Journal of Micro/ Nanolithography, MEMS, and MOEMS

SPIE-Intl Soc Optical Eng

ISSN: 19325150, 19325134

Journal publications in Cobalt

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SCImago

SJR

0.393

CiteScore

3.4

Categories

Mechanical Engineering

Atomic and Molecular Physics, and Optics

Condensed Matter Physics

Electrical and Electronic Engineering

Electronic, Optical and Magnetic Materials

Nanoscience and Nanotechnology

Areas

Engineering

Materials Science

Physics and Astronomy

Years of issue

2007-2023

journal names

Journal of Micro/ Nanolithography, MEMS, and MOEMS

All time from 2020

Publications

1 664

Citations

12 189

h-index

Top-3 citing journals

Journal of Micro/ Nanolithography, MEMS, and MOEMS (873 citations)

Proceedings of SPIE - The International Society for Optical Engineering (822 citations)

Journal of Vacuum Science and Technology B (386 citations)

Top-3 organizations

All time in 5 years

Taiwan Semiconductor Manufacturing Company (42 publications)

Interuniversity Microelectronics Centre (33 publications)

National Institute of Standards and Technology (22 publications)

Top-3 countries

All time in 5 years

USA (364 publications)

China (179 publications)

Japan (95 publications)

USA (7 publications)

China (4 publications)

Germany (4 publications)

Most cited in 5 years

By date By citations

Publication title

Since

For

By date By citations

	100 200 300 400 500 600 700 800 900
Journal of Micro/ Nanolithography, MEMS, and MOEMS	Journal of Micro/ Nanolithography, MEMS, and MOEMS, 873, 7.16% Journal of Micro/ Nanolithography, MEMS, and MOEMS 873 citations, 7.16%
Proceedings of SPIE - The International Society for Optical Engineering	Proceedings of SPIE - The International Society for Optical Engineering, 822, 6.74% Proceedings of SPIE - The International Society for Optical Engineering 822 citations, 6.74%
Journal of Vacuum Science and Technology B	Journal of Vacuum Science and Technology B, 386, 3.17% Journal of Vacuum Science and Technology B 386 citations, 3.17%
Optics Express	Optics Express, 382, 3.13% Optics Express 382 citations, 3.13%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes	Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 284, 2.33% Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes 284 citations, 2.33%
Applied Optics	Applied Optics, 229, 1.88% Applied Optics 229 citations, 1.88%
Microelectronic Engineering	Microelectronic Engineering, 185, 1.52% Microelectronic Engineering 185 citations, 1.52%
Micromachines	Micromachines, 182, 1.49% Micromachines 182 citations, 1.49%
Journal of Micromechanics and Microengineering	Journal of Micromechanics and Microengineering, 173, 1.42% Journal of Micromechanics and Microengineering 173 citations, 1.42%
Journal of Micro/Nanopatterning Materials and Metrology	Journal of Micro/Nanopatterning Materials and Metrology, 158, 1.3% Journal of Micro/Nanopatterning Materials and Metrology 158 citations, 1.3%
Journal of Photopolymer Science and Technology	Journal of Photopolymer Science and Technology, 153, 1.26% Journal of Photopolymer Science and Technology 153 citations, 1.26%
Journal of Applied Physics	Journal of Applied Physics, 143, 1.17% Journal of Applied Physics 143 citations, 1.17%
ACS applied materials & interfaces	ACS applied materials & interfaces, 126, 1.03% ACS applied materials & interfaces 126 citations, 1.03%
Measurement Science and Technology	Measurement Science and Technology, 116, 0.95% Measurement Science and Technology 116 citations, 0.95%
Applied Physics Letters	Applied Physics Letters, 113, 0.93% Applied Physics Letters 113 citations, 0.93%
Nanotechnology	Nanotechnology, 112, 0.92% Nanotechnology 112 citations, 0.92%
Journal of Microelectromechanical Systems	Journal of Microelectromechanical Systems, 111, 0.91% Journal of Microelectromechanical Systems 111 citations, 0.91%
Sensors and Actuators, A: Physical	Sensors and Actuators, A: Physical, 102, 0.84% Sensors and Actuators, A: Physical 102 citations, 0.84%
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems	IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 95, 0.78% IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 95 citations, 0.78%
Microsystem Technologies	Microsystem Technologies, 89, 0.73% Microsystem Technologies 89 citations, 0.73%
Sensors	Sensors, 85, 0.7% Sensors 85 citations, 0.7%
IEEE Sensors Journal	IEEE Sensors Journal, 79, 0.65% IEEE Sensors Journal 79 citations, 0.65%
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena	Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, 74, 0.61% Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena 74 citations, 0.61%
IEEE Transactions on Semiconductor Manufacturing	IEEE Transactions on Semiconductor Manufacturing, 62, 0.51% IEEE Transactions on Semiconductor Manufacturing 62 citations, 0.51%
ACS Nano	ACS Nano, 57, 0.47% ACS Nano 57 citations, 0.47%
Optical Engineering	Optical Engineering, 57, 0.47% Optical Engineering 57 citations, 0.47%
Scientific Reports	Scientific Reports, 55, 0.45% Scientific Reports 55 citations, 0.45%
Journal of Materials Chemistry C	Journal of Materials Chemistry C, 52, 0.43% Journal of Materials Chemistry C 52 citations, 0.43%
Optics Letters	Optics Letters, 51, 0.42% Optics Letters 51 citations, 0.42%
Applied Sciences (Switzerland)	Applied Sciences (Switzerland), 51, 0.42% Applied Sciences (Switzerland) 51 citations, 0.42%
Applied Surface Science	Applied Surface Science, 50, 0.41% Applied Surface Science 50 citations, 0.41%
Journal Physics D: Applied Physics	Journal Physics D: Applied Physics, 50, 0.41% Journal Physics D: Applied Physics 50 citations, 0.41%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 45, 0.37% Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 45 citations, 0.37%
AIP Advances	AIP Advances, 44, 0.36% AIP Advances 44 citations, 0.36%
Macromolecules	Macromolecules, 44, 0.36% Macromolecules 44 citations, 0.36%
Review of Scientific Instruments	Review of Scientific Instruments, 43, 0.35% Review of Scientific Instruments 43 citations, 0.35%
Optics Communications	Optics Communications, 43, 0.35% Optics Communications 43 citations, 0.35%
Nanomaterials	Nanomaterials, 41, 0.34% Nanomaterials 41 citations, 0.34%
Optics and Laser Technology	Optics and Laser Technology, 40, 0.33% Optics and Laser Technology 40 citations, 0.33%
Optics and Lasers in Engineering	Optics and Lasers in Engineering, 40, 0.33% Optics and Lasers in Engineering 40 citations, 0.33%
Journal of the Optical Society of America A: Optics and Image Science, and Vision	Journal of the Optical Society of America A: Optics and Image Science, and Vision, 39, 0.32% Journal of the Optical Society of America A: Optics and Image Science, and Vision 39 citations, 0.32%
Frontiers of Nanoscience	Frontiers of Nanoscience, 37, 0.3% Frontiers of Nanoscience 37 citations, 0.3%
Physical Chemistry Chemical Physics	Physical Chemistry Chemical Physics, 36, 0.3% Physical Chemistry Chemical Physics 36 citations, 0.3%
Polymers	Polymers, 35, 0.29% Polymers 35 citations, 0.29%
Nanoscale	Nanoscale, 34, 0.28% Nanoscale 34 citations, 0.28%
Micro and Nano Engineering	Micro and Nano Engineering, 34, 0.28% Micro and Nano Engineering 34 citations, 0.28%
Photonics	Photonics, 33, 0.27% Photonics 33 citations, 0.27%
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena	Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 33, 0.27% Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 33 citations, 0.27%
Advanced Materials	Advanced Materials, 32, 0.26% Advanced Materials 32 citations, 0.26%
IEEE Access	IEEE Access, 32, 0.26% IEEE Access 32 citations, 0.26%
Chemistry of Materials	Chemistry of Materials, 31, 0.25% Chemistry of Materials 31 citations, 0.25%
Physics of Plasmas	Physics of Plasmas, 31, 0.25% Physics of Plasmas 31 citations, 0.25%
Advanced Optical Technologies	Advanced Optical Technologies, 30, 0.25% Advanced Optical Technologies 30 citations, 0.25%
Thin Solid Films	Thin Solid Films, 30, 0.25% Thin Solid Films 30 citations, 0.25%
Materials	Materials, 29, 0.24% Materials 29 citations, 0.24%
Ultramicroscopy	Ultramicroscopy, 28, 0.23% Ultramicroscopy 28 citations, 0.23%
Lab on a Chip	Lab on a Chip, 28, 0.23% Lab on a Chip 28 citations, 0.23%
Acta Physica Sinica	Acta Physica Sinica, 28, 0.23% Acta Physica Sinica 28 citations, 0.23%
Journal of Optics (United Kingdom)	Journal of Optics (United Kingdom), 28, 0.23% Journal of Optics (United Kingdom) 28 citations, 0.23%
Langmuir	Langmuir, 27, 0.22% Langmuir 27 citations, 0.22%
Nano Letters	Nano Letters, 26, 0.21% Nano Letters 26 citations, 0.21%
Microsystems and Nanoengineering	Microsystems and Nanoengineering, 26, 0.21% Microsystems and Nanoengineering 26 citations, 0.21%
Applied Physics Express	Applied Physics Express, 26, 0.21% Applied Physics Express 26 citations, 0.21%
IEEE Transactions on Electron Devices	IEEE Transactions on Electron Devices, 26, 0.21% IEEE Transactions on Electron Devices 26 citations, 0.21%
RSC Advances	RSC Advances, 24, 0.2% RSC Advances 24 citations, 0.2%
Smart Materials and Structures	Smart Materials and Structures, 23, 0.19% Smart Materials and Structures 23 citations, 0.19%
IEEE Transactions on Nanotechnology	IEEE Transactions on Nanotechnology, 22, 0.18% IEEE Transactions on Nanotechnology 22 citations, 0.18%
Nature Electronics	Nature Electronics, 22, 0.18% Nature Electronics 22 citations, 0.18%
Journal of Physics: Conference Series	Journal of Physics: Conference Series, 21, 0.17% Journal of Physics: Conference Series 21 citations, 0.17%
ECS Journal of Solid State Science and Technology	ECS Journal of Solid State Science and Technology, 21, 0.17% ECS Journal of Solid State Science and Technology 21 citations, 0.17%
ACS Omega	ACS Omega, 21, 0.17% ACS Omega 21 citations, 0.17%
Sensors and Actuators, B: Chemical	Sensors and Actuators, B: Chemical, 21, 0.17% Sensors and Actuators, B: Chemical 21 citations, 0.17%
Advanced Functional Materials	Advanced Functional Materials, 20, 0.16% Advanced Functional Materials 20 citations, 0.16%
Journal of Physical Chemistry C	Journal of Physical Chemistry C, 20, 0.16% Journal of Physical Chemistry C 20 citations, 0.16%
Russian Microelectronics	Russian Microelectronics, 20, 0.16% Russian Microelectronics 20 citations, 0.16%
Advanced Optical Materials	Advanced Optical Materials, 19, 0.16% Advanced Optical Materials 19 citations, 0.16%
Small	Small, 19, 0.16% Small 19 citations, 0.16%
IEEE Photonics Journal	IEEE Photonics Journal, 19, 0.16% IEEE Photonics Journal 19 citations, 0.16%
Precision Engineering	Precision Engineering, 19, 0.16% Precision Engineering 19 citations, 0.16%
Advanced Materials Research	Advanced Materials Research, 19, 0.16% Advanced Materials Research 19 citations, 0.16%
Microelectronics Reliability	Microelectronics Reliability, 18, 0.15% Microelectronics Reliability 18 citations, 0.15%
IEEE Photonics Technology Letters	IEEE Photonics Technology Letters, 18, 0.15% IEEE Photonics Technology Letters 18 citations, 0.15%
ACS Applied Nano Materials	ACS Applied Nano Materials, 17, 0.14% ACS Applied Nano Materials 17 citations, 0.14%
IEEE Transactions on Instrumentation and Measurement	IEEE Transactions on Instrumentation and Measurement, 17, 0.14% IEEE Transactions on Instrumentation and Measurement 17 citations, 0.14%
Applied Physics A: Materials Science and Processing	Applied Physics A: Materials Science and Processing, 17, 0.14% Applied Physics A: Materials Science and Processing 17 citations, 0.14%
Optik	Optik, 17, 0.14% Optik 17 citations, 0.14%
International Journal of Extreme Manufacturing	International Journal of Extreme Manufacturing, 17, 0.14% International Journal of Extreme Manufacturing 17 citations, 0.14%
Advanced Materials Technologies	Advanced Materials Technologies, 16, 0.13% Advanced Materials Technologies 16 citations, 0.13%
Measurement: Journal of the International Measurement Confederation	Measurement: Journal of the International Measurement Confederation, 16, 0.13% Measurement: Journal of the International Measurement Confederation 16 citations, 0.13%
Microfluidics and Nanofluidics	Microfluidics and Nanofluidics, 16, 0.13% Microfluidics and Nanofluidics 16 citations, 0.13%
Journal of the Optical Society of America B: Optical Physics	Journal of the Optical Society of America B: Optical Physics, 16, 0.13% Journal of the Optical Society of America B: Optical Physics 16 citations, 0.13%
IEEE TRANSACTIONS ON COMPUTATIONAL IMAGING	IEEE TRANSACTIONS ON COMPUTATIONAL IMAGING, 16, 0.13% IEEE TRANSACTIONS ON COMPUTATIONAL IMAGING 16 citations, 0.13%
Nature Communications	Nature Communications, 15, 0.12% Nature Communications 15 citations, 0.12%
Micro and Nano Letters	Micro and Nano Letters, 15, 0.12% Micro and Nano Letters 15 citations, 0.12%
Journal of Applied Crystallography	Journal of Applied Crystallography, 15, 0.12% Journal of Applied Crystallography 15 citations, 0.12%
Advanced Materials Interfaces	Advanced Materials Interfaces, 15, 0.12% Advanced Materials Interfaces 15 citations, 0.12%
Microelectronics Journal	Microelectronics Journal, 14, 0.11% Microelectronics Journal 14 citations, 0.11%
Journal of Modern Optics	Journal of Modern Optics, 14, 0.11% Journal of Modern Optics 14 citations, 0.11%
Analytical Chemistry	Analytical Chemistry, 14, 0.11% Analytical Chemistry 14 citations, 0.11%
Science advances	Science advances, 14, 0.11% Science advances 14 citations, 0.11%
Show all (70 more)
	100 200 300 400 500 600 700 800 900

	500 1000 1500 2000 2500
SPIE-Intl Soc Optical Eng	SPIE-Intl Soc Optical Eng, 2094, 17.18% SPIE-Intl Soc Optical Eng 2094 citations, 17.18%
Elsevier	Elsevier, 1366, 11.21% Elsevier 1366 citations, 11.21%
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 1156, 9.48% Institute of Electrical and Electronics Engineers (IEEE) 1156 citations, 9.48%
Optica Publishing Group	Optica Publishing Group, 775, 6.36% Optica Publishing Group 775 citations, 6.36%
Springer Nature	Springer Nature, 739, 6.06% Springer Nature 739 citations, 6.06%
IOP Publishing	IOP Publishing, 709, 5.82% IOP Publishing 709 citations, 5.82%
MDPI	MDPI, 550, 4.51% MDPI 550 citations, 4.51%
American Vacuum Society	American Vacuum Society, 527, 4.32% American Vacuum Society 527 citations, 4.32%
American Chemical Society (ACS)	American Chemical Society (ACS), 495, 4.06% American Chemical Society (ACS) 495 citations, 4.06%
AIP Publishing	AIP Publishing, 449, 3.68% AIP Publishing 449 citations, 3.68%
Wiley	Wiley, 391, 3.21% Wiley 391 citations, 3.21%
Japan Society of Applied Physics	Japan Society of Applied Physics, 301, 2.47% Japan Society of Applied Physics 301 citations, 2.47%
Royal Society of Chemistry (RSC)	Royal Society of Chemistry (RSC), 270, 2.22% Royal Society of Chemistry (RSC) 270 citations, 2.22%
The Technical Association of Photopolymers, Japan	The Technical Association of Photopolymers, Japan, 128, 1.05% The Technical Association of Photopolymers, Japan 128 citations, 1.05%
Taylor & Francis	Taylor & Francis, 90, 0.74% Taylor & Francis 90 citations, 0.74%
Pleiades Publishing	Pleiades Publishing, 75, 0.62% Pleiades Publishing 75 citations, 0.62%
Walter de Gruyter	Walter de Gruyter, 55, 0.45% Walter de Gruyter 55 citations, 0.45%
Association for Computing Machinery (ACM)	Association for Computing Machinery (ACM), 52, 0.43% Association for Computing Machinery (ACM) 52 citations, 0.43%
American Physical Society (APS)	American Physical Society (APS), 49, 0.4% American Physical Society (APS) 49 citations, 0.4%
Trans Tech Publications	Trans Tech Publications, 46, 0.38% Trans Tech Publications 46 citations, 0.38%
Hindawi Limited	Hindawi Limited, 32, 0.26% Hindawi Limited 32 citations, 0.26%
ASME International	ASME International, 32, 0.26% ASME International 32 citations, 0.26%
The Electrochemical Society	The Electrochemical Society, 31, 0.25% The Electrochemical Society 31 citations, 0.25%
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences	Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, 28, 0.23% Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences 28 citations, 0.23%
	, 27, 0.22% 27 citations, 0.22%
Frontiers Media S.A.	Frontiers Media S.A., 25, 0.21% Frontiers Media S.A. 25 citations, 0.21%
Cambridge University Press	Cambridge University Press, 23, 0.19% Cambridge University Press 23 citations, 0.19%
Institution of Engineering and Technology (IET)	Institution of Engineering and Technology (IET), 23, 0.19% Institution of Engineering and Technology (IET) 23 citations, 0.19%
Oxford University Press	Oxford University Press, 22, 0.18% Oxford University Press 22 citations, 0.18%
SAGE	SAGE, 20, 0.16% SAGE 20 citations, 0.16%
International Union of Crystallography (IUCr)	International Union of Crystallography (IUCr), 19, 0.16% International Union of Crystallography (IUCr) 19 citations, 0.16%
World Scientific	World Scientific, 16, 0.13% World Scientific 16 citations, 0.13%
American Association for the Advancement of Science (AAAS)	American Association for the Advancement of Science (AAAS), 16, 0.13% American Association for the Advancement of Science (AAAS) 16 citations, 0.13%
Shanghai Institute of Optics and Fine Mechanics	Shanghai Institute of Optics and Fine Mechanics, 14, 0.11% Shanghai Institute of Optics and Fine Mechanics 14 citations, 0.11%
Beilstein-Institut	Beilstein-Institut, 13, 0.11% Beilstein-Institut 13 citations, 0.11%
Institute of Electrical Engineers of Japan (IEE Japan)	Institute of Electrical Engineers of Japan (IEE Japan), 13, 0.11% Institute of Electrical Engineers of Japan (IEE Japan) 13 citations, 0.11%
IntechOpen	IntechOpen, 12, 0.1% IntechOpen 12 citations, 0.1%
Emerald	Emerald, 10, 0.08% Emerald 10 citations, 0.08%
Science in China Press	Science in China Press, 10, 0.08% Science in China Press 10 citations, 0.08%
Cold Spring Harbor Laboratory	Cold Spring Harbor Laboratory, 10, 0.08% Cold Spring Harbor Laboratory 10 citations, 0.08%
Annual Reviews	Annual Reviews, 10, 0.08% Annual Reviews 10 citations, 0.08%
The Russian Academy of Sciences	The Russian Academy of Sciences, 8, 0.07% The Russian Academy of Sciences 8 citations, 0.07%
The Royal Society	The Royal Society, 7, 0.06% The Royal Society 7 citations, 0.06%
Public Library of Science (PLoS)	Public Library of Science (PLoS), 7, 0.06% Public Library of Science (PLoS) 7 citations, 0.06%
IGI Global	IGI Global, 7, 0.06% IGI Global 7 citations, 0.06%
Korean Society of Mechanical Engineers	Korean Society of Mechanical Engineers, 6, 0.05% Korean Society of Mechanical Engineers 6 citations, 0.05%
Japan Society of Mechanical Engineers	Japan Society of Mechanical Engineers, 6, 0.05% Japan Society of Mechanical Engineers 6 citations, 0.05%
The Korean Society of Precision Engineering	The Korean Society of Precision Engineering, 6, 0.05% The Korean Society of Precision Engineering 6 citations, 0.05%
The Chemical Society of Japan	The Chemical Society of Japan, 6, 0.05% The Chemical Society of Japan 6 citations, 0.05%
	, 5, 0.04% 5 citations, 0.04%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences	Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 5, 0.04% Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 5 citations, 0.04%
Keldysh Institute of Applied Mathematics	Keldysh Institute of Applied Mathematics, 5, 0.04% Keldysh Institute of Applied Mathematics 5 citations, 0.04%
Institute of Electronics, Information and Communications Engineers (IEICE)	Institute of Electronics, Information and Communications Engineers (IEICE), 5, 0.04% Institute of Electronics, Information and Communications Engineers (IEICE) 5 citations, 0.04%
Society for Industrial and Applied Mathematics (SIAM)	Society for Industrial and Applied Mathematics (SIAM), 4, 0.03% Society for Industrial and Applied Mathematics (SIAM) 4 citations, 0.03%
Laser Institute of America	Laser Institute of America, 4, 0.03% Laser Institute of America 4 citations, 0.03%
Uspekhi Fizicheskikh Nauk Journal	Uspekhi Fizicheskikh Nauk Journal, 4, 0.03% Uspekhi Fizicheskikh Nauk Journal 4 citations, 0.03%
Japan Institute of Electronics Packaging	Japan Institute of Electronics Packaging, 4, 0.03% Japan Institute of Electronics Packaging 4 citations, 0.03%
Bentham Science Publishers Ltd.	Bentham Science Publishers Ltd., 3, 0.02% Bentham Science Publishers Ltd. 3 citations, 0.02%
EDP Sciences	EDP Sciences, 3, 0.02% EDP Sciences 3 citations, 0.02%
Mary Ann Liebert	Mary Ann Liebert, 3, 0.02% Mary Ann Liebert 3 citations, 0.02%
Zhejiang University Press	Zhejiang University Press, 3, 0.02% Zhejiang University Press 3 citations, 0.02%
The Korean Institute of Electrical and Electronic Material Engineers	The Korean Institute of Electrical and Electronic Material Engineers, 3, 0.02% The Korean Institute of Electrical and Electronic Material Engineers 3 citations, 0.02%
Optical Society of India	Optical Society of India, 3, 0.02% Optical Society of India 3 citations, 0.02%
Hans Publishers	Hans Publishers, 3, 0.02% Hans Publishers 3 citations, 0.02%
Ovid Technologies (Wolters Kluwer Health)	Ovid Technologies (Wolters Kluwer Health), 2, 0.02% Ovid Technologies (Wolters Kluwer Health) 2 citations, 0.02%
Proceedings of the National Academy of Sciences (PNAS)	Proceedings of the National Academy of Sciences (PNAS), 2, 0.02% Proceedings of the National Academy of Sciences (PNAS) 2 citations, 0.02%
American Institute of Mathematical Sciences (AIMS)	American Institute of Mathematical Sciences (AIMS), 2, 0.02% American Institute of Mathematical Sciences (AIMS) 2 citations, 0.02%
Federal Informational-Analytical Center of the Defense Industry	Federal Informational-Analytical Center of the Defense Industry, 2, 0.02% Federal Informational-Analytical Center of the Defense Industry 2 citations, 0.02%
Information Processing Society of Japan	Information Processing Society of Japan, 2, 0.02% Information Processing Society of Japan 2 citations, 0.02%
Korean Institute of Metals and Materials	Korean Institute of Metals and Materials, 2, 0.02% Korean Institute of Metals and Materials 2 citations, 0.02%
Lviv Polytechnic National University	Lviv Polytechnic National University, 2, 0.02% Lviv Polytechnic National University 2 citations, 0.02%
American Association of Physics Teachers (AAPT)	American Association of Physics Teachers (AAPT), 2, 0.02% American Association of Physics Teachers (AAPT) 2 citations, 0.02%
National Academy of Sciences of Ukraine - Institute of Semiconductor Physics	National Academy of Sciences of Ukraine - Institute of Semiconductor Physics, 2, 0.02% National Academy of Sciences of Ukraine - Institute of Semiconductor Physics 2 citations, 0.02%
	, 2, 0.02% 2 citations, 0.02%
Thomas Telford	Thomas Telford, 2, 0.02% Thomas Telford 2 citations, 0.02%
American Society for Photogrammetry and Remote Sensing	American Society for Photogrammetry and Remote Sensing, 1, 0.01% American Society for Photogrammetry and Remote Sensing 1 citation, 0.01%
IOS Press	IOS Press, 1, 0.01% IOS Press 1 citation, 0.01%
	, 1, 0.01% 1 citation, 0.01%
Begell House	Begell House, 1, 0.01% Begell House 1 citation, 0.01%
American Society for Microbiology	American Society for Microbiology, 1, 0.01% American Society for Microbiology 1 citation, 0.01%
Image Processing Systems Institute of RAS	Image Processing Systems Institute of RAS, 1, 0.01% Image Processing Systems Institute of RAS 1 citation, 0.01%
MIT Press	MIT Press, 1, 0.01% MIT Press 1 citation, 0.01%
Ivanovo State University of Chemistry and Technology	Ivanovo State University of Chemistry and Technology, 1, 0.01% Ivanovo State University of Chemistry and Technology 1 citation, 0.01%
Korean Society of Industrial Engineering Chemistry	Korean Society of Industrial Engineering Chemistry, 1, 0.01% Korean Society of Industrial Engineering Chemistry 1 citation, 0.01%
Acoustical Society of America (ASA)	Acoustical Society of America (ASA), 1, 0.01% Acoustical Society of America (ASA) 1 citation, 0.01%
The Company of Biologists	The Company of Biologists, 1, 0.01% The Company of Biologists 1 citation, 0.01%
Pensoft Publishers	Pensoft Publishers, 1, 0.01% Pensoft Publishers 1 citation, 0.01%
	, 1, 0.01% 1 citation, 0.01%
Fuji Technology Press	Fuji Technology Press, 1, 0.01% Fuji Technology Press 1 citation, 0.01%
Biophysical Society	Biophysical Society, 1, 0.01% Biophysical Society 1 citation, 0.01%
Instrument Society of America	Instrument Society of America, 1, 0.01% Instrument Society of America 1 citation, 0.01%
Journal of Neurosurgery Publishing Group (JNSPG)	Journal of Neurosurgery Publishing Group (JNSPG), 1, 0.01% Journal of Neurosurgery Publishing Group (JNSPG) 1 citation, 0.01%
Crop Science Society of Japan	Crop Science Society of Japan, 1, 0.01% Crop Science Society of Japan 1 citation, 0.01%
Nonferrous Metals Society of China	Nonferrous Metals Society of China, 1, 0.01% Nonferrous Metals Society of China 1 citation, 0.01%
Academic Publishing Limited	Academic Publishing Limited, 1, 0.01% Academic Publishing Limited 1 citation, 0.01%
Electromagnetics Academy	Electromagnetics Academy, 1, 0.01% Electromagnetics Academy 1 citation, 0.01%
Tsinghua University Press	Tsinghua University Press, 1, 0.01% Tsinghua University Press 1 citation, 0.01%
Japanese Society for Medical and Biological Engineering	Japanese Society for Medical and Biological Engineering, 1, 0.01% Japanese Society for Medical and Biological Engineering 1 citation, 0.01%
Shanghai Jiaotong University Press	Shanghai Jiaotong University Press, 1, 0.01% Shanghai Jiaotong University Press 1 citation, 0.01%
Institute of Molecular Biology and Genetics (NAS Ukraine)	Institute of Molecular Biology and Genetics (NAS Ukraine), 1, 0.01% Institute of Molecular Biology and Genetics (NAS Ukraine) 1 citation, 0.01%
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	5 10 15 20 25 30 35 40 45
Taiwan Semiconductor Manufacturing Company	Taiwan Semiconductor Manufacturing Company, 42, 2.52% Taiwan Semiconductor Manufacturing Company 42 publications, 2.52%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 33, 1.98% Interuniversity Microelectronics Centre 33 publications, 1.98%
National Institute of Standards and Technology	National Institute of Standards and Technology, 22, 1.32% National Institute of Standards and Technology 22 publications, 1.32%
Paul Scherrer Institute	Paul Scherrer Institute, 20, 1.2% Paul Scherrer Institute 20 publications, 1.2%
University of Texas at Austin	University of Texas at Austin, 20, 1.2% University of Texas at Austin 20 publications, 1.2%
Lawrence Berkeley National Laboratory	Lawrence Berkeley National Laboratory, 15, 0.9% Lawrence Berkeley National Laboratory 15 publications, 0.9%
Katholieke Universiteit Leuven	Katholieke Universiteit Leuven, 13, 0.78% Katholieke Universiteit Leuven 13 publications, 0.78%
Samsung	Samsung, 12, 0.72% Samsung 12 publications, 0.72%
Central Electronics Engineering Research Institute	Central Electronics Engineering Research Institute, 10, 0.6% Central Electronics Engineering Research Institute 10 publications, 0.6%
Dalian University of Technology	Dalian University of Technology, 10, 0.6% Dalian University of Technology 10 publications, 0.6%
Fraunhofer Institute for Integrated Systems and Device Technology	Fraunhofer Institute for Integrated Systems and Device Technology, 10, 0.6% Fraunhofer Institute for Integrated Systems and Device Technology 10 publications, 0.6%
Toshiba Corporation	Toshiba Corporation, 10, 0.6% Toshiba Corporation 10 publications, 0.6%
National Tsing Hua University	National Tsing Hua University, 9, 0.54% National Tsing Hua University 9 publications, 0.54%
Georgia Institute of technology	Georgia Institute of technology, 9, 0.54% Georgia Institute of technology 9 publications, 0.54%
University of Chinese Academy of Sciences	University of Chinese Academy of Sciences, 8, 0.48% University of Chinese Academy of Sciences 8 publications, 0.48%
National Cheng Kung University	National Cheng Kung University, 8, 0.48% National Cheng Kung University 8 publications, 0.48%
Texas A&M University	Texas A&M University, 8, 0.48% Texas A&M University 8 publications, 0.48%
École Polytechnique Fédérale de Lausanne	École Polytechnique Fédérale de Lausanne, 7, 0.42% École Polytechnique Fédérale de Lausanne 7 publications, 0.42%
Delft University of Technology	Delft University of Technology, 7, 0.42% Delft University of Technology 7 publications, 0.42%
Hanyang University	Hanyang University, 7, 0.42% Hanyang University 7 publications, 0.42%
University of California, Berkeley	University of California, Berkeley, 7, 0.42% University of California, Berkeley 7 publications, 0.42%
Beijing Institute of Technology	Beijing Institute of Technology, 6, 0.36% Beijing Institute of Technology 6 publications, 0.36%
University of Twente	University of Twente, 6, 0.36% University of Twente 6 publications, 0.36%
National Sun Yat-sen University	National Sun Yat-sen University, 6, 0.36% National Sun Yat-sen University 6 publications, 0.36%
National Taiwan University	National Taiwan University, 6, 0.36% National Taiwan University 6 publications, 0.36%
National Central University	National Central University, 6, 0.36% National Central University 6 publications, 0.36%
Chinese University of Hong Kong	Chinese University of Hong Kong, 6, 0.36% Chinese University of Hong Kong 6 publications, 0.36%
University of Chicago	University of Chicago, 6, 0.36% University of Chicago 6 publications, 0.36%
Osaka University	Osaka University, 6, 0.36% Osaka University 6 publications, 0.36%
Huazhong University of Science and Technology	Huazhong University of Science and Technology, 5, 0.3% Huazhong University of Science and Technology 5 publications, 0.3%
University of Birmingham	University of Birmingham, 5, 0.3% University of Birmingham 5 publications, 0.3%
National Centre of Scientific Research "Demokritos"	National Centre of Scientific Research "Demokritos", 5, 0.3% National Centre of Scientific Research "Demokritos" 5 publications, 0.3%
University of Illinois Urbana-Champaign	University of Illinois Urbana-Champaign, 5, 0.3% University of Illinois Urbana-Champaign 5 publications, 0.3%
Fraunhofer Institute for Applied Optics and Precision Engineering	Fraunhofer Institute for Applied Optics and Precision Engineering, 5, 0.3% Fraunhofer Institute for Applied Optics and Precision Engineering 5 publications, 0.3%
Indian Institute of Technology Madras	Indian Institute of Technology Madras, 4, 0.24% Indian Institute of Technology Madras 4 publications, 0.24%
Tsinghua University	Tsinghua University, 4, 0.24% Tsinghua University 4 publications, 0.24%
Peking University	Peking University, 4, 0.24% Peking University 4 publications, 0.24%
Autonomous University of Barcelona	Autonomous University of Barcelona, 4, 0.24% Autonomous University of Barcelona 4 publications, 0.24%
Massachusetts Institute of Technology	Massachusetts Institute of Technology, 4, 0.24% Massachusetts Institute of Technology 4 publications, 0.24%
Cornell University	Cornell University, 4, 0.24% Cornell University 4 publications, 0.24%
Stanford University	Stanford University, 4, 0.24% Stanford University 4 publications, 0.24%
Yonsei University	Yonsei University, 4, 0.24% Yonsei University 4 publications, 0.24%
Friedrich Schiller University Jena	Friedrich Schiller University Jena, 4, 0.24% Friedrich Schiller University Jena 4 publications, 0.24%
Tohoku University	Tohoku University, 4, 0.24% Tohoku University 4 publications, 0.24%
Ilmenau University of Technology	Ilmenau University of Technology, 4, 0.24% Ilmenau University of Technology 4 publications, 0.24%
University of Tokyo	University of Tokyo, 4, 0.24% University of Tokyo 4 publications, 0.24%
Institute of Microelectronics of Barcelona	Institute of Microelectronics of Barcelona, 4, 0.24% Institute of Microelectronics of Barcelona 4 publications, 0.24%
Brigham Young University	Brigham Young University, 4, 0.24% Brigham Young University 4 publications, 0.24%
Institute for Physics of Microstructures of the Russian Academy of Sciences	Institute for Physics of Microstructures of the Russian Academy of Sciences, 3, 0.18% Institute for Physics of Microstructures of the Russian Academy of Sciences 3 publications, 0.18%
Indian Institute of Science	Indian Institute of Science, 3, 0.18% Indian Institute of Science 3 publications, 0.18%
University of Tabriz	University of Tabriz, 3, 0.18% University of Tabriz 3 publications, 0.18%
Indian Institute of Technology Kharagpur	Indian Institute of Technology Kharagpur, 3, 0.18% Indian Institute of Technology Kharagpur 3 publications, 0.18%
Fudan University	Fudan University, 3, 0.18% Fudan University 3 publications, 0.18%
Karlsruhe Institute of Technology	Karlsruhe Institute of Technology, 3, 0.18% Karlsruhe Institute of Technology 3 publications, 0.18%
Grenoble Alpes University	Grenoble Alpes University, 3, 0.18% Grenoble Alpes University 3 publications, 0.18%
VTT Technical Research Centre of Finland	VTT Technical Research Centre of Finland, 3, 0.18% VTT Technical Research Centre of Finland 3 publications, 0.18%
National Kaohsiung University of Science and Technology	National Kaohsiung University of Science and Technology, 3, 0.18% National Kaohsiung University of Science and Technology 3 publications, 0.18%
Feng Chia University	Feng Chia University, 3, 0.18% Feng Chia University 3 publications, 0.18%
Argonne National Laboratory	Argonne National Laboratory, 3, 0.18% Argonne National Laboratory 3 publications, 0.18%
Boston University	Boston University, 3, 0.18% Boston University 3 publications, 0.18%
National Institute of Advanced Industrial Science and Technology	National Institute of Advanced Industrial Science and Technology, 3, 0.18% National Institute of Advanced Industrial Science and Technology 3 publications, 0.18%
National University of Defense Technology	National University of Defense Technology, 3, 0.18% National University of Defense Technology 3 publications, 0.18%
Fraunhofer Institute for Laser Technology	Fraunhofer Institute for Laser Technology, 3, 0.18% Fraunhofer Institute for Laser Technology 3 publications, 0.18%
RWTH Aachen University	RWTH Aachen University, 3, 0.18% RWTH Aachen University 3 publications, 0.18%
Albert Ludwig University of Freiburg	Albert Ludwig University of Freiburg, 3, 0.18% Albert Ludwig University of Freiburg 3 publications, 0.18%
University of Erlangen–Nuremberg	University of Erlangen–Nuremberg, 3, 0.18% University of Erlangen–Nuremberg 3 publications, 0.18%
Leiden University	Leiden University, 3, 0.18% Leiden University 3 publications, 0.18%
Physikalisch-Technische Bundesanstalt	Physikalisch-Technische Bundesanstalt, 3, 0.18% Physikalisch-Technische Bundesanstalt 3 publications, 0.18%
University of Stuttgart	University of Stuttgart, 3, 0.18% University of Stuttgart 3 publications, 0.18%
University of Wisconsin–Madison	University of Wisconsin–Madison, 3, 0.18% University of Wisconsin–Madison 3 publications, 0.18%
Waseda University	Waseda University, 3, 0.18% Waseda University 3 publications, 0.18%
Ain Shams University	Ain Shams University, 3, 0.18% Ain Shams University 3 publications, 0.18%
Royal Philips	Royal Philips, 3, 0.18% Royal Philips 3 publications, 0.18%
University of Pennsylvania	University of Pennsylvania, 3, 0.18% University of Pennsylvania 3 publications, 0.18%
University of Alberta	University of Alberta, 3, 0.18% University of Alberta 3 publications, 0.18%
University of Manitoba	University of Manitoba, 3, 0.18% University of Manitoba 3 publications, 0.18%
King Abdullah University of Science and Technology	King Abdullah University of Science and Technology, 2, 0.12% King Abdullah University of Science and Technology 2 publications, 0.12%
Sharif University of Technology	Sharif University of Technology, 2, 0.12% Sharif University of Technology 2 publications, 0.12%
Indian Institute of Technology Kanpur	Indian Institute of Technology Kanpur, 2, 0.12% Indian Institute of Technology Kanpur 2 publications, 0.12%
Indian Institute of Technology Gandhinagar	Indian Institute of Technology Gandhinagar, 2, 0.12% Indian Institute of Technology Gandhinagar 2 publications, 0.12%
Malaviya National Institute of Technology Jaipur	Malaviya National Institute of Technology Jaipur, 2, 0.12% Malaviya National Institute of Technology Jaipur 2 publications, 0.12%
Shanghai Jiao Tong University	Shanghai Jiao Tong University, 2, 0.12% Shanghai Jiao Tong University 2 publications, 0.12%
Harbin Institute of Technology	Harbin Institute of Technology, 2, 0.12% Harbin Institute of Technology 2 publications, 0.12%
Ben-Gurion University of the Negev	Ben-Gurion University of the Negev, 2, 0.12% Ben-Gurion University of the Negev 2 publications, 0.12%
University of Electronic Science and Technology of China	University of Electronic Science and Technology of China, 2, 0.12% University of Electronic Science and Technology of China 2 publications, 0.12%
University of Science, Malaysia	University of Science, Malaysia, 2, 0.12% University of Science, Malaysia 2 publications, 0.12%
Indian Space Research Organisation	Indian Space Research Organisation, 2, 0.12% Indian Space Research Organisation 2 publications, 0.12%
Kurukshetra University	Kurukshetra University, 2, 0.12% Kurukshetra University 2 publications, 0.12%
Southeast University	Southeast University, 2, 0.12% Southeast University 2 publications, 0.12%
ETH Zurich	ETH Zurich, 2, 0.12% ETH Zurich 2 publications, 0.12%
University of New South Wales	University of New South Wales, 2, 0.12% University of New South Wales 2 publications, 0.12%
North University of China	North University of China, 2, 0.12% North University of China 2 publications, 0.12%
Soochow University (Suzhou)	Soochow University (Suzhou), 2, 0.12% Soochow University (Suzhou) 2 publications, 0.12%
University of Manchester	University of Manchester, 2, 0.12% University of Manchester 2 publications, 0.12%
National University of Singapore	National University of Singapore, 2, 0.12% National University of Singapore 2 publications, 0.12%
Carnegie Mellon University	Carnegie Mellon University, 2, 0.12% Carnegie Mellon University 2 publications, 0.12%
National Taipei University of Technology	National Taipei University of Technology, 2, 0.12% National Taipei University of Technology 2 publications, 0.12%
Tokyo Institute of Technology	Tokyo Institute of Technology, 2, 0.12% Tokyo Institute of Technology 2 publications, 0.12%
Seoul National University	Seoul National University, 2, 0.12% Seoul National University 2 publications, 0.12%
Korea Advanced Institute of Science and Technology	Korea Advanced Institute of Science and Technology, 2, 0.12% Korea Advanced Institute of Science and Technology 2 publications, 0.12%
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	50 100 150 200 250 300 350 400
USA	USA, 364, 21.88% USA 364 publications, 21.88%
China	China, 179, 10.76% China 179 publications, 10.76%
Japan	Japan, 95, 5.71% Japan 95 publications, 5.71%
Germany	Germany, 76, 4.57% Germany 76 publications, 4.57%
Belgium	Belgium, 43, 2.58% Belgium 43 publications, 2.58%
Netherlands	Netherlands, 42, 2.52% Netherlands 42 publications, 2.52%
Republic of Korea	Republic of Korea, 40, 2.4% Republic of Korea 40 publications, 2.4%
India	India, 34, 2.04% India 34 publications, 2.04%
Switzerland	Switzerland, 33, 1.98% Switzerland 33 publications, 1.98%
France	France, 23, 1.38% France 23 publications, 1.38%
Israel	Israel, 15, 0.9% Israel 15 publications, 0.9%
Canada	Canada, 13, 0.78% Canada 13 publications, 0.78%
Iran	Iran, 10, 0.6% Iran 10 publications, 0.6%
Russia	Russia, 9, 0.54% Russia 9 publications, 0.54%
United Kingdom	United Kingdom, 9, 0.54% United Kingdom 9 publications, 0.54%
Spain	Spain, 7, 0.42% Spain 7 publications, 0.42%
Greece	Greece, 6, 0.36% Greece 6 publications, 0.36%
Egypt	Egypt, 6, 0.36% Egypt 6 publications, 0.36%
Italy	Italy, 5, 0.3% Italy 5 publications, 0.3%
Malaysia	Malaysia, 5, 0.3% Malaysia 5 publications, 0.3%
Australia	Australia, 4, 0.24% Australia 4 publications, 0.24%
Austria	Austria, 4, 0.24% Austria 4 publications, 0.24%
Ireland	Ireland, 4, 0.24% Ireland 4 publications, 0.24%
Mexico	Mexico, 4, 0.24% Mexico 4 publications, 0.24%
Singapore	Singapore, 4, 0.24% Singapore 4 publications, 0.24%
Finland	Finland, 4, 0.24% Finland 4 publications, 0.24%
Brazil	Brazil, 3, 0.18% Brazil 3 publications, 0.18%
New Zealand	New Zealand, 2, 0.12% New Zealand 2 publications, 0.12%
UAE	UAE, 2, 0.12% UAE 2 publications, 0.12%
Romania	Romania, 2, 0.12% Romania 2 publications, 0.12%
Saudi Arabia	Saudi Arabia, 2, 0.12% Saudi Arabia 2 publications, 0.12%
Armenia	Armenia, 1, 0.06% Armenia 1 publication, 0.06%
Denmark	Denmark, 1, 0.06% Denmark 1 publication, 0.06%
Iraq	Iraq, 1, 0.06% Iraq 1 publication, 0.06%
Colombia	Colombia, 1, 0.06% Colombia 1 publication, 0.06%
Latvia	Latvia, 1, 0.06% Latvia 1 publication, 0.06%
Lithuania	Lithuania, 1, 0.06% Lithuania 1 publication, 0.06%
Norway	Norway, 1, 0.06% Norway 1 publication, 0.06%
Pakistan	Pakistan, 1, 0.06% Pakistan 1 publication, 0.06%
Poland	Poland, 1, 0.06% Poland 1 publication, 0.06%
Thailand	Thailand, 1, 0.06% Thailand 1 publication, 0.06%
Turkey	Turkey, 1, 0.06% Turkey 1 publication, 0.06%
Czech Republic	Czech Republic, 1, 0.06% Czech Republic 1 publication, 0.06%
Sweden	Sweden, 1, 0.06% Sweden 1 publication, 0.06%
South Africa	South Africa, 1, 0.06% South Africa 1 publication, 0.06%
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Journal of Micro/ Nanolithography, MEMS, and MOEMS

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	1
Indian Institute of Technology Kharagpur	Indian Institute of Technology Kharagpur, 1, 3.33% Indian Institute of Technology Kharagpur 1 publication, 3.33%
Babol University of Medical Sciences	Babol University of Medical Sciences, 1, 3.33% Babol University of Medical Sciences 1 publication, 3.33%
Dalian University of Technology	Dalian University of Technology, 1, 3.33% Dalian University of Technology 1 publication, 3.33%
University of Electronic Science and Technology of China	University of Electronic Science and Technology of China, 1, 3.33% University of Electronic Science and Technology of China 1 publication, 3.33%
University of Twente	University of Twente, 1, 3.33% University of Twente 1 publication, 3.33%
Beijing University of Chemical Technology	Beijing University of Chemical Technology, 1, 3.33% Beijing University of Chemical Technology 1 publication, 3.33%
Delft University of Technology	Delft University of Technology, 1, 3.33% Delft University of Technology 1 publication, 3.33%
Shanghai University of Engineering Science	Shanghai University of Engineering Science, 1, 3.33% Shanghai University of Engineering Science 1 publication, 3.33%
Lawrence Berkeley National Laboratory	Lawrence Berkeley National Laboratory, 1, 3.33% Lawrence Berkeley National Laboratory 1 publication, 3.33%
University of Southern California	University of Southern California, 1, 3.33% University of Southern California 1 publication, 3.33%
Anhui University of Science and Technology	Anhui University of Science and Technology, 1, 3.33% Anhui University of Science and Technology 1 publication, 3.33%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 1, 3.33% Interuniversity Microelectronics Centre 1 publication, 3.33%
National Institute of Standards and Technology	National Institute of Standards and Technology, 1, 3.33% National Institute of Standards and Technology 1 publication, 3.33%
National Institute of Advanced Industrial Science and Technology	National Institute of Advanced Industrial Science and Technology, 1, 3.33% National Institute of Advanced Industrial Science and Technology 1 publication, 3.33%
Fraunhofer Institute for Integrated Systems and Device Technology	Fraunhofer Institute for Integrated Systems and Device Technology, 1, 3.33% Fraunhofer Institute for Integrated Systems and Device Technology 1 publication, 3.33%
Albert Ludwig University of Freiburg	Albert Ludwig University of Freiburg, 1, 3.33% Albert Ludwig University of Freiburg 1 publication, 3.33%
Physikalisch-Technische Bundesanstalt	Physikalisch-Technische Bundesanstalt, 1, 3.33% Physikalisch-Technische Bundesanstalt 1 publication, 3.33%
	1

	1 2 3 4 5 6 7
USA	USA, 7, 23.33% USA 7 publications, 23.33%
Germany	Germany, 4, 13.33% Germany 4 publications, 13.33%
China	China, 4, 13.33% China 4 publications, 13.33%
Netherlands	Netherlands, 4, 13.33% Netherlands 4 publications, 13.33%
Japan	Japan, 3, 10% Japan 3 publications, 10%
Belgium	Belgium, 1, 3.33% Belgium 1 publication, 3.33%
India	India, 1, 3.33% India 1 publication, 3.33%
Iran	Iran, 1, 3.33% Iran 1 publication, 3.33%
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