Journal of Micro/ Nanolithography, MEMS, and MOEMS

SPIE-Intl Soc Optical Eng
SPIE-Intl Soc Optical Eng
ISSN: 19325150, 19325134
SCImago
Q2
SJR
0.393
CiteScore
3.4
Categories
Mechanical Engineering
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Nanoscience and Nanotechnology
Areas
Engineering
Materials Science
Physics and Astronomy
Years of issue
2007-2023
Publications
1 664
Citations
12 052
h-index
37
Publications
92
Citations
5 112

Most cited in 5 years

Found 
from chars
Publications found: 0

Top-100

Citing journals

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Journal of Micro/ Nanolithography, MEMS, and MOEMS
873 citations, 7.24%
Proceedings of SPIE - The International Society for Optical Engineering
822 citations, 6.82%
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
384 citations, 3.19%
Optics Express
381 citations, 3.16%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
284 citations, 2.36%
Applied Optics
223 citations, 1.85%
Microelectronic Engineering
185 citations, 1.54%
Micromachines
178 citations, 1.48%
Journal of Micromechanics and Microengineering
173 citations, 1.44%
Journal of Photopolymer Science and Technology
153 citations, 1.27%
Journal of Applied Physics
141 citations, 1.17%
Journal of Micro/Nanopatterning Materials and Metrology
140 citations, 1.16%
ACS applied materials & interfaces
125 citations, 1.04%
Measurement Science and Technology
116 citations, 0.96%
Applied Physics Letters
113 citations, 0.94%
Nanotechnology
112 citations, 0.93%
Journal of Microelectromechanical Systems
111 citations, 0.92%
Sensors and Actuators, A: Physical
102 citations, 0.85%
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
95 citations, 0.79%
Microsystem Technologies
89 citations, 0.74%
Sensors
84 citations, 0.7%
IEEE Sensors Journal
79 citations, 0.66%
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
74 citations, 0.61%
IEEE Transactions on Semiconductor Manufacturing
62 citations, 0.51%
ACS Nano
57 citations, 0.47%
Optical Engineering
57 citations, 0.47%
Scientific Reports
55 citations, 0.46%
Journal of Materials Chemistry C
52 citations, 0.43%
Optics Letters
51 citations, 0.42%
Applied Sciences (Switzerland)
51 citations, 0.42%
Journal Physics D: Applied Physics
50 citations, 0.41%
Applied Surface Science
49 citations, 0.41%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
45 citations, 0.37%
AIP Advances
44 citations, 0.37%
Macromolecules
44 citations, 0.37%
Review of Scientific Instruments
43 citations, 0.36%
Optics Communications
42 citations, 0.35%
Nanomaterials
41 citations, 0.34%
Optics and Lasers in Engineering
39 citations, 0.32%
Journal of the Optical Society of America A: Optics and Image Science, and Vision
39 citations, 0.32%
Frontiers of Nanoscience
37 citations, 0.31%
Physical Chemistry Chemical Physics
35 citations, 0.29%
Optics and Laser Technology
35 citations, 0.29%
Polymers
35 citations, 0.29%
Nanoscale
33 citations, 0.27%
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
33 citations, 0.27%
Photonics
32 citations, 0.27%
Micro and Nano Engineering
31 citations, 0.26%
Physics of Plasmas
31 citations, 0.26%
Advanced Materials
31 citations, 0.26%
Chemistry of Materials
30 citations, 0.25%
Advanced Optical Technologies
30 citations, 0.25%
Thin Solid Films
30 citations, 0.25%
IEEE Access
30 citations, 0.25%
Ultramicroscopy
28 citations, 0.23%
Lab on a Chip
28 citations, 0.23%
Journal of Optics (United Kingdom)
28 citations, 0.23%
Materials
28 citations, 0.23%
Acta Physica Sinica
27 citations, 0.22%
Langmuir
27 citations, 0.22%
Nano Letters
26 citations, 0.22%
Microsystems and Nanoengineering
26 citations, 0.22%
Applied Physics Express
26 citations, 0.22%
IEEE Transactions on Electron Devices
26 citations, 0.22%
RSC Advances
24 citations, 0.2%
Smart Materials and Structures
23 citations, 0.19%
Nature Electronics
22 citations, 0.18%
IEEE Transactions on Nanotechnology
21 citations, 0.17%
Journal of Physics: Conference Series
21 citations, 0.17%
ECS Journal of Solid State Science and Technology
21 citations, 0.17%
ACS Omega
21 citations, 0.17%
Sensors and Actuators, B: Chemical
21 citations, 0.17%
Advanced Functional Materials
20 citations, 0.17%
Journal of Physical Chemistry C
20 citations, 0.17%
Precision Engineering
19 citations, 0.16%
Advanced Materials Research
19 citations, 0.16%
Microelectronics Reliability
18 citations, 0.15%
Advanced Optical Materials
18 citations, 0.15%
IEEE Photonics Technology Letters
18 citations, 0.15%
IEEE Photonics Journal
18 citations, 0.15%
Russian Microelectronics
18 citations, 0.15%
ACS Applied Nano Materials
17 citations, 0.14%
Applied Physics A: Materials Science and Processing
17 citations, 0.14%
Optik
17 citations, 0.14%
International Journal of Extreme Manufacturing
17 citations, 0.14%
Measurement: Journal of the International Measurement Confederation
16 citations, 0.13%
Small
16 citations, 0.13%
IEEE Transactions on Instrumentation and Measurement
16 citations, 0.13%
Microfluidics and Nanofluidics
16 citations, 0.13%
Journal of the Optical Society of America B: Optical Physics
16 citations, 0.13%
IEEE TRANSACTIONS ON COMPUTATIONAL IMAGING
16 citations, 0.13%
Nature Communications
15 citations, 0.12%
Micro and Nano Letters
15 citations, 0.12%
Journal of Applied Crystallography
15 citations, 0.12%
Advanced Materials Technologies
14 citations, 0.12%
Microelectronics Journal
14 citations, 0.12%
Analytical Chemistry
14 citations, 0.12%
Advanced Materials Interfaces
14 citations, 0.12%
Science advances
14 citations, 0.12%
Springer Tracts in Modern Physics
14 citations, 0.12%
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Citing publishers

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SPIE-Intl Soc Optical Eng
2059 citations, 17.08%
Elsevier
1329 citations, 11.03%
Institute of Electrical and Electronics Engineers (IEEE)
1113 citations, 9.23%
Optica Publishing Group
766 citations, 6.36%
Springer Nature
723 citations, 6%
IOP Publishing
707 citations, 5.87%
MDPI
542 citations, 4.5%
American Vacuum Society
523 citations, 4.34%
American Chemical Society (ACS)
485 citations, 4.02%
AIP Publishing
448 citations, 3.72%
Wiley
378 citations, 3.14%
Japan Society of Applied Physics
301 citations, 2.5%
Royal Society of Chemistry (RSC)
268 citations, 2.22%
The Technical Association of Photopolymers, Japan
118 citations, 0.98%
Taylor & Francis
88 citations, 0.73%
Pleiades Publishing
73 citations, 0.61%
Walter de Gruyter
55 citations, 0.46%
American Physical Society (APS)
48 citations, 0.4%
Trans Tech Publications
46 citations, 0.38%
Association for Computing Machinery (ACM)
40 citations, 0.33%
37 citations, 0.31%
The Electrochemical Society
31 citations, 0.26%
Hindawi Limited
31 citations, 0.26%
ASME International
31 citations, 0.26%
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
27 citations, 0.22%
Frontiers Media S.A.
24 citations, 0.2%
Cambridge University Press
23 citations, 0.19%
Institution of Engineering and Technology (IET)
23 citations, 0.19%
Oxford University Press
22 citations, 0.18%
SAGE
19 citations, 0.16%
International Union of Crystallography (IUCr)
19 citations, 0.16%
World Scientific
16 citations, 0.13%
American Association for the Advancement of Science (AAAS)
16 citations, 0.13%
Beilstein-Institut
13 citations, 0.11%
Institute of Electrical Engineers of Japan (IEE Japan)
13 citations, 0.11%
Shanghai Institute of Optics and Fine Mechanics
11 citations, 0.09%
Emerald
10 citations, 0.08%
Annual Reviews
10 citations, 0.08%
Cold Spring Harbor Laboratory
9 citations, 0.07%
IntechOpen
9 citations, 0.07%
The Russian Academy of Sciences
8 citations, 0.07%
The Royal Society
7 citations, 0.06%
Public Library of Science (PLoS)
7 citations, 0.06%
IGI Global
7 citations, 0.06%
Korean Society of Mechanical Engineers
6 citations, 0.05%
Japan Society of Mechanical Engineers
6 citations, 0.05%
The Korean Society of Precision Engineering
6 citations, 0.05%
The Chemical Society of Japan
6 citations, 0.05%
5 citations, 0.04%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
5 citations, 0.04%
Science in China Press
5 citations, 0.04%
Keldysh Institute of Applied Mathematics
5 citations, 0.04%
Institute of Electronics, Information and Communications Engineers (IEICE)
5 citations, 0.04%
Society for Industrial and Applied Mathematics (SIAM)
4 citations, 0.03%
Laser Institute of America
4 citations, 0.03%
4 citations, 0.03%
Uspekhi Fizicheskikh Nauk Journal
4 citations, 0.03%
EDP Sciences
3 citations, 0.02%
Mary Ann Liebert
3 citations, 0.02%
Zhejiang University Press
3 citations, 0.02%
The Korean Institute of Electrical and Electronic Material Engineers
3 citations, 0.02%
Optical Society of India
3 citations, 0.02%
Hans Publishers
3 citations, 0.02%
IOS Press
2 citations, 0.02%
Bentham Science Publishers Ltd.
2 citations, 0.02%
Proceedings of the National Academy of Sciences (PNAS)
2 citations, 0.02%
American Institute of Mathematical Sciences (AIMS)
2 citations, 0.02%
Federal Informational-Analytical Center of the Defense Industry
2 citations, 0.02%
Information Processing Society of Japan
2 citations, 0.02%
Korean Institute of Metals and Materials
2 citations, 0.02%
Lviv Polytechnic National University
2 citations, 0.02%
American Association of Physics Teachers (AAPT)
2 citations, 0.02%
National Academy of Sciences of Ukraine - Institute of Semiconductor Physics
2 citations, 0.02%
Thomas Telford
2 citations, 0.02%
Japan Institute of Electronics Packaging
2 citations, 0.02%
American Society for Photogrammetry and Remote Sensing
1 citation, 0.01%
Ovid Technologies (Wolters Kluwer Health)
1 citation, 0.01%
1 citation, 0.01%
Begell House
1 citation, 0.01%
American Society for Microbiology
1 citation, 0.01%
1 citation, 0.01%
Image Processing Systems Institute of RAS
1 citation, 0.01%
MIT Press
1 citation, 0.01%
Ivanovo State University of Chemistry and Technology
1 citation, 0.01%
Korean Society of Industrial Engineering Chemistry
1 citation, 0.01%
Acoustical Society of America (ASA)
1 citation, 0.01%
The Company of Biologists
1 citation, 0.01%
Pensoft Publishers
1 citation, 0.01%
1 citation, 0.01%
Fuji Technology Press
1 citation, 0.01%
Biophysical Society
1 citation, 0.01%
Instrument Society of America
1 citation, 0.01%
Journal of Neurosurgery Publishing Group (JNSPG)
1 citation, 0.01%
Crop Science Society of Japan
1 citation, 0.01%
Nonferrous Metals Society of China
1 citation, 0.01%
Academic Publishing Limited
1 citation, 0.01%
Electromagnetics Academy
1 citation, 0.01%
Tsinghua University Press
1 citation, 0.01%
Japanese Society for Medical and Biological Engineering
1 citation, 0.01%
Shanghai Jiaotong University Press
1 citation, 0.01%
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Publishing organizations

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45
Taiwan Semiconductor Manufacturing Company
42 publications, 2.52%
Interuniversity Microelectronics Centre
33 publications, 1.98%
National Institute of Standards and Technology
22 publications, 1.32%
Paul Scherrer Institute
20 publications, 1.2%
University of Texas at Austin
20 publications, 1.2%
Lawrence Berkeley National Laboratory
15 publications, 0.9%
Katholieke Universiteit Leuven
13 publications, 0.78%
Samsung
12 publications, 0.72%
Central Electronics Engineering Research Institute
10 publications, 0.6%
Dalian University of Technology
10 publications, 0.6%
Fraunhofer Institute for Integrated Systems and Device Technology
10 publications, 0.6%
Toshiba Corporation
10 publications, 0.6%
National Tsing Hua University
9 publications, 0.54%
Georgia Institute of technology
9 publications, 0.54%
University of Chinese Academy of Sciences
8 publications, 0.48%
National Cheng Kung University
8 publications, 0.48%
Texas A&M University
8 publications, 0.48%
École Polytechnique Fédérale de Lausanne
7 publications, 0.42%
Delft University of Technology
7 publications, 0.42%
Hanyang University
7 publications, 0.42%
University of California, Berkeley
7 publications, 0.42%
Beijing Institute of Technology
6 publications, 0.36%
University of Twente
6 publications, 0.36%
National Sun Yat-sen University
6 publications, 0.36%
National Taiwan University
6 publications, 0.36%
National Central University
6 publications, 0.36%
Chinese University of Hong Kong
6 publications, 0.36%
University of Chicago
6 publications, 0.36%
Osaka University
6 publications, 0.36%
Huazhong University of Science and Technology
5 publications, 0.3%
University of Birmingham
5 publications, 0.3%
National Centre of Scientific Research "Demokritos"
5 publications, 0.3%
University of Illinois Urbana-Champaign
5 publications, 0.3%
Fraunhofer Institute for Applied Optics and Precision Engineering
5 publications, 0.3%
Indian Institute of Technology Madras
4 publications, 0.24%
Tsinghua University
4 publications, 0.24%
Peking University
4 publications, 0.24%
Autonomous University of Barcelona
4 publications, 0.24%
Massachusetts Institute of Technology
4 publications, 0.24%
Cornell University
4 publications, 0.24%
Stanford University
4 publications, 0.24%
Yonsei University
4 publications, 0.24%
Friedrich Schiller University Jena
4 publications, 0.24%
Tohoku University
4 publications, 0.24%
Ilmenau University of Technology
4 publications, 0.24%
University of Tokyo
4 publications, 0.24%
Institute of Microelectronics of Barcelona
4 publications, 0.24%
Brigham Young University
4 publications, 0.24%
Institute for Physics of Microstructures of the Russian Academy of Sciences
3 publications, 0.18%
Indian Institute of Science
3 publications, 0.18%
University of Tabriz
3 publications, 0.18%
Indian Institute of Technology Kharagpur
3 publications, 0.18%
Fudan University
3 publications, 0.18%
Karlsruhe Institute of Technology
3 publications, 0.18%
Grenoble Alpes University
3 publications, 0.18%
VTT Technical Research Centre of Finland
3 publications, 0.18%
National Kaohsiung University of Science and Technology
3 publications, 0.18%
Feng Chia University
3 publications, 0.18%
Argonne National Laboratory
3 publications, 0.18%
Boston University
3 publications, 0.18%
National Institute of Advanced Industrial Science and Technology
3 publications, 0.18%
National University of Defense Technology
3 publications, 0.18%
Fraunhofer Institute for Laser Technology
3 publications, 0.18%
RWTH Aachen University
3 publications, 0.18%
Albert Ludwig University of Freiburg
3 publications, 0.18%
University of Erlangen–Nuremberg
3 publications, 0.18%
Leiden University
3 publications, 0.18%
Physikalisch-Technische Bundesanstalt
3 publications, 0.18%
University of Stuttgart
3 publications, 0.18%
University of Wisconsin–Madison
3 publications, 0.18%
Waseda University
3 publications, 0.18%
Ain Shams University
3 publications, 0.18%
Royal Philips
3 publications, 0.18%
University of Pennsylvania
3 publications, 0.18%
University of Alberta
3 publications, 0.18%
University of Manitoba
3 publications, 0.18%
King Abdullah University of Science and Technology
2 publications, 0.12%
Sharif University of Technology
2 publications, 0.12%
Indian Institute of Technology Kanpur
2 publications, 0.12%
Indian Institute of Technology Gandhinagar
2 publications, 0.12%
Malaviya National Institute of Technology Jaipur
2 publications, 0.12%
Shanghai Jiao Tong University
2 publications, 0.12%
Harbin Institute of Technology
2 publications, 0.12%
Ben-Gurion University of the Negev
2 publications, 0.12%
University of Electronic Science and Technology of China
2 publications, 0.12%
University of Science, Malaysia
2 publications, 0.12%
Indian Space Research Organisation
2 publications, 0.12%
Kurukshetra University
2 publications, 0.12%
Southeast University
2 publications, 0.12%
ETH Zurich
2 publications, 0.12%
University of New South Wales
2 publications, 0.12%
North University of China
2 publications, 0.12%
Soochow University (Suzhou)
2 publications, 0.12%
University of Manchester
2 publications, 0.12%
National University of Singapore
2 publications, 0.12%
Carnegie Mellon University
2 publications, 0.12%
National Taipei University of Technology
2 publications, 0.12%
Tokyo Institute of Technology
2 publications, 0.12%
Seoul National University
2 publications, 0.12%
Korea Advanced Institute of Science and Technology
2 publications, 0.12%
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45

Publishing organizations in 5 years

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2
National Institute of Standards and Technology
2 publications, 2.17%
Physikalisch-Technische Bundesanstalt
2 publications, 2.17%
Indian Institute of Technology Kharagpur
1 publication, 1.09%
Babol University of Medical Sciences
1 publication, 1.09%
Ben-Gurion University of the Negev
1 publication, 1.09%
Sami Shamoon College of Engineering
1 publication, 1.09%
Holon Institute of Technology
1 publication, 1.09%
Dalian University of Technology
1 publication, 1.09%
University of Electronic Science and Technology of China
1 publication, 1.09%
University of Twente
1 publication, 1.09%
Beijing University of Chemical Technology
1 publication, 1.09%
Paul Scherrer Institute
1 publication, 1.09%
Delft University of Technology
1 publication, 1.09%
Shanghai University of Engineering Science
1 publication, 1.09%
Lawrence Berkeley National Laboratory
1 publication, 1.09%
University of Southern California
1 publication, 1.09%
Anhui University of Science and Technology
1 publication, 1.09%
Interuniversity Microelectronics Centre
1 publication, 1.09%
National Institute of Advanced Industrial Science and Technology
1 publication, 1.09%
University of Illinois Urbana-Champaign
1 publication, 1.09%
Fraunhofer Institute for Laser Technology
1 publication, 1.09%
Fraunhofer Institute for Integrated Systems and Device Technology
1 publication, 1.09%
Albert Ludwig University of Freiburg
1 publication, 1.09%
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Publishing countries

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100
150
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250
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350
400
USA, 364, 21.88%
USA
364 publications, 21.88%
China, 179, 10.76%
China
179 publications, 10.76%
Japan, 95, 5.71%
Japan
95 publications, 5.71%
Germany, 76, 4.57%
Germany
76 publications, 4.57%
Belgium, 43, 2.58%
Belgium
43 publications, 2.58%
Netherlands, 42, 2.52%
Netherlands
42 publications, 2.52%
Republic of Korea, 40, 2.4%
Republic of Korea
40 publications, 2.4%
India, 34, 2.04%
India
34 publications, 2.04%
Switzerland, 33, 1.98%
Switzerland
33 publications, 1.98%
France, 23, 1.38%
France
23 publications, 1.38%
Israel, 15, 0.9%
Israel
15 publications, 0.9%
Canada, 13, 0.78%
Canada
13 publications, 0.78%
Iran, 10, 0.6%
Iran
10 publications, 0.6%
Russia, 9, 0.54%
Russia
9 publications, 0.54%
United Kingdom, 9, 0.54%
United Kingdom
9 publications, 0.54%
Spain, 7, 0.42%
Spain
7 publications, 0.42%
Greece, 6, 0.36%
Greece
6 publications, 0.36%
Egypt, 6, 0.36%
Egypt
6 publications, 0.36%
Italy, 5, 0.3%
Italy
5 publications, 0.3%
Malaysia, 5, 0.3%
Malaysia
5 publications, 0.3%
Australia, 4, 0.24%
Australia
4 publications, 0.24%
Austria, 4, 0.24%
Austria
4 publications, 0.24%
Ireland, 4, 0.24%
Ireland
4 publications, 0.24%
Mexico, 4, 0.24%
Mexico
4 publications, 0.24%
Singapore, 4, 0.24%
Singapore
4 publications, 0.24%
Finland, 4, 0.24%
Finland
4 publications, 0.24%
Brazil, 3, 0.18%
Brazil
3 publications, 0.18%
New Zealand, 2, 0.12%
New Zealand
2 publications, 0.12%
UAE, 2, 0.12%
UAE
2 publications, 0.12%
Romania, 2, 0.12%
Romania
2 publications, 0.12%
Saudi Arabia, 2, 0.12%
Saudi Arabia
2 publications, 0.12%
Armenia, 1, 0.06%
Armenia
1 publication, 0.06%
Denmark, 1, 0.06%
Denmark
1 publication, 0.06%
Iraq, 1, 0.06%
Iraq
1 publication, 0.06%
Colombia, 1, 0.06%
Colombia
1 publication, 0.06%
Latvia, 1, 0.06%
Latvia
1 publication, 0.06%
Lithuania, 1, 0.06%
Lithuania
1 publication, 0.06%
Norway, 1, 0.06%
Norway
1 publication, 0.06%
Pakistan, 1, 0.06%
Pakistan
1 publication, 0.06%
Poland, 1, 0.06%
Poland
1 publication, 0.06%
Thailand, 1, 0.06%
Thailand
1 publication, 0.06%
Turkey, 1, 0.06%
Turkey
1 publication, 0.06%
Czech Republic, 1, 0.06%
Czech Republic
1 publication, 0.06%
Sweden, 1, 0.06%
Sweden
1 publication, 0.06%
South Africa, 1, 0.06%
South Africa
1 publication, 0.06%
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150
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250
300
350
400

Publishing countries in 5 years

1
2
3
4
5
6
7
8
9
USA, 9, 9.78%
USA
9 publications, 9.78%
Germany, 6, 6.52%
Germany
6 publications, 6.52%
China, 4, 4.35%
China
4 publications, 4.35%
Netherlands, 4, 4.35%
Netherlands
4 publications, 4.35%
Japan, 3, 3.26%
Japan
3 publications, 3.26%
Belgium, 1, 1.09%
Belgium
1 publication, 1.09%
Israel, 1, 1.09%
Israel
1 publication, 1.09%
India, 1, 1.09%
India
1 publication, 1.09%
Iran, 1, 1.09%
Iran
1 publication, 1.09%
Switzerland, 1, 1.09%
Switzerland
1 publication, 1.09%
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9