Journal of Micro/ Nanolithography, MEMS, and MOEMS
SCImago
Q2
SJR
0.393
CiteScore
3.4
Categories
Mechanical Engineering
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Nanoscience and Nanotechnology
Areas
Engineering
Materials Science
Physics and Astronomy
Years of issue
2007-2023
Top-3 citing journals
Journal of Micro/ Nanolithography, MEMS, and MOEMS
(873 citations)
Top-3 organizations
Taiwan Semiconductor Manufacturing Company
(42 publications)
Interuniversity Microelectronics Centre
(33 publications)
National Institute of Standards and Technology
(22 publications)
National Institute of Standards and Technology
(2 publications)
Physikalisch-Technische Bundesanstalt
(2 publications)
Indian Institute of Technology Kharagpur
(1 publication)
Most cited in 5 years
Found
Top-100
Citing journals
Citing publishers
Publishing organizations
Publishing organizations in 5 years
1
2
|
|
National Institute of Standards and Technology
2 publications, 2.17%
|
|
Physikalisch-Technische Bundesanstalt
2 publications, 2.17%
|
|
Indian Institute of Technology Kharagpur
1 publication, 1.09%
|
|
Babol University of Medical Sciences
1 publication, 1.09%
|
|
Ben-Gurion University of the Negev
1 publication, 1.09%
|
|
Sami Shamoon College of Engineering
1 publication, 1.09%
|
|
Holon Institute of Technology
1 publication, 1.09%
|
|
Dalian University of Technology
1 publication, 1.09%
|
|
University of Electronic Science and Technology of China
1 publication, 1.09%
|
|
University of Twente
1 publication, 1.09%
|
|
Beijing University of Chemical Technology
1 publication, 1.09%
|
|
Paul Scherrer Institute
1 publication, 1.09%
|
|
Delft University of Technology
1 publication, 1.09%
|
|
Shanghai University of Engineering Science
1 publication, 1.09%
|
|
Lawrence Berkeley National Laboratory
1 publication, 1.09%
|
|
University of Southern California
1 publication, 1.09%
|
|
Anhui University of Science and Technology
1 publication, 1.09%
|
|
Interuniversity Microelectronics Centre
1 publication, 1.09%
|
|
National Institute of Advanced Industrial Science and Technology
1 publication, 1.09%
|
|
University of Illinois Urbana-Champaign
1 publication, 1.09%
|
|
Fraunhofer Institute for Laser Technology
1 publication, 1.09%
|
|
Fraunhofer Institute for Integrated Systems and Device Technology
1 publication, 1.09%
|
|
Albert Ludwig University of Freiburg
1 publication, 1.09%
|
|
1
2
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Publishing countries
Publishing countries in 5 years
1
2
3
4
5
6
7
8
9
|
|
USA
|
USA, 9, 9.78%
USA
9 publications, 9.78%
|
Germany
|
Germany, 6, 6.52%
Germany
6 publications, 6.52%
|
China
|
China, 4, 4.35%
China
4 publications, 4.35%
|
Netherlands
|
Netherlands, 4, 4.35%
Netherlands
4 publications, 4.35%
|
Japan
|
Japan, 3, 3.26%
Japan
3 publications, 3.26%
|
Belgium
|
Belgium, 1, 1.09%
Belgium
1 publication, 1.09%
|
Israel
|
Israel, 1, 1.09%
Israel
1 publication, 1.09%
|
India
|
India, 1, 1.09%
India
1 publication, 1.09%
|
Iran
|
Iran, 1, 1.09%
Iran
1 publication, 1.09%
|
Switzerland
|
Switzerland, 1, 1.09%
Switzerland
1 publication, 1.09%
|
1
2
3
4
5
6
7
8
9
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1 profile journal article
Marla Deepak
Indian Institute of Technology Bombay
65 publications,
570 citations
h-index: 13
1 profile journal article
Kompa Guenter
University of Kassel
89 publications,
1 212 citations
h-index: 13