Journal of Micro/ Nanolithography, MEMS, and MOEMS
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Categories
Mechanical Engineering
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Nanoscience and Nanotechnology
Areas
Engineering
Materials Science
Physics and Astronomy
Years of issue
2007-2023
journal names
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Top-3 citing journals
Journal of Micro/ Nanolithography, MEMS, and MOEMS
(873 citations)
Optics Express
(411 citations)
Top-3 organizations
Taiwan Semiconductor Manufacturing Company
(42 publications)
Interuniversity Microelectronics Centre
(33 publications)
National Institute of Standards and Technology
(22 publications)
Top-3 researchers by articles count
3 publications in journal
Papavieros George
PhD in Physics and Mathematics
20 publications,
147 citations
h-index: 6
Aristotle University of Thessaloniki
National Centre of Scientific Research "Demokritos"
1 publication in journal
Matsui Tomomi
87 publications,
1 089 citations
h-index: 19
Tokyo Institute of Technology
1 publication in journal
Bourim El-Mostafa
🥼 🤝
PhD in Engineering
31 publications,
680 citations,
4 reviews
h-index: 14
Most cited in 5 years
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Top-100
Citing journals
Citing publishers
Publishing organizations
Publishing countries
1 publication in journal
Kompa Guenter
89 publications,
1 261 citations
h-index: 13
University of Kassel
1 publication in journal
Sinev Leonid
PhD in Engineering
10 publications,
22 citations
h-index: 3
1 publication in journal
Matsui Tomomi
87 publications,
1 089 citations
h-index: 19
Tokyo Institute of Technology
1 publication in journal
Bourim El-Mostafa
🥼 🤝
PhD in Engineering
31 publications,
680 citations,
4 reviews
h-index: 14
Data by ORCID