Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

American Vacuum Society
American Vacuum Society
ISSN: 10711023, 15208567

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journal names
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Most cited in 5 years

Found 
Found 

Top-100

Citing journals

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Journal of Vacuum Science and Technology B
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Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
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Journal of Applied Physics
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Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
805 citations, 2.41%
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473 citations, 1.42%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Journal Physics D: Applied Physics
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ACS applied materials & interfaces
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Journal of Physical Chemistry C
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Nano Letters
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Proceedings of SPIE - The International Society for Optical Engineering
266 citations, 0.8%
ACS Nano
265 citations, 0.79%
Physical Review B
234 citations, 0.7%
Journal of Photopolymer Science and Technology
230 citations, 0.69%
Journal of Micromechanics and Microengineering
228 citations, 0.68%
Nanoscale
225 citations, 0.67%
Advanced Materials
213 citations, 0.64%
IEEE Transactions on Electron Devices
210 citations, 0.63%
Scientific Reports
198 citations, 0.59%
Journal of the Electrochemical Society
196 citations, 0.59%
Applied Physics A: Materials Science and Processing
192 citations, 0.57%
Journal of Crystal Growth
178 citations, 0.53%
Applied Physics Express
174 citations, 0.52%
Beilstein Journal of Nanotechnology
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MRS Proceedings
154 citations, 0.46%
Journal of Micro/ Nanolithography, MEMS, and MOEMS
149 citations, 0.45%
ECS Journal of Solid State Science and Technology
147 citations, 0.44%
Nanomaterials
147 citations, 0.44%
Langmuir
146 citations, 0.44%
Carbon
145 citations, 0.43%
Journal of Electronic Materials
141 citations, 0.42%
Ultramicroscopy
140 citations, 0.42%
Advanced Functional Materials
131 citations, 0.39%
Micromachines
129 citations, 0.39%
RSC Advances
129 citations, 0.39%
Physica Status Solidi (A) Applications and Materials Science
128 citations, 0.38%
Small
127 citations, 0.38%
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
125 citations, 0.37%
Diamond and Related Materials
124 citations, 0.37%
Physical Chemistry Chemical Physics
123 citations, 0.37%
Review of Scientific Instruments
119 citations, 0.36%
Nanoscale Research Letters
116 citations, 0.35%
Journal of Alloys and Compounds
115 citations, 0.34%
AIP Advances
114 citations, 0.34%
Microscopy and Microanalysis
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Journal of Physics Condensed Matter
103 citations, 0.31%
Materials Science in Semiconductor Processing
103 citations, 0.31%
Journal of Physics: Conference Series
102 citations, 0.31%
Chemistry of Materials
101 citations, 0.3%
Solid-State Electronics
95 citations, 0.28%
IEEE Electron Device Letters
95 citations, 0.28%
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93 citations, 0.28%
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91 citations, 0.27%
Applied Optics
89 citations, 0.27%
Surface and Coatings Technology
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Journal of Materials Chemistry C
88 citations, 0.26%
Journal of Materials Science: Materials in Electronics
88 citations, 0.26%
IEEE Transactions on Nanotechnology
80 citations, 0.24%
Applied Physics Reviews
78 citations, 0.23%
Electrochemical and Solid-State Letters
76 citations, 0.23%
Optics Letters
75 citations, 0.22%
Macromolecules
75 citations, 0.22%
Sensors and Actuators, A: Physical
69 citations, 0.21%
Plasma Processes and Polymers
67 citations, 0.2%
Sensors and Actuators, B: Chemical
66 citations, 0.2%
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65 citations, 0.19%
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62 citations, 0.19%
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Journal of Microelectromechanical Systems
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International Journal of Advanced Manufacturing Technology
60 citations, 0.18%
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59 citations, 0.18%
Physica Status Solidi (B): Basic Research
59 citations, 0.18%
Springer Series in Materials Science
58 citations, 0.17%
Physical Review Letters
57 citations, 0.17%
Journal of Materials Research
56 citations, 0.17%
ACS Applied Nano Materials
56 citations, 0.17%
Journal of Materials Science
56 citations, 0.17%
IEEE Sensors Journal
56 citations, 0.17%
Surface Science
55 citations, 0.16%
Chinese Physics B
55 citations, 0.16%
Ceramics International
55 citations, 0.16%
Nature Communications
54 citations, 0.16%
Materials Research Express
50 citations, 0.15%
Materials Chemistry and Physics
49 citations, 0.15%
Microelectronics Reliability
48 citations, 0.14%
Advanced Materials Research
48 citations, 0.14%
Frontiers of Nanoscience
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Superlattices and Microstructures
47 citations, 0.14%
Crystal Growth and Design
45 citations, 0.13%
Chemical Reviews
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Journal of Chemical Physics
43 citations, 0.13%
Micro and Nano Engineering
43 citations, 0.13%
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Citing publishers

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Elsevier
6285 citations, 18.82%
AIP Publishing
3039 citations, 9.1%
American Vacuum Society
3027 citations, 9.06%
IOP Publishing
2627 citations, 7.87%
Springer Nature
2497 citations, 7.48%
American Chemical Society (ACS)
2168 citations, 6.49%
Institute of Electrical and Electronics Engineers (IEEE)
2030 citations, 6.08%
Wiley
1930 citations, 5.78%
Japan Society of Applied Physics
1434 citations, 4.29%
Royal Society of Chemistry (RSC)
1013 citations, 3.03%
MDPI
753 citations, 2.25%
Optica Publishing Group
666 citations, 1.99%
SPIE-Intl Soc Optical Eng
519 citations, 1.55%
American Physical Society (APS)
455 citations, 1.36%
The Electrochemical Society
425 citations, 1.27%
Taylor & Francis
287 citations, 0.86%
Pleiades Publishing
237 citations, 0.71%
Trans Tech Publications
202 citations, 0.6%
The Technical Association of Photopolymers, Japan
186 citations, 0.56%
Beilstein-Institut
163 citations, 0.49%
Hindawi Limited
145 citations, 0.43%
Cambridge University Press
132 citations, 0.4%
Oxford University Press
130 citations, 0.39%
104 citations, 0.31%
Walter de Gruyter
93 citations, 0.28%
World Scientific
90 citations, 0.27%
Institution of Engineering and Technology (IET)
63 citations, 0.19%
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
52 citations, 0.16%
SAGE
50 citations, 0.15%
49 citations, 0.15%
EDP Sciences
43 citations, 0.13%
ASME International
43 citations, 0.13%
Uspekhi Fizicheskikh Nauk Journal
38 citations, 0.11%
Annual Reviews
37 citations, 0.11%
American Association for the Advancement of Science (AAAS)
34 citations, 0.1%
The Surface Science Society of Japan
34 citations, 0.1%
The Royal Society
32 citations, 0.1%
Frontiers Media S.A.
30 citations, 0.09%
IntechOpen
21 citations, 0.06%
The Korean Society of Precision Engineering
18 citations, 0.05%
International Union of Crystallography (IUCr)
16 citations, 0.05%
The Korean Vacuum Society
16 citations, 0.05%
Public Library of Science (PLoS)
14 citations, 0.04%
Proceedings of the National Academy of Sciences (PNAS)
13 citations, 0.04%
The Korean Institute of Electrical and Electronic Material Engineers
13 citations, 0.04%
Scientific Research Publishing
13 citations, 0.04%
Korean Society of Mechanical Engineers
12 citations, 0.04%
American Institute of Aeronautics and Astronautics (AIAA)
12 citations, 0.04%
Japan Institute of Metals
12 citations, 0.04%
Vacuum Society of Japan
12 citations, 0.04%
American Scientific Publishers
11 citations, 0.03%
Korean Institute of Metals and Materials
11 citations, 0.03%
IGI Global
11 citations, 0.03%
Science in China Press
10 citations, 0.03%
Institute of Electrical Engineers of Japan (IEE Japan)
10 citations, 0.03%
The Surface Finishing Society of Japan
9 citations, 0.03%
8 citations, 0.02%
Bentham Science Publishers Ltd.
7 citations, 0.02%
7 citations, 0.02%
Cold Spring Harbor Laboratory
7 citations, 0.02%
Physical Society of Japan
7 citations, 0.02%
Japan Society of Mechanical Engineers
6 citations, 0.02%
6 citations, 0.02%
The Electrochemical Society of Japan
6 citations, 0.02%
Hans Publishers
6 citations, 0.02%
The Japan Society for Precision Engineering
6 citations, 0.02%
5 citations, 0.01%
Association for Computing Machinery (ACM)
5 citations, 0.01%
Fuji Technology Press
5 citations, 0.01%
5 citations, 0.01%
Science Alert
5 citations, 0.01%
The Russian Academy of Sciences
5 citations, 0.01%
The Materials Research Society of Japan
5 citations, 0.01%
Japan Institute of Electronics Packaging
5 citations, 0.01%
Emerald
4 citations, 0.01%
Korean Society of Industrial Engineering Chemistry
4 citations, 0.01%
Wuhan University of Technology
4 citations, 0.01%
Ceramic Society of Japan
4 citations, 0.01%
Polymer Society of Korea
4 citations, 0.01%
The Japan Society of Polymer Processing
4 citations, 0.01%
The Korean Fiber Society
4 citations, 0.01%
Shanghai Institute of Optics and Fine Mechanics
4 citations, 0.01%
Institute of Electronics, Information and Communications Engineers (IEICE)
4 citations, 0.01%
Institute of Physics, Polish Academy of Sciences
4 citations, 0.01%
Laser Institute of America
3 citations, 0.01%
ASM International
3 citations, 0.01%
Japan Society for Analytical Chemistry
3 citations, 0.01%
Nonferrous Metals Society of China
3 citations, 0.01%
Electromagnetics Academy
3 citations, 0.01%
Tsinghua University Press
3 citations, 0.01%
Chinese Ceramic Society
3 citations, 0.01%
National Academy of Sciences of Ukraine - Institute of Semiconductor Physics
3 citations, 0.01%
Optical Society of India
3 citations, 0.01%
The Chemical Society of Japan
3 citations, 0.01%
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka) (Publications)
3 citations, 0.01%
Opto-Electronic Advances
3 citations, 0.01%
Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii
3 citations, 0.01%
IMR Press
2 citations, 0.01%
Mary Ann Liebert
2 citations, 0.01%
Higher Education Press
2 citations, 0.01%
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Publishing organizations

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Massachusetts Institute of Technology
53 publications, 2.4%
Lawrence Berkeley National Laboratory
47 publications, 2.13%
University of Florida
44 publications, 1.99%
Delft University of Technology
41 publications, 1.85%
Interuniversity Microelectronics Centre
36 publications, 1.63%
National Cheng Kung University
34 publications, 1.54%
Osaka University
34 publications, 1.54%
National Tsing Hua University
33 publications, 1.49%
Katholieke Universiteit Leuven
32 publications, 1.45%
Samsung
32 publications, 1.45%
National Institute of Advanced Industrial Science and Technology
30 publications, 1.36%
Stanford University
28 publications, 1.27%
Tohoku University
26 publications, 1.18%
University of Illinois Urbana-Champaign
25 publications, 1.13%
University of Michigan
25 publications, 1.13%
United States Naval Research Laboratory
25 publications, 1.13%
National University of Singapore
24 publications, 1.09%
National Yang Ming Chiao Tung University
24 publications, 1.09%
Georgia Institute of technology
24 publications, 1.09%
University of Texas at Austin
24 publications, 1.09%
Hanyang University
23 publications, 1.04%
Seoul National University
22 publications, 1%
Arizona State University
22 publications, 1%
National Taiwan University
21 publications, 0.95%
Ohio State University
21 publications, 0.95%
Japan Science and Technology Agency
21 publications, 0.95%
University at Albany, State University of New York
20 publications, 0.9%
Columbia University
19 publications, 0.86%
Tianjin University
18 publications, 0.81%
Cornell University
18 publications, 0.81%
National Institute of Standards and Technology
18 publications, 0.81%
North Carolina State University
18 publications, 0.81%
University of Maryland, College Park
18 publications, 0.81%
University of Houston
18 publications, 0.81%
University of Cambridge
17 publications, 0.77%
Korea University
17 publications, 0.77%
University of California, Berkeley
17 publications, 0.77%
Paul Scherrer Institute
16 publications, 0.72%
Nanyang Technological University
16 publications, 0.72%
Pennsylvania State University
16 publications, 0.72%
Chungnam National University
16 publications, 0.72%
University of Surrey
16 publications, 0.72%
Kyoto University
14 publications, 0.63%
University of Texas at Dallas
14 publications, 0.63%
Harbin Institute of Technology
13 publications, 0.59%
École Polytechnique Fédérale de Lausanne
13 publications, 0.59%
Tokyo University of Science
13 publications, 0.59%
Pohang University of Science and Technology
13 publications, 0.59%
University of Tokyo
13 publications, 0.59%
University of Wisconsin–Madison
13 publications, 0.59%
Texas A&M University
13 publications, 0.59%
University of Glasgow
12 publications, 0.54%
Argonne National Laboratory
12 publications, 0.54%
Sungkyunkwan University
12 publications, 0.54%
Ajou University
12 publications, 0.54%
Hokkaido University
12 publications, 0.54%
University of Wuppertal
12 publications, 0.54%
Watson Research Center
12 publications, 0.54%
Autonomous University of Barcelona
11 publications, 0.5%
Northwestern University
11 publications, 0.5%
Vanderbilt University
11 publications, 0.5%
Institute of Microelectronics, Singapore
11 publications, 0.5%
Université Claude Bernard Lyon 1
11 publications, 0.5%
Duke University
10 publications, 0.45%
National Renewable Energy Laboratory
10 publications, 0.45%
Purdue University
10 publications, 0.45%
RIKEN-Institute of Physical and Chemical Research
10 publications, 0.45%
University of Cincinnati
10 publications, 0.45%
Institute of Rare Metals
9 publications, 0.41%
Peking University
9 publications, 0.41%
Fudan University
9 publications, 0.41%
Technical University of Denmark
9 publications, 0.41%
National Taipei University of Technology
9 publications, 0.41%
Tokyo Institute of Technology
9 publications, 0.41%
University of Notre Dame
9 publications, 0.41%
Oak Ridge National Laboratory
9 publications, 0.41%
Universidade Estadual de Campinas
9 publications, 0.41%
KTH Royal Institute of Technology
8 publications, 0.36%
Southeast University
8 publications, 0.36%
University of Padua
8 publications, 0.36%
University of Catania
8 publications, 0.36%
Princeton University
8 publications, 0.36%
City University of Hong Kong
8 publications, 0.36%
Vienna University of Technology
8 publications, 0.36%
Leipzig University
8 publications, 0.36%
Texas Instruments
8 publications, 0.36%
University of Kentucky
8 publications, 0.36%
University of Chinese Academy of Sciences
7 publications, 0.32%
Australian National University
7 publications, 0.32%
National University of Tainan
7 publications, 0.32%
University of Tsukuba
7 publications, 0.32%
Tokyo University of Agriculture and Technology
7 publications, 0.32%
Korea Advanced Institute of Science and Technology
7 publications, 0.32%
Electronics and Telecommunications Research Institute
7 publications, 0.32%
University of Ulsan
7 publications, 0.32%
Lawrence Livermore National Laboratory
7 publications, 0.32%
West Virginia University
7 publications, 0.32%
Nagoya University
7 publications, 0.32%
Rensselaer Polytechnic Institute
7 publications, 0.32%
Agency for Science, Technology and Research
7 publications, 0.32%
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Publishing countries

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USA, 956, 43.24%
USA
956 publications, 43.24%
Japan, 310, 14.02%
Japan
310 publications, 14.02%
China, 306, 13.84%
China
306 publications, 13.84%
Republic of Korea, 180, 8.14%
Republic of Korea
180 publications, 8.14%
Germany, 145, 6.56%
Germany
145 publications, 6.56%
France, 102, 4.61%
France
102 publications, 4.61%
United Kingdom, 92, 4.16%
United Kingdom
92 publications, 4.16%
Netherlands, 54, 2.44%
Netherlands
54 publications, 2.44%
Belgium, 53, 2.4%
Belgium
53 publications, 2.4%
Singapore, 53, 2.4%
Singapore
53 publications, 2.4%
Italy, 45, 2.04%
Italy
45 publications, 2.04%
Mexico, 39, 1.76%
Mexico
39 publications, 1.76%
Switzerland, 38, 1.72%
Switzerland
38 publications, 1.72%
Canada, 36, 1.63%
Canada
36 publications, 1.63%
Spain, 25, 1.13%
Spain
25 publications, 1.13%
Russia, 21, 0.95%
Russia
21 publications, 0.95%
Sweden, 21, 0.95%
Sweden
21 publications, 0.95%
Finland, 16, 0.72%
Finland
16 publications, 0.72%
India, 15, 0.68%
India
15 publications, 0.68%
Australia, 14, 0.63%
Australia
14 publications, 0.63%
Austria, 14, 0.63%
Austria
14 publications, 0.63%
Brazil, 14, 0.63%
Brazil
14 publications, 0.63%
Denmark, 13, 0.59%
Denmark
13 publications, 0.59%
Poland, 10, 0.45%
Poland
10 publications, 0.45%
Turkey, 8, 0.36%
Turkey
8 publications, 0.36%
Ireland, 7, 0.32%
Ireland
7 publications, 0.32%
Thailand, 7, 0.32%
Thailand
7 publications, 0.32%
New Zealand, 6, 0.27%
New Zealand
6 publications, 0.27%
Slovakia, 6, 0.27%
Slovakia
6 publications, 0.27%
Greece, 5, 0.23%
Greece
5 publications, 0.23%
Israel, 5, 0.23%
Israel
5 publications, 0.23%
Iraq, 5, 0.23%
Iraq
5 publications, 0.23%
Iran, 5, 0.23%
Iran
5 publications, 0.23%
Bulgaria, 4, 0.18%
Bulgaria
4 publications, 0.18%
Vietnam, 3, 0.14%
Vietnam
3 publications, 0.14%
Norway, 3, 0.14%
Norway
3 publications, 0.14%
Puerto Rico, 3, 0.14%
Puerto Rico
3 publications, 0.14%
Romania, 3, 0.14%
Romania
3 publications, 0.14%
Ukraine, 2, 0.09%
Ukraine
2 publications, 0.09%
Estonia, 2, 0.09%
Estonia
2 publications, 0.09%
Portugal, 2, 0.09%
Portugal
2 publications, 0.09%
Georgia, 2, 0.09%
Georgia
2 publications, 0.09%
Colombia, 2, 0.09%
Colombia
2 publications, 0.09%
Slovenia, 2, 0.09%
Slovenia
2 publications, 0.09%
Philippines, 2, 0.09%
Philippines
2 publications, 0.09%
Argentina, 1, 0.05%
Argentina
1 publication, 0.05%
Hungary, 1, 0.05%
Hungary
1 publication, 0.05%
Egypt, 1, 0.05%
Egypt
1 publication, 0.05%
Lebanon, 1, 0.05%
Lebanon
1 publication, 0.05%
Malaysia, 1, 0.05%
Malaysia
1 publication, 0.05%
Pakistan, 1, 0.05%
Pakistan
1 publication, 0.05%
Tunisia, 1, 0.05%
Tunisia
1 publication, 0.05%
Croatia, 1, 0.05%
Croatia
1 publication, 0.05%
Czech Republic, 1, 0.05%
Czech Republic
1 publication, 0.05%
South Africa, 1, 0.05%
South Africa
1 publication, 0.05%
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