IEEE Transactions on Semiconductor Manufacturing

Institute of Electrical and Electronics Engineers (IEEE)

ISSN: 08946507, 15582345

Journal publications in Cobalt

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SCImago

WOS

Impact factor

2.3

SJR

0.967

CiteScore

5.2

Categories

Condensed Matter Physics

Electrical and Electronic Engineering

Electronic, Optical and Magnetic Materials

Industrial and Manufacturing Engineering

Areas

Engineering

Materials Science

Physics and Astronomy

Years of issue

1988-2025

journal names

IEEE Transactions on Semiconductor Manufacturing

IEEE T SEMICONDUCT M

journal website

All time from 2020

Publications

2 785

Citations

41 640

h-index

Top-3 citing journals

IEEE Transactions on Semiconductor Manufacturing (4315 citations)

International Journal of Production Research (1058 citations)

IEEE Transactions on Automation Science and Engineering (808 citations)

Top-3 organizations

All time in 5 years

National Yang Ming Chiao Tung University (60 publications)

Samsung (55 publications)

National Tsing Hua University (54 publications)

Top-3 countries

All time in 5 years

USA (1042 publications)

China (414 publications)

Japan (303 publications)

Most cited in 5 years

By date By citations

Publication title from 3 chars

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For

By date

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Publications found: 0

	2000 4000 6000 8000 10000 12000 14000 16000
Institute of Electrical and Electronics Engineers (IEEE)	Institute of Electrical and Electronics Engineers (IEEE), 14959, 35.92% Institute of Electrical and Electronics Engineers (IEEE) 14959 citations, 35.92%
Elsevier	Elsevier, 6912, 16.6% Elsevier 6912 citations, 16.6%
Springer Nature	Springer Nature, 3433, 8.24% Springer Nature 3433 citations, 8.24%
Taylor & Francis	Taylor & Francis, 2302, 5.53% Taylor & Francis 2302 citations, 5.53%
MDPI	MDPI, 1259, 3.02% MDPI 1259 citations, 3.02%
Wiley	Wiley, 1018, 2.44% Wiley 1018 citations, 2.44%
IOP Publishing	IOP Publishing, 725, 1.74% IOP Publishing 725 citations, 1.74%
AIP Publishing	AIP Publishing, 554, 1.33% AIP Publishing 554 citations, 1.33%
The Electrochemical Society	The Electrochemical Society, 496, 1.19% The Electrochemical Society 496 citations, 1.19%
Japan Society of Applied Physics	Japan Society of Applied Physics, 385, 0.92% Japan Society of Applied Physics 385 citations, 0.92%
American Vacuum Society	American Vacuum Society, 378, 0.91% American Vacuum Society 378 citations, 0.91%
American Chemical Society (ACS)	American Chemical Society (ACS), 355, 0.85% American Chemical Society (ACS) 355 citations, 0.85%
SAGE	SAGE, 278, 0.67% SAGE 278 citations, 0.67%
Association for Computing Machinery (ACM)	Association for Computing Machinery (ACM), 263, 0.63% Association for Computing Machinery (ACM) 263 citations, 0.63%
Trans Tech Publications	Trans Tech Publications, 252, 0.61% Trans Tech Publications 252 citations, 0.61%
Hindawi Limited	Hindawi Limited, 198, 0.48% Hindawi Limited 198 citations, 0.48%
Optica Publishing Group	Optica Publishing Group, 197, 0.47% Optica Publishing Group 197 citations, 0.47%
	, 197, 0.47% 197 citations, 0.47%
ASME International	ASME International, 193, 0.46% ASME International 193 citations, 0.46%
Emerald	Emerald, 174, 0.42% Emerald 174 citations, 0.42%
SPIE-Intl Soc Optical Eng	SPIE-Intl Soc Optical Eng, 167, 0.4% SPIE-Intl Soc Optical Eng 167 citations, 0.4%
Institution of Engineering and Technology (IET)	Institution of Engineering and Technology (IET), 128, 0.31% Institution of Engineering and Technology (IET) 128 citations, 0.31%
World Scientific	World Scientific, 123, 0.3% World Scientific 123 citations, 0.3%
IGI Global	IGI Global, 102, 0.24% IGI Global 102 citations, 0.24%
Royal Society of Chemistry (RSC)	Royal Society of Chemistry (RSC), 96, 0.23% Royal Society of Chemistry (RSC) 96 citations, 0.23%
The Korean Society of Precision Engineering	The Korean Society of Precision Engineering, 70, 0.17% The Korean Society of Precision Engineering 70 citations, 0.17%
Cambridge University Press	Cambridge University Press, 69, 0.17% Cambridge University Press 69 citations, 0.17%
American Society for Quality	American Society for Quality, 62, 0.15% American Society for Quality 62 citations, 0.15%
Institute for Operations Research and the Management Sciences (INFORMS)	Institute for Operations Research and the Management Sciences (INFORMS), 58, 0.14% Institute for Operations Research and the Management Sciences (INFORMS) 58 citations, 0.14%
Institute of Electronics, Information and Communications Engineers (IEICE)	Institute of Electronics, Information and Communications Engineers (IEICE), 51, 0.12% Institute of Electronics, Information and Communications Engineers (IEICE) 51 citations, 0.12%
Frontiers Media S.A.	Frontiers Media S.A., 45, 0.11% Frontiers Media S.A. 45 citations, 0.11%
Instrument Society of America	Instrument Society of America, 44, 0.11% Instrument Society of America 44 citations, 0.11%
Institute of Electrical Engineers of Japan (IEE Japan)	Institute of Electrical Engineers of Japan (IEE Japan), 44, 0.11% Institute of Electrical Engineers of Japan (IEE Japan) 44 citations, 0.11%
Walter de Gruyter	Walter de Gruyter, 43, 0.1% Walter de Gruyter 43 citations, 0.1%
	, 37, 0.09% 37 citations, 0.09%
American Physical Society (APS)	American Physical Society (APS), 37, 0.09% American Physical Society (APS) 37 citations, 0.09%
Pleiades Publishing	Pleiades Publishing, 33, 0.08% Pleiades Publishing 33 citations, 0.08%
EDP Sciences	EDP Sciences, 30, 0.07% EDP Sciences 30 citations, 0.07%
Social Science Electronic Publishing	Social Science Electronic Publishing, 30, 0.07% Social Science Electronic Publishing 30 citations, 0.07%
Korean Society of Mechanical Engineers	Korean Society of Mechanical Engineers, 28, 0.07% Korean Society of Mechanical Engineers 28 citations, 0.07%
Tsinghua University Press	Tsinghua University Press, 27, 0.06% Tsinghua University Press 27 citations, 0.06%
Public Library of Science (PLoS)	Public Library of Science (PLoS), 24, 0.06% Public Library of Science (PLoS) 24 citations, 0.06%
Annual Reviews	Annual Reviews, 24, 0.06% Annual Reviews 24 citations, 0.06%
Society for Industrial and Applied Mathematics (SIAM)	Society for Industrial and Applied Mathematics (SIAM), 21, 0.05% Society for Industrial and Applied Mathematics (SIAM) 21 citations, 0.05%
American Scientific Publishers	American Scientific Publishers, 21, 0.05% American Scientific Publishers 21 citations, 0.05%
American Institute of Mathematical Sciences (AIMS)	American Institute of Mathematical Sciences (AIMS), 18, 0.04% American Institute of Mathematical Sciences (AIMS) 18 citations, 0.04%
Science in China Press	Science in China Press, 18, 0.04% Science in China Press 18 citations, 0.04%
Oxford University Press	Oxford University Press, 17, 0.04% Oxford University Press 17 citations, 0.04%
Tech Science Press	Tech Science Press, 17, 0.04% Tech Science Press 17 citations, 0.04%
	, 16, 0.04% 16 citations, 0.04%
American Society of Civil Engineers (ASCE)	American Society of Civil Engineers (ASCE), 16, 0.04% American Society of Civil Engineers (ASCE) 16 citations, 0.04%
IntechOpen	IntechOpen, 16, 0.04% IntechOpen 16 citations, 0.04%
Science Alert	Science Alert, 15, 0.04% Science Alert 15 citations, 0.04%
The Technical Association of Photopolymers, Japan	The Technical Association of Photopolymers, Japan, 15, 0.04% The Technical Association of Photopolymers, Japan 15 citations, 0.04%
Japan Society of Mechanical Engineers	Japan Society of Mechanical Engineers, 14, 0.03% Japan Society of Mechanical Engineers 14 citations, 0.03%
China Science Publishing & Media	China Science Publishing & Media, 14, 0.03% China Science Publishing & Media 14 citations, 0.03%
The Korean Institute of Electrical and Electronic Material Engineers	The Korean Institute of Electrical and Electronic Material Engineers, 13, 0.03% The Korean Institute of Electrical and Electronic Material Engineers 13 citations, 0.03%
IOS Press	IOS Press, 12, 0.03% IOS Press 12 citations, 0.03%
American Institute of Aeronautics and Astronautics (AIAA)	American Institute of Aeronautics and Astronautics (AIAA), 12, 0.03% American Institute of Aeronautics and Astronautics (AIAA) 12 citations, 0.03%
Society of Chemical Engineers, Japan	Society of Chemical Engineers, Japan, 12, 0.03% Society of Chemical Engineers, Japan 12 citations, 0.03%
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences	Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, 11, 0.03% Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences 11 citations, 0.03%
	, 11, 0.03% 11 citations, 0.03%
World Scientific and Engineering Academy and Society (WSEAS)	World Scientific and Engineering Academy and Society (WSEAS), 11, 0.03% World Scientific and Engineering Academy and Society (WSEAS) 11 citations, 0.03%
Korean Institute of Electrical Engineers	Korean Institute of Electrical Engineers, 10, 0.02% Korean Institute of Electrical Engineers 10 citations, 0.02%
Taiwan Institute of Chemical Engineers	Taiwan Institute of Chemical Engineers, 10, 0.02% Taiwan Institute of Chemical Engineers 10 citations, 0.02%
The Surface Science Society of Japan	The Surface Science Society of Japan, 10, 0.02% The Surface Science Society of Japan 10 citations, 0.02%
Japan Institute of Electronics Packaging	Japan Institute of Electronics Packaging, 9, 0.02% Japan Institute of Electronics Packaging 9 citations, 0.02%
SAE International	SAE International, 9, 0.02% SAE International 9 citations, 0.02%
The Japan Society for Precision Engineering	The Japan Society for Precision Engineering, 9, 0.02% The Japan Society for Precision Engineering 9 citations, 0.02%
Vacuum Society of Japan	Vacuum Society of Japan, 8, 0.02% Vacuum Society of Japan 8 citations, 0.02%
Fuji Technology Press	Fuji Technology Press, 7, 0.02% Fuji Technology Press 7 citations, 0.02%
Canadian Science Publishing	Canadian Science Publishing, 7, 0.02% Canadian Science Publishing 7 citations, 0.02%
ASTM International	ASTM International, 7, 0.02% ASTM International 7 citations, 0.02%
King Saud University	King Saud University, 6, 0.01% King Saud University 6 citations, 0.01%
The Institute of Electronics Engineers of Korea	The Institute of Electronics Engineers of Korea, 6, 0.01% The Institute of Electronics Engineers of Korea 6 citations, 0.01%
Copernicus	Copernicus, 6, 0.01% Copernicus 6 citations, 0.01%
proceedings of the american control conference	proceedings of the american control conference, 6, 0.01% proceedings of the american control conference 6 citations, 0.01%
SciELO	SciELO, 6, 0.01% SciELO 6 citations, 0.01%
Scientific Research Publishing	Scientific Research Publishing, 6, 0.01% Scientific Research Publishing 6 citations, 0.01%
Bentham Science Publishers Ltd.	Bentham Science Publishers Ltd., 5, 0.01% Bentham Science Publishers Ltd. 5 citations, 0.01%
Proceedings of the National Academy of Sciences (PNAS)	Proceedings of the National Academy of Sciences (PNAS), 5, 0.01% Proceedings of the National Academy of Sciences (PNAS) 5 citations, 0.01%
American Association for the Advancement of Science (AAAS)	American Association for the Advancement of Science (AAAS), 5, 0.01% American Association for the Advancement of Science (AAAS) 5 citations, 0.01%
Mary Ann Liebert	Mary Ann Liebert, 5, 0.01% Mary Ann Liebert 5 citations, 0.01%
Laser Institute of America	Laser Institute of America, 5, 0.01% Laser Institute of America 5 citations, 0.01%
Korean Society of Industrial Engineering Chemistry	Korean Society of Industrial Engineering Chemistry, 5, 0.01% Korean Society of Industrial Engineering Chemistry 5 citations, 0.01%
Information Processing Society of Japan	Information Processing Society of Japan, 5, 0.01% Information Processing Society of Japan 5 citations, 0.01%
The Surface Finishing Society of Japan	The Surface Finishing Society of Japan, 5, 0.01% The Surface Finishing Society of Japan 5 citations, 0.01%
F1000 Research	F1000 Research, 5, 0.01% F1000 Research 5 citations, 0.01%
PeerJ	PeerJ, 4, 0.01% PeerJ 4 citations, 0.01%
Korean Institute of Intelligent Systems	Korean Institute of Intelligent Systems, 4, 0.01% Korean Institute of Intelligent Systems 4 citations, 0.01%
Electromagnetics Academy	Electromagnetics Academy, 4, 0.01% Electromagnetics Academy 4 citations, 0.01%
Shanghai Jiaotong University Press	Shanghai Jiaotong University Press, 4, 0.01% Shanghai Jiaotong University Press 4 citations, 0.01%
Korea Information Processing Society (KIPS)	Korea Information Processing Society (KIPS), 4, 0.01% Korea Information Processing Society (KIPS) 4 citations, 0.01%
Korean Institute of Metals and Materials	Korean Institute of Metals and Materials, 4, 0.01% Korean Institute of Metals and Materials 4 citations, 0.01%
Korean Institute of Communications Information Sciences	Korean Institute of Communications Information Sciences, 4, 0.01% Korean Institute of Communications Information Sciences 4 citations, 0.01%
Alexandria University	Alexandria University, 4, 0.01% Alexandria University 4 citations, 0.01%
	, 4, 0.01% 4 citations, 0.01%
The Korean Vacuum Society	The Korean Vacuum Society, 4, 0.01% The Korean Vacuum Society 4 citations, 0.01%
Hans Publishers	Hans Publishers, 4, 0.01% Hans Publishers 4 citations, 0.01%
The Society of Instrument and Control Engineers	The Society of Instrument and Control Engineers, 4, 0.01% The Society of Instrument and Control Engineers 4 citations, 0.01%
Show all (70 more)
	2000 4000 6000 8000 10000 12000 14000 16000

	10 20 30 40 50 60
National Yang Ming Chiao Tung University	National Yang Ming Chiao Tung University, 60, 2.15% National Yang Ming Chiao Tung University 60 publications, 2.15%
Samsung	Samsung, 55, 1.97% Samsung 55 publications, 1.97%
National Tsing Hua University	National Tsing Hua University, 54, 1.94% National Tsing Hua University 54 publications, 1.94%
Massachusetts Institute of Technology	Massachusetts Institute of Technology, 53, 1.9% Massachusetts Institute of Technology 53 publications, 1.9%
University of California, Berkeley	University of California, Berkeley, 48, 1.72% University of California, Berkeley 48 publications, 1.72%
Korea Advanced Institute of Science and Technology	Korea Advanced Institute of Science and Technology, 45, 1.62% Korea Advanced Institute of Science and Technology 45 publications, 1.62%
Stanford University	Stanford University, 39, 1.4% Stanford University 39 publications, 1.4%
Texas Instruments	Texas Instruments, 37, 1.33% Texas Instruments 37 publications, 1.33%
Georgia Institute of technology	Georgia Institute of technology, 36, 1.29% Georgia Institute of technology 36 publications, 1.29%
University of Edinburgh	University of Edinburgh, 35, 1.26% University of Edinburgh 35 publications, 1.26%
North Carolina State University	North Carolina State University, 32, 1.15% North Carolina State University 32 publications, 1.15%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 28, 1.01% Interuniversity Microelectronics Centre 28 publications, 1.01%
Arizona State University	Arizona State University, 28, 1.01% Arizona State University 28 publications, 1.01%
Toshiba Corporation	Toshiba Corporation, 28, 1.01% Toshiba Corporation 28 publications, 1.01%
University of Arizona	University of Arizona, 26, 0.93% University of Arizona 26 publications, 0.93%
Seoul National University	Seoul National University, 25, 0.9% Seoul National University 25 publications, 0.9%
Taiwan Semiconductor Manufacturing Company	Taiwan Semiconductor Manufacturing Company, 25, 0.9% Taiwan Semiconductor Manufacturing Company 25 publications, 0.9%
University of Michigan	University of Michigan, 25, 0.9% University of Michigan 25 publications, 0.9%
Carnegie Mellon University	Carnegie Mellon University, 24, 0.86% Carnegie Mellon University 24 publications, 0.86%
Infineon Technologies AG	Infineon Technologies AG, 24, 0.86% Infineon Technologies AG 24 publications, 0.86%
National Taiwan University	National Taiwan University, 22, 0.79% National Taiwan University 22 publications, 0.79%
National Taipei University of Technology	National Taipei University of Technology, 20, 0.72% National Taipei University of Technology 20 publications, 0.72%
University of Texas at Austin	University of Texas at Austin, 20, 0.72% University of Texas at Austin 20 publications, 0.72%
National Cheng Kung University	National Cheng Kung University, 19, 0.68% National Cheng Kung University 19 publications, 0.68%
Yonsei University	Yonsei University, 19, 0.68% Yonsei University 19 publications, 0.68%
Katholieke Universiteit Leuven	Katholieke Universiteit Leuven, 18, 0.65% Katholieke Universiteit Leuven 18 publications, 0.65%
National University of Singapore	National University of Singapore, 17, 0.61% National University of Singapore 17 publications, 0.61%
University of Tokyo	University of Tokyo, 17, 0.61% University of Tokyo 17 publications, 0.61%
Tohoku University	Tohoku University, 16, 0.57% Tohoku University 16 publications, 0.57%
New Jersey Institute of Technology	New Jersey Institute of Technology, 15, 0.54% New Jersey Institute of Technology 15 publications, 0.54%
Nippon Electric Company	Nippon Electric Company, 15, 0.54% Nippon Electric Company 15 publications, 0.54%
Ben-Gurion University of the Negev	Ben-Gurion University of the Negev, 14, 0.5% Ben-Gurion University of the Negev 14 publications, 0.5%
Nanyang Technological University	Nanyang Technological University, 14, 0.5% Nanyang Technological University 14 publications, 0.5%
National Taiwan University of Science and Technology	National Taiwan University of Science and Technology, 14, 0.5% National Taiwan University of Science and Technology 14 publications, 0.5%
Purdue University	Purdue University, 14, 0.5% Purdue University 14 publications, 0.5%
Royal Philips	Royal Philips, 14, 0.5% Royal Philips 14 publications, 0.5%
Sungkyunkwan University	Sungkyunkwan University, 13, 0.47% Sungkyunkwan University 13 publications, 0.47%
University of California, Los Angeles	University of California, Los Angeles, 13, 0.47% University of California, Los Angeles 13 publications, 0.47%
Industrial Technology Research Institute	Industrial Technology Research Institute, 13, 0.47% Industrial Technology Research Institute 13 publications, 0.47%
University of Maryland, College Park	University of Maryland, College Park, 13, 0.47% University of Maryland, College Park 13 publications, 0.47%
Guangdong University of Technology	Guangdong University of Technology, 12, 0.43% Guangdong University of Technology 12 publications, 0.43%
National Institute of Standards and Technology	National Institute of Standards and Technology, 12, 0.43% National Institute of Standards and Technology 12 publications, 0.43%
Panasonic Holdings Corporation	Panasonic Holdings Corporation, 12, 0.43% Panasonic Holdings Corporation 12 publications, 0.43%
Tsinghua University	Tsinghua University, 11, 0.39% Tsinghua University 11 publications, 0.39%
Korea University	Korea University, 11, 0.39% Korea University 11 publications, 0.39%
Sony Group Corporation	Sony Group Corporation, 11, 0.39% Sony Group Corporation 11 publications, 0.39%
University of Hagen	University of Hagen, 10, 0.36% University of Hagen 10 publications, 0.36%
Portland State University	Portland State University, 10, 0.36% Portland State University 10 publications, 0.36%
Zhejiang University	Zhejiang University, 9, 0.32% Zhejiang University 9 publications, 0.32%
Central South University	Central South University, 9, 0.32% Central South University 9 publications, 0.32%
Technische Universität Dresden	Technische Universität Dresden, 9, 0.32% Technische Universität Dresden 9 publications, 0.32%
National Yunlin University of Science and Technology	National Yunlin University of Science and Technology, 9, 0.32% National Yunlin University of Science and Technology 9 publications, 0.32%
Myongji University	Myongji University, 9, 0.32% Myongji University 9 publications, 0.32%
Kyoto University	Kyoto University, 9, 0.32% Kyoto University 9 publications, 0.32%
University of Twente	University of Twente, 8, 0.29% University of Twente 8 publications, 0.29%
Eindhoven University of Technology	Eindhoven University of Technology, 8, 0.29% Eindhoven University of Technology 8 publications, 0.29%
National Sun Yat-sen University	National Sun Yat-sen University, 8, 0.29% National Sun Yat-sen University 8 publications, 0.29%
National Chung Hsing University	National Chung Hsing University, 8, 0.29% National Chung Hsing University 8 publications, 0.29%
Huaqiao University	Huaqiao University, 8, 0.29% Huaqiao University 8 publications, 0.29%
Clemson University	Clemson University, 8, 0.29% Clemson University 8 publications, 0.29%
University of South Florida	University of South Florida, 8, 0.29% University of South Florida 8 publications, 0.29%
Macau University of Science and Technology	Macau University of Science and Technology, 8, 0.29% Macau University of Science and Technology 8 publications, 0.29%
University of Cincinnati	University of Cincinnati, 8, 0.29% University of Cincinnati 8 publications, 0.29%
Sandia National Laboratories	Sandia National Laboratories, 8, 0.29% Sandia National Laboratories 8 publications, 0.29%
Texas A&M University	Texas A&M University, 8, 0.29% Texas A&M University 8 publications, 0.29%
ETH Zurich	ETH Zurich, 7, 0.25% ETH Zurich 7 publications, 0.25%
Yuan Ze University	Yuan Ze University, 7, 0.25% Yuan Ze University 7 publications, 0.25%
Rutgers, The State University of New Jersey	Rutgers, The State University of New Jersey, 7, 0.25% Rutgers, The State University of New Jersey 7 publications, 0.25%
National Institute of Advanced Industrial Science and Technology	National Institute of Advanced Industrial Science and Technology, 7, 0.25% National Institute of Advanced Industrial Science and Technology 7 publications, 0.25%
University of Minnesota	University of Minnesota, 7, 0.25% University of Minnesota 7 publications, 0.25%
Clarkson University	Clarkson University, 7, 0.25% Clarkson University 7 publications, 0.25%
University of Wisconsin–Madison	University of Wisconsin–Madison, 7, 0.25% University of Wisconsin–Madison 7 publications, 0.25%
Fujitsu Limited	Fujitsu Limited, 7, 0.25% Fujitsu Limited 7 publications, 0.25%
Indian Institute of Science	Indian Institute of Science, 6, 0.22% Indian Institute of Science 6 publications, 0.22%
Peking University	Peking University, 6, 0.22% Peking University 6 publications, 0.22%
Huazhong University of Science and Technology	Huazhong University of Science and Technology, 6, 0.22% Huazhong University of Science and Technology 6 publications, 0.22%
Xidian University	Xidian University, 6, 0.22% Xidian University 6 publications, 0.22%
Shanghai University	Shanghai University, 6, 0.22% Shanghai University 6 publications, 0.22%
University of Padua	University of Padua, 6, 0.22% University of Padua 6 publications, 0.22%
Chung Yuan Christian University	Chung Yuan Christian University, 6, 0.22% Chung Yuan Christian University 6 publications, 0.22%
University of Tsukuba	University of Tsukuba, 6, 0.22% University of Tsukuba 6 publications, 0.22%
Griffith University	Griffith University, 6, 0.22% Griffith University 6 publications, 0.22%
Columbia University	Columbia University, 6, 0.22% Columbia University 6 publications, 0.22%
Hanyang University	Hanyang University, 6, 0.22% Hanyang University 6 publications, 0.22%
University of Illinois Urbana-Champaign	University of Illinois Urbana-Champaign, 6, 0.22% University of Illinois Urbana-Champaign 6 publications, 0.22%
University of Waterloo	University of Waterloo, 6, 0.22% University of Waterloo 6 publications, 0.22%
Mitsubishi Electric Corporation	Mitsubishi Electric Corporation, 6, 0.22% Mitsubishi Electric Corporation 6 publications, 0.22%
University of Chinese Academy of Sciences	University of Chinese Academy of Sciences, 5, 0.18% University of Chinese Academy of Sciences 5 publications, 0.18%
Harbin Institute of Technology	Harbin Institute of Technology, 5, 0.18% Harbin Institute of Technology 5 publications, 0.18%
Tongji University	Tongji University, 5, 0.18% Tongji University 5 publications, 0.18%
Grenoble Alpes University	Grenoble Alpes University, 5, 0.18% Grenoble Alpes University 5 publications, 0.18%
University of Southern California	University of Southern California, 5, 0.18% University of Southern California 5 publications, 0.18%
Chang Gung University	Chang Gung University, 5, 0.18% Chang Gung University 5 publications, 0.18%
National Central University	National Central University, 5, 0.18% National Central University 5 publications, 0.18%
Chaoyang University of Technology	Chaoyang University of Technology, 5, 0.18% Chaoyang University of Technology 5 publications, 0.18%
Tokyo Institute of Technology	Tokyo Institute of Technology, 5, 0.18% Tokyo Institute of Technology 5 publications, 0.18%
City University of Hong Kong	City University of Hong Kong, 5, 0.18% City University of Hong Kong 5 publications, 0.18%
George Mason University	George Mason University, 5, 0.18% George Mason University 5 publications, 0.18%
Chungbuk National University	Chungbuk National University, 5, 0.18% Chungbuk National University 5 publications, 0.18%
Vienna University of Technology	Vienna University of Technology, 5, 0.18% Vienna University of Technology 5 publications, 0.18%
Show all (70 more)
	10 20 30 40 50 60

	2 4 6 8 10 12 14 16 18
Korea Advanced Institute of Science and Technology	Korea Advanced Institute of Science and Technology, 17, 3.5% Korea Advanced Institute of Science and Technology 17 publications, 3.5%
National Tsing Hua University	National Tsing Hua University, 16, 3.29% National Tsing Hua University 16 publications, 3.29%
Samsung	Samsung, 15, 3.09% Samsung 15 publications, 3.09%
National Taipei University of Technology	National Taipei University of Technology, 11, 2.26% National Taipei University of Technology 11 publications, 2.26%
Interuniversity Microelectronics Centre	Interuniversity Microelectronics Centre, 10, 2.06% Interuniversity Microelectronics Centre 10 publications, 2.06%
Seoul National University	Seoul National University, 10, 2.06% Seoul National University 10 publications, 2.06%
National Sun Yat-sen University	National Sun Yat-sen University, 7, 1.44% National Sun Yat-sen University 7 publications, 1.44%
Korea University	Korea University, 7, 1.44% Korea University 7 publications, 1.44%
Myongji University	Myongji University, 7, 1.44% Myongji University 7 publications, 1.44%
University of Tokyo	University of Tokyo, 7, 1.44% University of Tokyo 7 publications, 1.44%
Eindhoven University of Technology	Eindhoven University of Technology, 6, 1.23% Eindhoven University of Technology 6 publications, 1.23%
Yonsei University	Yonsei University, 6, 1.23% Yonsei University 6 publications, 1.23%
Infineon Technologies AG	Infineon Technologies AG, 6, 1.23% Infineon Technologies AG 6 publications, 1.23%
University of Hagen	University of Hagen, 6, 1.23% University of Hagen 6 publications, 1.23%
Zhejiang University	Zhejiang University, 5, 1.03% Zhejiang University 5 publications, 1.03%
Katholieke Universiteit Leuven	Katholieke Universiteit Leuven, 5, 1.03% Katholieke Universiteit Leuven 5 publications, 1.03%
University of Edinburgh	University of Edinburgh, 5, 1.03% University of Edinburgh 5 publications, 1.03%
National Taiwan University of Science and Technology	National Taiwan University of Science and Technology, 5, 1.03% National Taiwan University of Science and Technology 5 publications, 1.03%
National Central University	National Central University, 5, 1.03% National Central University 5 publications, 1.03%
National Yang Ming Chiao Tung University	National Yang Ming Chiao Tung University, 5, 1.03% National Yang Ming Chiao Tung University 5 publications, 1.03%
National Chung Hsing University	National Chung Hsing University, 5, 1.03% National Chung Hsing University 5 publications, 1.03%
National Yunlin University of Science and Technology	National Yunlin University of Science and Technology, 5, 1.03% National Yunlin University of Science and Technology 5 publications, 1.03%
Sungkyunkwan University	Sungkyunkwan University, 5, 1.03% Sungkyunkwan University 5 publications, 1.03%
Tsinghua University	Tsinghua University, 4, 0.82% Tsinghua University 4 publications, 0.82%
Massachusetts Institute of Technology	Massachusetts Institute of Technology, 4, 0.82% Massachusetts Institute of Technology 4 publications, 0.82%
National Taiwan University	National Taiwan University, 4, 0.82% National Taiwan University 4 publications, 0.82%
Chung Yuan Christian University	Chung Yuan Christian University, 4, 0.82% Chung Yuan Christian University 4 publications, 0.82%
Yuan Ze University	Yuan Ze University, 4, 0.82% Yuan Ze University 4 publications, 0.82%
Tokyo Institute of Technology	Tokyo Institute of Technology, 4, 0.82% Tokyo Institute of Technology 4 publications, 0.82%
Industrial Technology Research Institute	Industrial Technology Research Institute, 4, 0.82% Industrial Technology Research Institute 4 publications, 0.82%
National Cheng Kung University	National Cheng Kung University, 3, 0.62% National Cheng Kung University 3 publications, 0.62%
Huaqiao University	Huaqiao University, 3, 0.62% Huaqiao University 3 publications, 0.62%
Xi'an University of Technology	Xi'an University of Technology, 3, 0.62% Xi'an University of Technology 3 publications, 0.62%
Anhui University	Anhui University, 3, 0.62% Anhui University 3 publications, 0.62%
Georgia Institute of technology	Georgia Institute of technology, 3, 0.62% Georgia Institute of technology 3 publications, 0.62%
Arizona State University	Arizona State University, 3, 0.62% Arizona State University 3 publications, 0.62%
North Carolina State University	North Carolina State University, 3, 0.62% North Carolina State University 3 publications, 0.62%
National Institute of Advanced Industrial Science and Technology	National Institute of Advanced Industrial Science and Technology, 3, 0.62% National Institute of Advanced Industrial Science and Technology 3 publications, 0.62%
Toshiba Corporation	Toshiba Corporation, 3, 0.62% Toshiba Corporation 3 publications, 0.62%
Nara Institute of Science and Technology	Nara Institute of Science and Technology, 3, 0.62% Nara Institute of Science and Technology 3 publications, 0.62%
University of Cincinnati	University of Cincinnati, 3, 0.62% University of Cincinnati 3 publications, 0.62%
Harbin Institute of Technology	Harbin Institute of Technology, 2, 0.41% Harbin Institute of Technology 2 publications, 0.41%
Ben-Gurion University of the Negev	Ben-Gurion University of the Negev, 2, 0.41% Ben-Gurion University of the Negev 2 publications, 0.41%
University of Electronic Science and Technology of China	University of Electronic Science and Technology of China, 2, 0.41% University of Electronic Science and Technology of China 2 publications, 0.41%
Grenoble Alpes University	Grenoble Alpes University, 2, 0.41% Grenoble Alpes University 2 publications, 0.41%
Beijing University of Technology	Beijing University of Technology, 2, 0.41% Beijing University of Technology 2 publications, 0.41%
Technische Universität Dresden	Technische Universität Dresden, 2, 0.41% Technische Universität Dresden 2 publications, 0.41%
Hebei University of Technology	Hebei University of Technology, 2, 0.41% Hebei University of Technology 2 publications, 0.41%
Northeastern University	Northeastern University, 2, 0.41% Northeastern University 2 publications, 0.41%
University of Padua	University of Padua, 2, 0.41% University of Padua 2 publications, 0.41%
Guangdong University of Technology	Guangdong University of Technology, 2, 0.41% Guangdong University of Technology 2 publications, 0.41%
Feng Chia University	Feng Chia University, 2, 0.41% Feng Chia University 2 publications, 0.41%
University of Strathclyde	University of Strathclyde, 2, 0.41% University of Strathclyde 2 publications, 0.41%
Tokyo Metropolitan University	Tokyo Metropolitan University, 2, 0.41% Tokyo Metropolitan University 2 publications, 0.41%
Dongguk University	Dongguk University, 2, 0.41% Dongguk University 2 publications, 0.41%
University of California, Berkeley	University of California, Berkeley, 2, 0.41% University of California, Berkeley 2 publications, 0.41%
Kyoto University	Kyoto University, 2, 0.41% Kyoto University 2 publications, 0.41%
Tohoku University	Tohoku University, 2, 0.41% Tohoku University 2 publications, 0.41%
University of Texas at Austin	University of Texas at Austin, 2, 0.41% University of Texas at Austin 2 publications, 0.41%
Taiwan Semiconductor Manufacturing Company	Taiwan Semiconductor Manufacturing Company, 2, 0.41% Taiwan Semiconductor Manufacturing Company 2 publications, 0.41%
Kyushu University	Kyushu University, 2, 0.41% Kyushu University 2 publications, 0.41%
Nihon University	Nihon University, 2, 0.41% Nihon University 2 publications, 0.41%
Japan Aerospace Exploration Agency	Japan Aerospace Exploration Agency, 2, 0.41% Japan Aerospace Exploration Agency 2 publications, 0.41%
Texas A&M University	Texas A&M University, 2, 0.41% Texas A&M University 2 publications, 0.41%
Texas State University	Texas State University, 2, 0.41% Texas State University 2 publications, 0.41%
Heriot-Watt University	Heriot-Watt University, 2, 0.41% Heriot-Watt University 2 publications, 0.41%
King Abdulaziz University	King Abdulaziz University, 1, 0.21% King Abdulaziz University 1 publication, 0.21%
Galatasaray University	Galatasaray University, 1, 0.21% Galatasaray University 1 publication, 0.21%
Indian Institute of Science	Indian Institute of Science, 1, 0.21% Indian Institute of Science 1 publication, 0.21%
Indian Institute of Technology Madras	Indian Institute of Technology Madras, 1, 0.21% Indian Institute of Technology Madras 1 publication, 0.21%
Indian Institute of Technology Gandhinagar	Indian Institute of Technology Gandhinagar, 1, 0.21% Indian Institute of Technology Gandhinagar 1 publication, 0.21%
Indian Institute of Technology Hyderabad	Indian Institute of Technology Hyderabad, 1, 0.21% Indian Institute of Technology Hyderabad 1 publication, 0.21%
Indian Institute of Technology (Indian School of Mines) Dhanbad	Indian Institute of Technology (Indian School of Mines) Dhanbad, 1, 0.21% Indian Institute of Technology (Indian School of Mines) Dhanbad 1 publication, 0.21%
Banaras Hindu University	Banaras Hindu University, 1, 0.21% Banaras Hindu University 1 publication, 0.21%
University of Kerala	University of Kerala, 1, 0.21% University of Kerala 1 publication, 0.21%
National Institute of Technology Calicut	National Institute of Technology Calicut, 1, 0.21% National Institute of Technology Calicut 1 publication, 0.21%
Malaviya National Institute of Technology Jaipur	Malaviya National Institute of Technology Jaipur, 1, 0.21% Malaviya National Institute of Technology Jaipur 1 publication, 0.21%
Motilal Nehru National Institute of Technology Allahabad	Motilal Nehru National Institute of Technology Allahabad, 1, 0.21% Motilal Nehru National Institute of Technology Allahabad 1 publication, 0.21%
National Institute of Technology Nagaland	National Institute of Technology Nagaland, 1, 0.21% National Institute of Technology Nagaland 1 publication, 0.21%
Beijing Institute of Technology	Beijing Institute of Technology, 1, 0.21% Beijing Institute of Technology 1 publication, 0.21%
University of Chinese Academy of Sciences	University of Chinese Academy of Sciences, 1, 0.21% University of Chinese Academy of Sciences 1 publication, 0.21%
Peking University	Peking University, 1, 0.21% Peking University 1 publication, 0.21%
Shanghai Jiao Tong University	Shanghai Jiao Tong University, 1, 0.21% Shanghai Jiao Tong University 1 publication, 0.21%
Fudan University	Fudan University, 1, 0.21% Fudan University 1 publication, 0.21%
Tongji University	Tongji University, 1, 0.21% Tongji University 1 publication, 0.21%
Sichuan University	Sichuan University, 1, 0.21% Sichuan University 1 publication, 0.21%
Jilin University	Jilin University, 1, 0.21% Jilin University 1 publication, 0.21%
Central Electronics Engineering Research Institute	Central Electronics Engineering Research Institute, 1, 0.21% Central Electronics Engineering Research Institute 1 publication, 0.21%
Karlsruhe Institute of Technology	Karlsruhe Institute of Technology, 1, 0.21% Karlsruhe Institute of Technology 1 publication, 0.21%
University of Twente	University of Twente, 1, 0.21% University of Twente 1 publication, 0.21%
Ghent University	Ghent University, 1, 0.21% Ghent University 1 publication, 0.21%
Technical University of Munich	Technical University of Munich, 1, 0.21% Technical University of Munich 1 publication, 0.21%
University of Bordeaux	University of Bordeaux, 1, 0.21% University of Bordeaux 1 publication, 0.21%
Ariel University	Ariel University, 1, 0.21% Ariel University 1 publication, 0.21%
Nanjing University of Posts and Telecommunications	Nanjing University of Posts and Telecommunications, 1, 0.21% Nanjing University of Posts and Telecommunications 1 publication, 0.21%
Southeast University	Southeast University, 1, 0.21% Southeast University 1 publication, 0.21%
Technical University of Malaysia Malacca	Technical University of Malaysia Malacca, 1, 0.21% Technical University of Malaysia Malacca 1 publication, 0.21%
Beijing University of Posts and Telecommunications	Beijing University of Posts and Telecommunications, 1, 0.21% Beijing University of Posts and Telecommunications 1 publication, 0.21%
Sapienza University of Rome	Sapienza University of Rome, 1, 0.21% Sapienza University of Rome 1 publication, 0.21%
Aalto University	Aalto University, 1, 0.21% Aalto University 1 publication, 0.21%
Show all (70 more)
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	200 400 600 800 1000 1200
USA	USA, 1042, 37.41% USA 1042 publications, 37.41%
China	China, 414, 14.87% China 414 publications, 14.87%
Japan	Japan, 303, 10.88% Japan 303 publications, 10.88%
Republic of Korea	Republic of Korea, 189, 6.79% Republic of Korea 189 publications, 6.79%
Germany	Germany, 100, 3.59% Germany 100 publications, 3.59%
United Kingdom	United Kingdom, 66, 2.37% United Kingdom 66 publications, 2.37%
France	France, 57, 2.05% France 57 publications, 2.05%
Netherlands	Netherlands, 47, 1.69% Netherlands 47 publications, 1.69%
Singapore	Singapore, 43, 1.54% Singapore 43 publications, 1.54%
Belgium	Belgium, 41, 1.47% Belgium 41 publications, 1.47%
India	India, 31, 1.11% India 31 publications, 1.11%
Israel	Israel, 29, 1.04% Israel 29 publications, 1.04%
Italy	Italy, 26, 0.93% Italy 26 publications, 0.93%
Canada	Canada, 23, 0.83% Canada 23 publications, 0.83%
Austria	Austria, 18, 0.65% Austria 18 publications, 0.65%
Ireland	Ireland, 14, 0.5% Ireland 14 publications, 0.5%
Australia	Australia, 9, 0.32% Australia 9 publications, 0.32%
Spain	Spain, 9, 0.32% Spain 9 publications, 0.32%
Switzerland	Switzerland, 9, 0.32% Switzerland 9 publications, 0.32%
Malaysia	Malaysia, 7, 0.25% Malaysia 7 publications, 0.25%
UAE	UAE, 5, 0.18% UAE 5 publications, 0.18%
Egypt	Egypt, 4, 0.14% Egypt 4 publications, 0.14%
Turkey	Turkey, 4, 0.14% Turkey 4 publications, 0.14%
Sweden	Sweden, 4, 0.14% Sweden 4 publications, 0.14%
Lebanon	Lebanon, 3, 0.11% Lebanon 3 publications, 0.11%
Romania	Romania, 3, 0.11% Romania 3 publications, 0.11%
Saudi Arabia	Saudi Arabia, 3, 0.11% Saudi Arabia 3 publications, 0.11%
Finland	Finland, 3, 0.11% Finland 3 publications, 0.11%
Vietnam	Vietnam, 2, 0.07% Vietnam 2 publications, 0.07%
Iran	Iran, 2, 0.07% Iran 2 publications, 0.07%
Mexico	Mexico, 2, 0.07% Mexico 2 publications, 0.07%
Poland	Poland, 2, 0.07% Poland 2 publications, 0.07%
Thailand	Thailand, 2, 0.07% Thailand 2 publications, 0.07%
Brazil	Brazil, 1, 0.04% Brazil 1 publication, 0.04%
Brunei	Brunei, 1, 0.04% Brunei 1 publication, 0.04%
Hungary	Hungary, 1, 0.04% Hungary 1 publication, 0.04%
Greece	Greece, 1, 0.04% Greece 1 publication, 0.04%
Denmark	Denmark, 1, 0.04% Denmark 1 publication, 0.04%
Iceland	Iceland, 1, 0.04% Iceland 1 publication, 0.04%
Colombia	Colombia, 1, 0.04% Colombia 1 publication, 0.04%
Puerto Rico	Puerto Rico, 1, 0.04% Puerto Rico 1 publication, 0.04%
Serbia	Serbia, 1, 0.04% Serbia 1 publication, 0.04%
Philippines	Philippines, 1, 0.04% Philippines 1 publication, 0.04%
South Africa	South Africa, 1, 0.04% South Africa 1 publication, 0.04%
Show all (14 more)
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IEEE Transactions on Semiconductor Manufacturing

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	500 1000 1500 2000 2500 3000 3500 4000 4500
IEEE Transactions on Semiconductor Manufacturing	IEEE Transactions on Semiconductor Manufacturing, 4315, 10.36% IEEE Transactions on Semiconductor Manufacturing 4315 citations, 10.36%
International Journal of Production Research	International Journal of Production Research, 1058, 2.54% International Journal of Production Research 1058 citations, 2.54%
IEEE Transactions on Automation Science and Engineering	IEEE Transactions on Automation Science and Engineering, 808, 1.94% IEEE Transactions on Automation Science and Engineering 808 citations, 1.94%
IEEE Access	IEEE Access, 631, 1.52% IEEE Access 631 citations, 1.52%
Computers and Industrial Engineering	Computers and Industrial Engineering, 500, 1.2% Computers and Industrial Engineering 500 citations, 1.2%
International Journal of Advanced Manufacturing Technology	International Journal of Advanced Manufacturing Technology, 468, 1.12% International Journal of Advanced Manufacturing Technology 468 citations, 1.12%
Expert Systems with Applications	Expert Systems with Applications, 459, 1.1% Expert Systems with Applications 459 citations, 1.1%
Journal of Intelligent Manufacturing	Journal of Intelligent Manufacturing, 406, 0.98% Journal of Intelligent Manufacturing 406 citations, 0.98%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes	Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 376, 0.9% Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes 376 citations, 0.9%
IEEE Transactions on Electron Devices	IEEE Transactions on Electron Devices, 362, 0.87% IEEE Transactions on Electron Devices 362 citations, 0.87%
IEEE Transactions on Systems, Man, and Cybernetics: Systems	IEEE Transactions on Systems, Man, and Cybernetics: Systems, 342, 0.82% IEEE Transactions on Systems, Man, and Cybernetics: Systems 342 citations, 0.82%
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems	IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 306, 0.73% IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 306 citations, 0.73%
Journal of Process Control	Journal of Process Control, 284, 0.68% Journal of Process Control 284 citations, 0.68%
Microelectronic Engineering	Microelectronic Engineering, 263, 0.63% Microelectronic Engineering 263 citations, 0.63%
Applied Sciences (Switzerland)	Applied Sciences (Switzerland), 250, 0.6% Applied Sciences (Switzerland) 250 citations, 0.6%
Journal of the Electrochemical Society	Journal of the Electrochemical Society, 248, 0.6% Journal of the Electrochemical Society 248 citations, 0.6%
Journal of Manufacturing Systems	Journal of Manufacturing Systems, 239, 0.57% Journal of Manufacturing Systems 239 citations, 0.57%
MRS Proceedings	MRS Proceedings, 235, 0.56% MRS Proceedings 235 citations, 0.56%
IFAC Proceedings Volumes	IFAC Proceedings Volumes, 234, 0.56% IFAC Proceedings Volumes 234 citations, 0.56%
Operations Research/ Computer Science Interfaces Series	Operations Research/ Computer Science Interfaces Series, 232, 0.56% Operations Research/ Computer Science Interfaces Series 232 citations, 0.56%
ECS Journal of Solid State Science and Technology	ECS Journal of Solid State Science and Technology, 224, 0.54% ECS Journal of Solid State Science and Technology 224 citations, 0.54%
IIE Transactions	IIE Transactions, 221, 0.53% IIE Transactions 221 citations, 0.53%
Microelectronics Reliability	Microelectronics Reliability, 213, 0.51% Microelectronics Reliability 213 citations, 0.51%
Journal of Applied Physics	Journal of Applied Physics, 200, 0.48% Journal of Applied Physics 200 citations, 0.48%
IEEE Transactions on Instrumentation and Measurement	IEEE Transactions on Instrumentation and Measurement, 184, 0.44% IEEE Transactions on Instrumentation and Measurement 184 citations, 0.44%
Electronics (Switzerland)	Electronics (Switzerland), 174, 0.42% Electronics (Switzerland) 174 citations, 0.42%
Sensors	Sensors, 162, 0.39% Sensors 162 citations, 0.39%
IEEE Transactions on Very Large Scale Integration (VLSI) Systems	IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 160, 0.38% IEEE Transactions on Very Large Scale Integration (VLSI) Systems 160 citations, 0.38%
Lecture Notes in Computer Science	Lecture Notes in Computer Science, 155, 0.37% Lecture Notes in Computer Science 155 citations, 0.37%
Applied Physics Letters	Applied Physics Letters, 151, 0.36% Applied Physics Letters 151 citations, 0.36%
Computers and Operations Research	Computers and Operations Research, 147, 0.35% Computers and Operations Research 147 citations, 0.35%
IEEE Transactions on Industrial Informatics	IEEE Transactions on Industrial Informatics, 146, 0.35% IEEE Transactions on Industrial Informatics 146 citations, 0.35%
European Journal of Operational Research	European Journal of Operational Research, 145, 0.35% European Journal of Operational Research 145 citations, 0.35%
International Journal of Production Economics	International Journal of Production Economics, 143, 0.34% International Journal of Production Economics 143 citations, 0.34%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 141, 0.34% Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 141 citations, 0.34%
Applied Soft Computing Journal	Applied Soft Computing Journal, 139, 0.33% Applied Soft Computing Journal 139 citations, 0.33%
Engineering Applications of Artificial Intelligence	Engineering Applications of Artificial Intelligence, 136, 0.33% Engineering Applications of Artificial Intelligence 136 citations, 0.33%
IFAC-PapersOnLine	IFAC-PapersOnLine, 128, 0.31% IFAC-PapersOnLine 128 citations, 0.31%
IEEE Transactions on Components, Packaging and Manufacturing Technology	IEEE Transactions on Components, Packaging and Manufacturing Technology, 128, 0.31% IEEE Transactions on Components, Packaging and Manufacturing Technology 128 citations, 0.31%
Quality and Reliability Engineering International	Quality and Reliability Engineering International, 126, 0.3% Quality and Reliability Engineering International 126 citations, 0.3%
Computers in Industry	Computers in Industry, 125, 0.3% Computers in Industry 125 citations, 0.3%
Production Planning and Control	Production Planning and Control, 122, 0.29% Production Planning and Control 122 citations, 0.29%
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 121, 0.29% Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics 121 citations, 0.29%
Industrial & Engineering Chemistry Research	Industrial & Engineering Chemistry Research, 119, 0.29% Industrial & Engineering Chemistry Research 119 citations, 0.29%
Computers and Chemical Engineering	Computers and Chemical Engineering, 102, 0.24% Computers and Chemical Engineering 102 citations, 0.24%
Applied Surface Science	Applied Surface Science, 102, 0.24% Applied Surface Science 102 citations, 0.24%
Robotics and Computer-Integrated Manufacturing	Robotics and Computer-Integrated Manufacturing, 101, 0.24% Robotics and Computer-Integrated Manufacturing 101 citations, 0.24%
IEEE Electron Device Letters	IEEE Electron Device Letters, 100, 0.24% IEEE Electron Device Letters 100 citations, 0.24%
Materials Science in Semiconductor Processing	Materials Science in Semiconductor Processing, 97, 0.23% Materials Science in Semiconductor Processing 97 citations, 0.23%
Journal of Manufacturing Science and Engineering, Transactions of the ASME	Journal of Manufacturing Science and Engineering, Transactions of the ASME, 97, 0.23% Journal of Manufacturing Science and Engineering, Transactions of the ASME 97 citations, 0.23%
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena	Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, 95, 0.23% Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena 95 citations, 0.23%
Micromachines	Micromachines, 94, 0.23% Micromachines 94 citations, 0.23%
Thin Solid Films	Thin Solid Films, 94, 0.23% Thin Solid Films 94 citations, 0.23%
IEEE Robotics and Automation Letters	IEEE Robotics and Automation Letters, 90, 0.22% IEEE Robotics and Automation Letters 90 citations, 0.22%
Solid-State Electronics	Solid-State Electronics, 89, 0.21% Solid-State Electronics 89 citations, 0.21%
Semiconductor Science and Technology	Semiconductor Science and Technology, 89, 0.21% Semiconductor Science and Technology 89 citations, 0.21%
Measurement Science and Technology	Measurement Science and Technology, 79, 0.19% Measurement Science and Technology 79 citations, 0.19%
Optics Express	Optics Express, 78, 0.19% Optics Express 78 citations, 0.19%
Microelectronics Journal	Microelectronics Journal, 77, 0.18% Microelectronics Journal 77 citations, 0.18%
IEEE Transactions on Control Systems Technology	IEEE Transactions on Control Systems Technology, 77, 0.18% IEEE Transactions on Control Systems Technology 77 citations, 0.18%
IEEE Transactions on Device and Materials Reliability	IEEE Transactions on Device and Materials Reliability, 76, 0.18% IEEE Transactions on Device and Materials Reliability 76 citations, 0.18%
Sustainability	Sustainability, 76, 0.18% Sustainability 76 citations, 0.18%
Advanced Materials Research	Advanced Materials Research, 73, 0.18% Advanced Materials Research 73 citations, 0.18%
IISE Transactions	IISE Transactions, 72, 0.17% IISE Transactions 72 citations, 0.17%
IEEE Transactions on Robotics and Automation	IEEE Transactions on Robotics and Automation, 72, 0.17% IEEE Transactions on Robotics and Automation 72 citations, 0.17%
International Journal of Precision Engineering and Manufacturing	International Journal of Precision Engineering and Manufacturing, 71, 0.17% International Journal of Precision Engineering and Manufacturing 71 citations, 0.17%
Processes	Processes, 71, 0.17% Processes 71 citations, 0.17%
Proceedings of the IEEE	Proceedings of the IEEE, 69, 0.17% Proceedings of the IEEE 69 citations, 0.17%
IEEE Transactions on Electronics Packaging Manufacturing	IEEE Transactions on Electronics Packaging Manufacturing, 69, 0.17% IEEE Transactions on Electronics Packaging Manufacturing 69 citations, 0.17%
IEEE Sensors Journal	IEEE Sensors Journal, 66, 0.16% IEEE Sensors Journal 66 citations, 0.16%
Journal Physics D: Applied Physics	Journal Physics D: Applied Physics, 66, 0.16% Journal Physics D: Applied Physics 66 citations, 0.16%
International Journal of Computer Integrated Manufacturing	International Journal of Computer Integrated Manufacturing, 66, 0.16% International Journal of Computer Integrated Manufacturing 66 citations, 0.16%
IEEE Transactions on Circuits and Systems I: Regular Papers	IEEE Transactions on Circuits and Systems I: Regular Papers, 63, 0.15% IEEE Transactions on Circuits and Systems I: Regular Papers 63 citations, 0.15%
Journal of Micromechanics and Microengineering	Journal of Micromechanics and Microengineering, 63, 0.15% Journal of Micromechanics and Microengineering 63 citations, 0.15%
Advanced Engineering Informatics	Advanced Engineering Informatics, 62, 0.15% Advanced Engineering Informatics 62 citations, 0.15%
Scientific Reports	Scientific Reports, 60, 0.14% Scientific Reports 60 citations, 0.14%
Control Engineering Practice	Control Engineering Practice, 60, 0.14% Control Engineering Practice 60 citations, 0.14%
IEEE Journal of Solid-State Circuits	IEEE Journal of Solid-State Circuits, 59, 0.14% IEEE Journal of Solid-State Circuits 59 citations, 0.14%
Journal of Electronic Testing: Theory and Applications (JETTA)	Journal of Electronic Testing: Theory and Applications (JETTA), 58, 0.14% Journal of Electronic Testing: Theory and Applications (JETTA) 58 citations, 0.14%
IEEE Transactions on Industrial Electronics	IEEE Transactions on Industrial Electronics, 57, 0.14% IEEE Transactions on Industrial Electronics 57 citations, 0.14%
Integration, the VLSI Journal	Integration, the VLSI Journal, 57, 0.14% Integration, the VLSI Journal 57 citations, 0.14%
Mathematical Problems in Engineering	Mathematical Problems in Engineering, 57, 0.14% Mathematical Problems in Engineering 57 citations, 0.14%
Journal of Quality Technology	Journal of Quality Technology, 56, 0.13% Journal of Quality Technology 56 citations, 0.13%
Sensors and Actuators, A: Physical	Sensors and Actuators, A: Physical, 55, 0.13% Sensors and Actuators, A: Physical 55 citations, 0.13%
Annals of Operations Research	Annals of Operations Research, 53, 0.13% Annals of Operations Research 53 citations, 0.13%
Journal of Micro/ Nanolithography, MEMS, and MOEMS	Journal of Micro/ Nanolithography, MEMS, and MOEMS, 53, 0.13% Journal of Micro/ Nanolithography, MEMS, and MOEMS 53 citations, 0.13%
Applied Optics	Applied Optics, 53, 0.13% Applied Optics 53 citations, 0.13%
Journal of Electronic Materials	Journal of Electronic Materials, 53, 0.13% Journal of Electronic Materials 53 citations, 0.13%
Measurement: Journal of the International Measurement Confederation	Measurement: Journal of the International Measurement Confederation, 52, 0.12% Measurement: Journal of the International Measurement Confederation 52 citations, 0.12%
Neural Computing and Applications	Neural Computing and Applications, 52, 0.12% Neural Computing and Applications 52 citations, 0.12%
Applied Mechanics and Materials	Applied Mechanics and Materials, 51, 0.12% Applied Mechanics and Materials 51 citations, 0.12%
International Journal of Heat and Mass Transfer	International Journal of Heat and Mass Transfer, 50, 0.12% International Journal of Heat and Mass Transfer 50 citations, 0.12%
Wear	Wear, 50, 0.12% Wear 50 citations, 0.12%
Journal of Physics: Conference Series	Journal of Physics: Conference Series, 49, 0.12% Journal of Physics: Conference Series 49 citations, 0.12%
Journal of Semiconductors	Journal of Semiconductors, 49, 0.12% Journal of Semiconductors 49 citations, 0.12%
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture	Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 49, 0.12% Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 49 citations, 0.12%
Journal of Scheduling	Journal of Scheduling, 48, 0.12% Journal of Scheduling 48 citations, 0.12%
Chemometrics and Intelligent Laboratory Systems	Chemometrics and Intelligent Laboratory Systems, 48, 0.12% Chemometrics and Intelligent Laboratory Systems 48 citations, 0.12%
Proceedings of SPIE - The International Society for Optical Engineering	Proceedings of SPIE - The International Society for Optical Engineering, 46, 0.11% Proceedings of SPIE - The International Society for Optical Engineering 46 citations, 0.11%
Review of Scientific Instruments	Review of Scientific Instruments, 45, 0.11% Review of Scientific Instruments 45 citations, 0.11%
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	20 40 60 80 100 120 140
China	China, 126, 25.93% China 126 publications, 25.93%
USA	USA, 84, 17.28% USA 84 publications, 17.28%
Republic of Korea	Republic of Korea, 69, 14.2% Republic of Korea 69 publications, 14.2%
Japan	Japan, 40, 8.23% Japan 40 publications, 8.23%
Germany	Germany, 18, 3.7% Germany 18 publications, 3.7%
Belgium	Belgium, 12, 2.47% Belgium 12 publications, 2.47%
Netherlands	Netherlands, 10, 2.06% Netherlands 10 publications, 2.06%
France	France, 9, 1.85% France 9 publications, 1.85%
United Kingdom	United Kingdom, 9, 1.85% United Kingdom 9 publications, 1.85%
India	India, 8, 1.65% India 8 publications, 1.65%
Italy	Italy, 5, 1.03% Italy 5 publications, 1.03%
Israel	Israel, 4, 0.82% Israel 4 publications, 0.82%
Canada	Canada, 3, 0.62% Canada 3 publications, 0.62%
Singapore	Singapore, 3, 0.62% Singapore 3 publications, 0.62%
Australia	Australia, 1, 0.21% Australia 1 publication, 0.21%
Austria	Austria, 1, 0.21% Austria 1 publication, 0.21%
Brazil	Brazil, 1, 0.21% Brazil 1 publication, 0.21%
Hungary	Hungary, 1, 0.21% Hungary 1 publication, 0.21%
Ireland	Ireland, 1, 0.21% Ireland 1 publication, 0.21%
Spain	Spain, 1, 0.21% Spain 1 publication, 0.21%
Lebanon	Lebanon, 1, 0.21% Lebanon 1 publication, 0.21%
Mexico	Mexico, 1, 0.21% Mexico 1 publication, 0.21%
Saudi Arabia	Saudi Arabia, 1, 0.21% Saudi Arabia 1 publication, 0.21%
Finland	Finland, 1, 0.21% Finland 1 publication, 0.21%
Switzerland	Switzerland, 1, 0.21% Switzerland 1 publication, 0.21%
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