations

	1 2 3
University of Southern California	University of Southern California, 3, 2.48% University of Southern California 3 publications, 2.48%
University of Illinois Urbana-Champaign	University of Illinois Urbana-Champaign, 3, 2.48% University of Illinois Urbana-Champaign 3 publications, 2.48%
University of Milan	University of Milan, 1, 0.83% University of Milan 1 publication, 0.83%
Imperial College London	Imperial College London, 1, 0.83% Imperial College London 1 publication, 0.83%
Massachusetts Institute of Technology	Massachusetts Institute of Technology, 1, 0.83% Massachusetts Institute of Technology 1 publication, 0.83%
University of Southampton	University of Southampton, 1, 0.83% University of Southampton 1 publication, 0.83%
Cornell University	Cornell University, 1, 0.83% Cornell University 1 publication, 0.83%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 1, 0.83% Interuniversity Microelectronics Centre 1 publication, 0.83%
Los Alamos National Laboratory	Los Alamos National Laboratory, 1, 0.83% Los Alamos National Laboratory 1 publication, 0.83%
University of California, Berkeley	University of California, Berkeley, 1, 0.83% University of California, Berkeley 1 publication, 0.83%
National Renewable Energy Laboratory	National Renewable Energy Laboratory, 1, 0.83% National Renewable Energy Laboratory 1 publication, 0.83%
Darmstadt University of Applied Sciences	Darmstadt University of Applied Sciences, 1, 0.83% Darmstadt University of Applied Sciences 1 publication, 0.83%
Universidad Politécnica de Madrid	Universidad Politécnica de Madrid, 1, 0.83% Universidad Politécnica de Madrid 1 publication, 0.83%
University of Tokyo	University of Tokyo, 1, 0.83% University of Tokyo 1 publication, 0.83%
Colorado School of Mines	Colorado School of Mines, 1, 0.83% Colorado School of Mines 1 publication, 0.83%
Wright State University	Wright State University, 1, 0.83% Wright State University 1 publication, 0.83%
Sandia National Laboratories	Sandia National Laboratories, 1, 0.83% Sandia National Laboratories 1 publication, 0.83%
Texas A&M University	Texas A&M University, 1, 0.83% Texas A&M University 1 publication, 0.83%
	1 2 3

Publishing countries

	5 10 15 20 25 30 35 40 45 50
USA	USA, 48, 39.67% USA 48 publications, 39.67%
Germany	Germany, 4, 3.31% Germany 4 publications, 3.31%
United Kingdom	United Kingdom, 3, 2.48% United Kingdom 3 publications, 2.48%
France	France, 1, 0.83% France 1 publication, 0.83%
Belgium	Belgium, 1, 0.83% Belgium 1 publication, 0.83%
Spain	Spain, 1, 0.83% Spain 1 publication, 0.83%
Italy	Italy, 1, 0.83% Italy 1 publication, 0.83%
Japan	Japan, 1, 0.83% Japan 1 publication, 0.83%
	5 10 15 20 25 30 35 40 45 50