Journal of Micro/ Nanolithography, MEMS, and MOEMS

SPIE-Intl Soc Optical Eng
SPIE-Intl Soc Optical Eng
ISSN: 19325150, 19325134

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Categories
Mechanical Engineering
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Nanoscience and Nanotechnology
Areas
Engineering
Materials Science
Physics and Astronomy
Years of issue
2007-2023
journal names
Journal of Micro/ Nanolithography, MEMS, and MOEMS

Most cited in 5 years

Found 
Found 

Top-100

Citing journals

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Journal of Micro/ Nanolithography, MEMS, and MOEMS
873 citations, 6.76%
Proceedings of SPIE - The International Society for Optical Engineering
823 citations, 6.38%
Optics Express
411 citations, 3.18%
Journal of Vacuum Science and Technology B
393 citations, 3.04%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
290 citations, 2.25%
Applied Optics
240 citations, 1.86%
Micromachines
208 citations, 1.61%
Microelectronic Engineering
191 citations, 1.48%
Journal of Micromechanics and Microengineering
178 citations, 1.38%
Journal of Micro/Nanopatterning Materials and Metrology
174 citations, 1.35%
Journal of Photopolymer Science and Technology
160 citations, 1.24%
Journal of Applied Physics
154 citations, 1.19%
ACS applied materials & interfaces
141 citations, 1.09%
Measurement Science and Technology
121 citations, 0.94%
Nanotechnology
119 citations, 0.92%
Applied Physics Letters
114 citations, 0.88%
Journal of Microelectromechanical Systems
113 citations, 0.88%
Sensors and Actuators, A: Physical
103 citations, 0.8%
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
102 citations, 0.79%
Microsystem Technologies
93 citations, 0.72%
Sensors
88 citations, 0.68%
IEEE Sensors Journal
86 citations, 0.67%
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
74 citations, 0.57%
IEEE Transactions on Semiconductor Manufacturing
68 citations, 0.53%
ACS Nano
59 citations, 0.46%
Scientific Reports
59 citations, 0.46%
Optical Engineering
57 citations, 0.44%
Applied Sciences (Switzerland)
55 citations, 0.43%
Optics Letters
54 citations, 0.42%
Journal of Materials Chemistry C
54 citations, 0.42%
AIP Advances
51 citations, 0.4%
Journal Physics D: Applied Physics
51 citations, 0.4%
Applied Surface Science
50 citations, 0.39%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
48 citations, 0.37%
Chemistry of Materials
48 citations, 0.37%
Macromolecules
45 citations, 0.35%
Optics and Lasers in Engineering
44 citations, 0.34%
Optics Communications
44 citations, 0.34%
Nanomaterials
43 citations, 0.33%
Review of Scientific Instruments
43 citations, 0.33%
Optics and Laser Technology
42 citations, 0.33%
Nanoscale
40 citations, 0.31%
Photonics
40 citations, 0.31%
Journal of the Optical Society of America A: Optics and Image Science, and Vision
39 citations, 0.3%
Advanced Functional Materials
38 citations, 0.29%
Micro and Nano Engineering
37 citations, 0.29%
Polymers
37 citations, 0.29%
Frontiers of Nanoscience
37 citations, 0.29%
Physical Chemistry Chemical Physics
36 citations, 0.28%
Physics of Plasmas
35 citations, 0.27%
Nano Letters
33 citations, 0.26%
Advanced Materials
33 citations, 0.26%
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
33 citations, 0.26%
IEEE Access
32 citations, 0.25%
Advanced Optical Technologies
30 citations, 0.23%
Thin Solid Films
30 citations, 0.23%
Materials
30 citations, 0.23%
Ultramicroscopy
29 citations, 0.22%
Lab on a Chip
28 citations, 0.22%
Acta Physica Sinica
28 citations, 0.22%
Langmuir
28 citations, 0.22%
Journal of Optics (United Kingdom)
28 citations, 0.22%
Microsystems and Nanoengineering
27 citations, 0.21%
IEEE Transactions on Electron Devices
27 citations, 0.21%
Applied Physics Express
26 citations, 0.2%
RSC Advances
24 citations, 0.19%
Smart Materials and Structures
23 citations, 0.18%
ACS Omega
23 citations, 0.18%
IEEE Transactions on Nanotechnology
22 citations, 0.17%
Journal of Physics: Conference Series
22 citations, 0.17%
Small
22 citations, 0.17%
Nature Electronics
22 citations, 0.17%
Sensors and Actuators, B: Chemical
22 citations, 0.17%
Journal of Physical Chemistry C
21 citations, 0.16%
ECS Journal of Solid State Science and Technology
21 citations, 0.16%
IEEE Transactions on Instrumentation and Measurement
21 citations, 0.16%
Russian Microelectronics
21 citations, 0.16%
IEEE Photonics Journal
20 citations, 0.15%
Advanced Optical Materials
19 citations, 0.15%
Precision Engineering
19 citations, 0.15%
Advanced Materials Research
19 citations, 0.15%
Measurement: Journal of the International Measurement Confederation
18 citations, 0.14%
Microelectronics Reliability
18 citations, 0.14%
Nature Communications
18 citations, 0.14%
IEEE Photonics Technology Letters
18 citations, 0.14%
Microfluidics and Nanofluidics
18 citations, 0.14%
Applied Physics A: Materials Science and Processing
18 citations, 0.14%
Optik
18 citations, 0.14%
Advanced Materials Technologies
17 citations, 0.13%
ACS Applied Nano Materials
17 citations, 0.13%
Advanced Materials Interfaces
17 citations, 0.13%
Journal of the Optical Society of America B: Optical Physics
17 citations, 0.13%
International Journal of Extreme Manufacturing
17 citations, 0.13%
IEEE TRANSACTIONS ON COMPUTATIONAL IMAGING
16 citations, 0.12%
Micro and Nano Letters
15 citations, 0.12%
Journal of Applied Crystallography
15 citations, 0.12%
ACS Photonics
15 citations, 0.12%
Physical Review Applied
15 citations, 0.12%
Science advances
15 citations, 0.12%
Microelectronics Journal
14 citations, 0.11%
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Citing publishers

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SPIE-Intl Soc Optical Eng
2215 citations, 17.16%
Elsevier
1430 citations, 11.08%
Institute of Electrical and Electronics Engineers (IEEE)
1298 citations, 10.06%
Optica Publishing Group
823 citations, 6.38%
Springer Nature
816 citations, 6.32%
IOP Publishing
750 citations, 5.81%
MDPI
609 citations, 4.72%
American Chemical Society (ACS)
565 citations, 4.38%
American Vacuum Society
541 citations, 4.19%
AIP Publishing
474 citations, 3.67%
Wiley
452 citations, 3.5%
Japan Society of Applied Physics
301 citations, 2.33%
Royal Society of Chemistry (RSC)
297 citations, 2.3%
The Technical Association of Photopolymers, Japan
143 citations, 1.11%
Taylor & Francis
92 citations, 0.71%
Pleiades Publishing
78 citations, 0.6%
Association for Computing Machinery (ACM)
61 citations, 0.47%
Walter de Gruyter
60 citations, 0.46%
American Physical Society (APS)
53 citations, 0.41%
Trans Tech Publications
46 citations, 0.36%
ASME International
33 citations, 0.26%
Hindawi Limited
32 citations, 0.25%
The Electrochemical Society
31 citations, 0.24%
Frontiers Media S.A.
28 citations, 0.22%
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
28 citations, 0.22%
Oxford University Press
27 citations, 0.21%
Cambridge University Press
23 citations, 0.18%
Institution of Engineering and Technology (IET)
23 citations, 0.18%
Shanghai Institute of Optics and Fine Mechanics
22 citations, 0.17%
SAGE
21 citations, 0.16%
19 citations, 0.15%
International Union of Crystallography (IUCr)
19 citations, 0.15%
World Scientific
17 citations, 0.13%
American Association for the Advancement of Science (AAAS)
17 citations, 0.13%
IntechOpen
15 citations, 0.12%
Beilstein-Institut
13 citations, 0.1%
Institute of Electrical Engineers of Japan (IEE Japan)
13 citations, 0.1%
Emerald
11 citations, 0.09%
Cold Spring Harbor Laboratory
11 citations, 0.09%
Science in China Press
10 citations, 0.08%
Annual Reviews
10 citations, 0.08%
Zhejiang University Press
9 citations, 0.07%
The Russian Academy of Sciences
8 citations, 0.06%
The Royal Society
7 citations, 0.05%
Public Library of Science (PLoS)
7 citations, 0.05%
IGI Global
7 citations, 0.05%
EDP Sciences
6 citations, 0.05%
Korean Society of Mechanical Engineers
6 citations, 0.05%
Japan Society of Mechanical Engineers
6 citations, 0.05%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
6 citations, 0.05%
The Korean Society of Precision Engineering
6 citations, 0.05%
Institute of Electronics, Information and Communications Engineers (IEICE)
6 citations, 0.05%
Opto-Electronic Advances
5 citations, 0.04%
Keldysh Institute of Applied Mathematics
5 citations, 0.04%
Bentham Science Publishers Ltd.
4 citations, 0.03%
4 citations, 0.03%
Society for Industrial and Applied Mathematics (SIAM)
4 citations, 0.03%
Laser Institute of America
4 citations, 0.03%
Optical Society of India
4 citations, 0.03%
Uspekhi Fizicheskikh Nauk Journal
4 citations, 0.03%
Japan Institute of Electronics Packaging
4 citations, 0.03%
Mary Ann Liebert
3 citations, 0.02%
Fuji Technology Press
3 citations, 0.02%
Tsinghua University Press
3 citations, 0.02%
The Korean Institute of Electrical and Electronic Material Engineers
3 citations, 0.02%
Akademizdatcenter Nauka
3 citations, 0.02%
Hans Publishers
3 citations, 0.02%
The Japan Society for Precision Engineering
3 citations, 0.02%
Proceedings of the National Academy of Sciences (PNAS)
2 citations, 0.02%
American Institute of Mathematical Sciences (AIMS)
2 citations, 0.02%
American Institute of Aeronautics and Astronautics (AIAA)
2 citations, 0.02%
Federal Informational-Analytical Center of the Defense Industry
2 citations, 0.02%
Information Processing Society of Japan
2 citations, 0.02%
Lviv Polytechnic National University
2 citations, 0.02%
American Association of Physics Teachers (AAPT)
2 citations, 0.02%
National Academy of Sciences of Ukraine - Institute of Semiconductor Physics
2 citations, 0.02%
2 citations, 0.02%
Thomas Telford
2 citations, 0.02%
Brieflands
2 citations, 0.02%
American Society for Photogrammetry and Remote Sensing
1 citation, 0.01%
IOS Press
1 citation, 0.01%
Ovid Technologies (Wolters Kluwer Health)
1 citation, 0.01%
1 citation, 0.01%
Begell House
1 citation, 0.01%
Georg Thieme Verlag KG
1 citation, 0.01%
American Society for Microbiology
1 citation, 0.01%
Image Processing Systems Institute of RAS
1 citation, 0.01%
MIT Press
1 citation, 0.01%
Ivanovo State University of Chemistry and Technology
1 citation, 0.01%
Korean Society of Industrial Engineering Chemistry
1 citation, 0.01%
Acoustical Society of America (ASA)
1 citation, 0.01%
The Company of Biologists
1 citation, 0.01%
Pensoft Publishers
1 citation, 0.01%
Instrument Society of America
1 citation, 0.01%
Journal of Neurosurgery Publishing Group (JNSPG)
1 citation, 0.01%
Crop Science Society of Japan
1 citation, 0.01%
Nonferrous Metals Society of China
1 citation, 0.01%
Academic Publishing Limited
1 citation, 0.01%
Electromagnetics Academy
1 citation, 0.01%
Japanese Society for Medical and Biological Engineering
1 citation, 0.01%
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Publishing organizations

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Taiwan Semiconductor Manufacturing Company
42 publications, 2.52%
Interuniversity Microelectronics Centre
33 publications, 1.98%
National Institute of Standards and Technology
22 publications, 1.32%
Paul Scherrer Institute
20 publications, 1.2%
University of Texas at Austin
20 publications, 1.2%
Lawrence Berkeley National Laboratory
15 publications, 0.9%
Katholieke Universiteit Leuven
13 publications, 0.78%
Samsung
12 publications, 0.72%
Institute of Microelectronics, Chinese Academy of Sciences
11 publications, 0.66%
Central Electronics Engineering Research Institute
10 publications, 0.6%
Dalian University of Technology
10 publications, 0.6%
Fraunhofer Institute for Integrated Systems and Device Technology
10 publications, 0.6%
Toshiba Corporation
10 publications, 0.6%
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
10 publications, 0.6%
National Tsing Hua University
9 publications, 0.54%
Georgia Institute of technology
9 publications, 0.54%
State University of New York Polytechnic Institute
9 publications, 0.54%
University of Chinese Academy of Sciences
8 publications, 0.48%
National Cheng Kung University
8 publications, 0.48%
Texas A&M University
8 publications, 0.48%
École Polytechnique Fédérale de Lausanne
7 publications, 0.42%
Delft University of Technology
7 publications, 0.42%
Hanyang University
7 publications, 0.42%
University of California, Berkeley
7 publications, 0.42%
Rochester Institute of Technology
7 publications, 0.42%
Beijing Institute of Technology
6 publications, 0.36%
University of Twente
6 publications, 0.36%
National Sun Yat-sen University
6 publications, 0.36%
National Taiwan University
6 publications, 0.36%
National Central University
6 publications, 0.36%
Chinese University of Hong Kong
6 publications, 0.36%
University of Chicago
6 publications, 0.36%
Osaka University
6 publications, 0.36%
Huazhong University of Science and Technology
5 publications, 0.3%
University of Birmingham
5 publications, 0.3%
National Centre of Scientific Research "Demokritos"
5 publications, 0.3%
University of Illinois Urbana-Champaign
5 publications, 0.3%
Fraunhofer Institute for Applied Optics and Precision Engineering
5 publications, 0.3%
Montana State University
5 publications, 0.3%
Watson Research Center
5 publications, 0.3%
Indian Institute of Technology Madras
4 publications, 0.24%
Tsinghua University
4 publications, 0.24%
Peking University
4 publications, 0.24%
Autonomous University of Barcelona
4 publications, 0.24%
Massachusetts Institute of Technology
4 publications, 0.24%
Cornell University
4 publications, 0.24%
Stanford University
4 publications, 0.24%
Yonsei University
4 publications, 0.24%
Friedrich Schiller University Jena
4 publications, 0.24%
Tohoku University
4 publications, 0.24%
Ilmenau University of Technology
4 publications, 0.24%
University of Tokyo
4 publications, 0.24%
Institute of Microelectronics of Barcelona
4 publications, 0.24%
Brigham Young University
4 publications, 0.24%
Institute for Physics of Microstructures of the Russian Academy of Sciences
3 publications, 0.18%
Indian Institute of Science
3 publications, 0.18%
University of Tabriz
3 publications, 0.18%
Indian Institute of Technology Kharagpur
3 publications, 0.18%
Fudan University
3 publications, 0.18%
Karlsruhe Institute of Technology
3 publications, 0.18%
Grenoble Alpes University
3 publications, 0.18%
VTT Technical Research Centre of Finland
3 publications, 0.18%
Feng Chia University
3 publications, 0.18%
Argonne National Laboratory
3 publications, 0.18%
Boston University
3 publications, 0.18%
National Institute of Advanced Industrial Science and Technology
3 publications, 0.18%
National University of Defense Technology
3 publications, 0.18%
Fraunhofer Institute for Laser Technology
3 publications, 0.18%
RWTH Aachen University
3 publications, 0.18%
Albert Ludwig University of Freiburg
3 publications, 0.18%
University of Erlangen–Nuremberg
3 publications, 0.18%
Leiden University
3 publications, 0.18%
Physikalisch-Technische Bundesanstalt
3 publications, 0.18%
University of Stuttgart
3 publications, 0.18%
University of Wisconsin–Madison
3 publications, 0.18%
Waseda University
3 publications, 0.18%
Ain Shams University
3 publications, 0.18%
Royal Philips
3 publications, 0.18%
University of Pennsylvania
3 publications, 0.18%
University of Alberta
3 publications, 0.18%
University of Manitoba
3 publications, 0.18%
Institut Néel
3 publications, 0.18%
University of Dayton
3 publications, 0.18%
University at Albany, State University of New York
3 publications, 0.18%
King Abdullah University of Science and Technology
2 publications, 0.12%
Sharif University of Technology
2 publications, 0.12%
Indian Institute of Technology Kanpur
2 publications, 0.12%
Indian Institute of Technology Gandhinagar
2 publications, 0.12%
Malaviya National Institute of Technology Jaipur
2 publications, 0.12%
Shanghai Jiao Tong University
2 publications, 0.12%
Harbin Institute of Technology
2 publications, 0.12%
Ben-Gurion University of the Negev
2 publications, 0.12%
University of Electronic Science and Technology of China
2 publications, 0.12%
University of Science, Malaysia
2 publications, 0.12%
Indian Space Research Organisation
2 publications, 0.12%
Kurukshetra University
2 publications, 0.12%
Southeast University
2 publications, 0.12%
ETH Zurich
2 publications, 0.12%
University of New South Wales
2 publications, 0.12%
North University of China
2 publications, 0.12%
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Publishing countries

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USA, 364, 21.88%
USA
364 publications, 21.88%
China, 179, 10.76%
China
179 publications, 10.76%
Japan, 95, 5.71%
Japan
95 publications, 5.71%
Germany, 76, 4.57%
Germany
76 publications, 4.57%
Belgium, 43, 2.58%
Belgium
43 publications, 2.58%
Netherlands, 42, 2.52%
Netherlands
42 publications, 2.52%
Republic of Korea, 40, 2.4%
Republic of Korea
40 publications, 2.4%
India, 34, 2.04%
India
34 publications, 2.04%
Switzerland, 33, 1.98%
Switzerland
33 publications, 1.98%
France, 23, 1.38%
France
23 publications, 1.38%
Israel, 15, 0.9%
Israel
15 publications, 0.9%
Canada, 13, 0.78%
Canada
13 publications, 0.78%
Iran, 10, 0.6%
Iran
10 publications, 0.6%
Russia, 9, 0.54%
Russia
9 publications, 0.54%
United Kingdom, 9, 0.54%
United Kingdom
9 publications, 0.54%
Spain, 7, 0.42%
Spain
7 publications, 0.42%
Greece, 6, 0.36%
Greece
6 publications, 0.36%
Egypt, 6, 0.36%
Egypt
6 publications, 0.36%
Italy, 5, 0.3%
Italy
5 publications, 0.3%
Malaysia, 5, 0.3%
Malaysia
5 publications, 0.3%
Australia, 4, 0.24%
Australia
4 publications, 0.24%
Austria, 4, 0.24%
Austria
4 publications, 0.24%
Ireland, 4, 0.24%
Ireland
4 publications, 0.24%
Mexico, 4, 0.24%
Mexico
4 publications, 0.24%
Singapore, 4, 0.24%
Singapore
4 publications, 0.24%
Finland, 4, 0.24%
Finland
4 publications, 0.24%
Brazil, 3, 0.18%
Brazil
3 publications, 0.18%
New Zealand, 2, 0.12%
New Zealand
2 publications, 0.12%
UAE, 2, 0.12%
UAE
2 publications, 0.12%
Romania, 2, 0.12%
Romania
2 publications, 0.12%
Saudi Arabia, 2, 0.12%
Saudi Arabia
2 publications, 0.12%
Armenia, 1, 0.06%
Armenia
1 publication, 0.06%
Denmark, 1, 0.06%
Denmark
1 publication, 0.06%
Iraq, 1, 0.06%
Iraq
1 publication, 0.06%
Colombia, 1, 0.06%
Colombia
1 publication, 0.06%
Latvia, 1, 0.06%
Latvia
1 publication, 0.06%
Lithuania, 1, 0.06%
Lithuania
1 publication, 0.06%
Norway, 1, 0.06%
Norway
1 publication, 0.06%
Pakistan, 1, 0.06%
Pakistan
1 publication, 0.06%
Poland, 1, 0.06%
Poland
1 publication, 0.06%
Thailand, 1, 0.06%
Thailand
1 publication, 0.06%
Turkey, 1, 0.06%
Turkey
1 publication, 0.06%
Czech Republic, 1, 0.06%
Czech Republic
1 publication, 0.06%
Sweden, 1, 0.06%
Sweden
1 publication, 0.06%
South Africa, 1, 0.06%
South Africa
1 publication, 0.06%
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