2021 34th International Vacuum Nanoelectronics Conference (IVNC)
Institute of Electrical and Electronics Engineers (IEEE)
Top-3 citing journals
IEEE Transactions on Semiconductor Manufacturing
(1 citation)
Plasma Chemistry and Plasma Processing
(1 citation)
Top-3 organizations
National Research University of Electronic Technology
(4 publications)
Peter the Great St. Petersburg Polytechnic University
(2 publications)
Top-3 countries
Most cited in 5 years
Found
Top-100
Citing journals
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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
2 citations, 50%
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IEEE Transactions on Semiconductor Manufacturing
1 citation, 25%
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Plasma Chemistry and Plasma Processing
1 citation, 25%
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2
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Citing publishers
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2
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American Vacuum Society
2 citations, 50%
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Springer Nature
1 citation, 25%
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Institute of Electrical and Electronics Engineers (IEEE)
1 citation, 25%
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2
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Publishing organizations
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Ioffe Physical-Technical Institute of the Russian Academy of Sciences
6 publications, 66.67%
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National Research University of Electronic Technology
4 publications, 44.44%
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Peter the Great St. Petersburg Polytechnic University
2 publications, 22.22%
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Federal University of Santa Catarina
1 publication, 11.11%
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Publishing countries
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Russia
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Russia, 9, 100%
Russia
9 publications, 100%
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Brazil
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Brazil, 1, 11.11%
Brazil
1 publication, 11.11%
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United Kingdom
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United Kingdom, 1, 11.11%
United Kingdom
1 publication, 11.11%
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Czech Republic
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Czech Republic, 1, 11.11%
Czech Republic
1 publication, 11.11%
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