	1 2
Journal of Vacuum Science and Technology B	Journal of Vacuum Science and Technology B, 2, 50% Journal of Vacuum Science and Technology B 2 citations, 50%
IEEE Transactions on Semiconductor Manufacturing	IEEE Transactions on Semiconductor Manufacturing, 1, 25% IEEE Transactions on Semiconductor Manufacturing 1 citation, 25%
Plasma Chemistry and Plasma Processing	Plasma Chemistry and Plasma Processing, 1, 25% Plasma Chemistry and Plasma Processing 1 citation, 25%
	1 2

	1 2
American Vacuum Society	American Vacuum Society, 2, 50% American Vacuum Society 2 citations, 50%
Springer Nature	Springer Nature, 1, 25% Springer Nature 1 citation, 25%
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 1, 25% Institute of Electrical and Electronics Engineers (IEEE) 1 citation, 25%
	1 2

	1 2 3 4 5 6
Ioffe Physical-Technical Institute of the Russian Academy of Sciences	Ioffe Physical-Technical Institute of the Russian Academy of Sciences, 6, 66.67% Ioffe Physical-Technical Institute of the Russian Academy of Sciences 6 publications, 66.67%
National Research University of Electronic Technology	National Research University of Electronic Technology, 4, 44.44% National Research University of Electronic Technology 4 publications, 44.44%
Peter the Great St. Petersburg Polytechnic University	Peter the Great St. Petersburg Polytechnic University, 2, 22.22% Peter the Great St. Petersburg Polytechnic University 2 publications, 22.22%
Federal University of Santa Catarina	Federal University of Santa Catarina, 1, 11.11% Federal University of Santa Catarina 1 publication, 11.11%
University of Surrey	University of Surrey, 1, 11.11% University of Surrey 1 publication, 11.11%
Institute of Scientific Instruments of the Czech Academy of Sciences	Institute of Scientific Instruments of the Czech Academy of Sciences, 1, 11.11% Institute of Scientific Instruments of the Czech Academy of Sciences 1 publication, 11.11%
	1 2 3 4 5 6

	1 2 3 4 5 6 7 8 9
Russia	Russia, 9, 100% Russia 9 publications, 100%
Brazil	Brazil, 1, 11.11% Brazil 1 publication, 11.11%
United Kingdom	United Kingdom, 1, 11.11% United Kingdom 1 publication, 11.11%
Czech Republic	Czech Republic, 1, 11.11% Czech Republic 1 publication, 11.11%
	1 2 3 4 5 6 7 8 9

2021 34th International Vacuum Nanoelectronics Conference (IVNC)