Nanoimprint Lithography on Silica Sol-Gels: A Simple Route to Sequential Patterning

Since the pioneering work of S.Y. Chou et al.[1] Nano Imprint Lithography (NIL) has emerged as a promising technique for surface patterning, opening for numerous applications ranging from nanophotonics[2] to microfluidics[3]. NIL basically consists in the stamping of deformable surfaces or films. Preferred materials are thermoplastics[4] and UV curable resists[5]. So far, most papers report on single imprinting methods for which the same surface is imprinted only once. In the present paper, we report the imprinting of square silica structures from simple line gratings and demonstrate how the specific thermo-rheological behavior of ICSG resists can be harnessed to form complex structures by sequential imprinting at low pressures.