Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

American Vacuum Society
American Vacuum Society
ISSN: 10711023, 15208567
Publications
2 211
Citations
32 514
h-index
60
Publications
0
Citations
6 854
Top-3 organizations
Top-3 countries
USA (956 publications)
Japan (310 publications)
China (306 publications)

Most cited in 5 years

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Publications found: 0

Top-100

Citing journals

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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
1827 citations, 5.62%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
1288 citations, 3.96%
Journal of Applied Physics
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Applied Physics Letters
1080 citations, 3.32%
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912 citations, 2.8%
Nanotechnology
899 citations, 2.76%
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
805 citations, 2.48%
Applied Surface Science
449 citations, 1.38%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
437 citations, 1.34%
Journal Physics D: Applied Physics
366 citations, 1.13%
ACS applied materials & interfaces
340 citations, 1.05%
Thin Solid Films
325 citations, 1%
Optics Express
314 citations, 0.97%
Journal of Physical Chemistry C
294 citations, 0.9%
Nano Letters
288 citations, 0.89%
Proceedings of SPIE - The International Society for Optical Engineering
266 citations, 0.82%
ACS Nano
258 citations, 0.79%
Physical Review B
234 citations, 0.72%
Journal of Photopolymer Science and Technology
230 citations, 0.71%
Journal of Micromechanics and Microengineering
223 citations, 0.69%
Nanoscale
218 citations, 0.67%
Advanced Materials
206 citations, 0.63%
IEEE Transactions on Electron Devices
203 citations, 0.62%
Journal of the Electrochemical Society
195 citations, 0.6%
Scientific Reports
195 citations, 0.6%
Applied Physics A: Materials Science and Processing
191 citations, 0.59%
Journal of Crystal Growth
176 citations, 0.54%
Applied Physics Express
175 citations, 0.54%
Beilstein Journal of Nanotechnology
154 citations, 0.47%
MRS Proceedings
154 citations, 0.47%
Semiconductor Science and Technology
153 citations, 0.47%
Journal of Micro/ Nanolithography, MEMS, and MOEMS
149 citations, 0.46%
ECS Journal of Solid State Science and Technology
145 citations, 0.45%
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145 citations, 0.45%
Nanomaterials
143 citations, 0.44%
Carbon
142 citations, 0.44%
Langmuir
141 citations, 0.43%
Journal of Electronic Materials
140 citations, 0.43%
Ultramicroscopy
139 citations, 0.43%
Micromachines
130 citations, 0.4%
Physica Status Solidi (A) Applications and Materials Science
128 citations, 0.39%
RSC Advances
126 citations, 0.39%
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
125 citations, 0.38%
Small
123 citations, 0.38%
Diamond and Related Materials
121 citations, 0.37%
Physical Chemistry Chemical Physics
120 citations, 0.37%
Review of Scientific Instruments
117 citations, 0.36%
Nanoscale Research Letters
117 citations, 0.36%
AIP Advances
113 citations, 0.35%
Advanced Functional Materials
111 citations, 0.34%
Journal of Alloys and Compounds
107 citations, 0.33%
Journal of Physics Condensed Matter
103 citations, 0.32%
Microscopy and Microanalysis
102 citations, 0.31%
Journal of Physics: Conference Series
101 citations, 0.31%
Materials Science in Semiconductor Processing
98 citations, 0.3%
Chemistry of Materials
96 citations, 0.3%
Solid-State Electronics
94 citations, 0.29%
IEEE Electron Device Letters
94 citations, 0.29%
Materials
92 citations, 0.28%
Microsystem Technologies
91 citations, 0.28%
Surface and Coatings Technology
89 citations, 0.27%
Journal of Materials Science: Materials in Electronics
88 citations, 0.27%
Journal of Materials Chemistry C
85 citations, 0.26%
Applied Optics
85 citations, 0.26%
IEEE Transactions on Nanotechnology
78 citations, 0.24%
Electrochemical and Solid-State Letters
76 citations, 0.23%
Applied Physics Reviews
75 citations, 0.23%
Optics Letters
73 citations, 0.22%
Macromolecules
73 citations, 0.22%
Sensors and Actuators, A: Physical
69 citations, 0.21%
Sensors and Actuators, B: Chemical
66 citations, 0.2%
Plasma Processes and Polymers
65 citations, 0.2%
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
64 citations, 0.2%
Physica E: Low-Dimensional Systems and Nanostructures
60 citations, 0.18%
Sensors
60 citations, 0.18%
Journal of Microelectromechanical Systems
60 citations, 0.18%
International Journal of Advanced Manufacturing Technology
59 citations, 0.18%
Journal of Materials Research
58 citations, 0.18%
Physical Review Letters
58 citations, 0.18%
Springer Series in Materials Science
58 citations, 0.18%
Plasma Sources Science and Technology
58 citations, 0.18%
Physica Status Solidi (B): Basic Research
58 citations, 0.18%
Journal of Materials Science
56 citations, 0.17%
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55 citations, 0.17%
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54 citations, 0.17%
Journal of Materials Chemistry A
54 citations, 0.17%
IEEE Sensors Journal
53 citations, 0.16%
ACS Applied Nano Materials
52 citations, 0.16%
Ceramics International
51 citations, 0.16%
Nature Communications
49 citations, 0.15%
Microelectronics Reliability
48 citations, 0.15%
Materials Research Express
48 citations, 0.15%
Materials Chemistry and Physics
48 citations, 0.15%
Advanced Materials Research
48 citations, 0.15%
Frontiers of Nanoscience
47 citations, 0.14%
Superlattices and Microstructures
47 citations, 0.14%
Chemical Reviews
45 citations, 0.14%
Journal of Chemical Physics
43 citations, 0.13%
Acta Physica Sinica
43 citations, 0.13%
Crystal Growth and Design
42 citations, 0.13%
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Citing publishers

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Elsevier
6020 citations, 18.52%
AIP Publishing
3044 citations, 9.36%
American Vacuum Society
2916 citations, 8.97%
IOP Publishing
2548 citations, 7.84%
Springer Nature
2293 citations, 7.05%
American Chemical Society (ACS)
2088 citations, 6.42%
Institute of Electrical and Electronics Engineers (IEEE)
1848 citations, 5.68%
Wiley
1812 citations, 5.57%
Japan Society of Applied Physics
1438 citations, 4.42%
Royal Society of Chemistry (RSC)
975 citations, 3%
MDPI
726 citations, 2.23%
Optica Publishing Group
646 citations, 1.99%
SPIE-Intl Soc Optical Eng
506 citations, 1.56%
American Physical Society (APS)
447 citations, 1.37%
The Electrochemical Society
422 citations, 1.3%
Taylor & Francis
278 citations, 0.86%
Pleiades Publishing
224 citations, 0.69%
Trans Tech Publications
202 citations, 0.62%
Cambridge University Press
162 citations, 0.5%
The Technical Association of Photopolymers, Japan
162 citations, 0.5%
Beilstein-Institut
157 citations, 0.48%
154 citations, 0.47%
Hindawi Limited
144 citations, 0.44%
Oxford University Press
121 citations, 0.37%
Walter de Gruyter
89 citations, 0.27%
World Scientific
88 citations, 0.27%
73 citations, 0.22%
Institution of Engineering and Technology (IET)
63 citations, 0.19%
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
52 citations, 0.16%
SAGE
49 citations, 0.15%
EDP Sciences
43 citations, 0.13%
ASME International
41 citations, 0.13%
Uspekhi Fizicheskikh Nauk Journal
38 citations, 0.12%
Annual Reviews
37 citations, 0.11%
Frontiers Media S.A.
30 citations, 0.09%
The Royal Society
30 citations, 0.09%
American Association for the Advancement of Science (AAAS)
29 citations, 0.09%
The Korean Society of Precision Engineering
18 citations, 0.06%
IntechOpen
17 citations, 0.05%
International Union of Crystallography (IUCr)
16 citations, 0.05%
Korean Institute of Metals and Materials
16 citations, 0.05%
Public Library of Science (PLoS)
14 citations, 0.04%
Proceedings of the National Academy of Sciences (PNAS)
13 citations, 0.04%
13 citations, 0.04%
The Korean Institute of Electrical and Electronic Material Engineers
13 citations, 0.04%
Scientific Research Publishing
13 citations, 0.04%
Korean Society of Mechanical Engineers
12 citations, 0.04%
Japan Institute of Metals
12 citations, 0.04%
Vacuum Society of Japan
12 citations, 0.04%
American Scientific Publishers
11 citations, 0.03%
American Institute of Aeronautics and Astronautics (AIAA)
10 citations, 0.03%
IGI Global
10 citations, 0.03%
9 citations, 0.03%
Institute of Electrical Engineers of Japan (IEE Japan)
9 citations, 0.03%
7 citations, 0.02%
7 citations, 0.02%
Science in China Press
7 citations, 0.02%
7 citations, 0.02%
The Surface Science Society of Japan
7 citations, 0.02%
Physical Society of Japan
7 citations, 0.02%
Bentham Science Publishers Ltd.
6 citations, 0.02%
Japan Society of Mechanical Engineers
6 citations, 0.02%
Hans Publishers
6 citations, 0.02%
Cold Spring Harbor Laboratory
5 citations, 0.02%
The Chemical Society of Japan
5 citations, 0.02%
Science Alert
5 citations, 0.02%
The Russian Academy of Sciences
5 citations, 0.02%
The Electrochemical Society of Japan
5 citations, 0.02%
The Materials Research Society of Japan
5 citations, 0.02%
The Japan Society for Precision Engineering
5 citations, 0.02%
Emerald
4 citations, 0.01%
Korean Society of Industrial Engineering Chemistry
4 citations, 0.01%
Association for Computing Machinery (ACM)
4 citations, 0.01%
Fuji Technology Press
4 citations, 0.01%
Wuhan University of Technology
4 citations, 0.01%
Ceramic Society of Japan
4 citations, 0.01%
The Surface Finishing Society of Japan
4 citations, 0.01%
The Korean Fiber Society
4 citations, 0.01%
Laser Institute of America
3 citations, 0.01%
ASM International
3 citations, 0.01%
Japan Society for Analytical Chemistry
3 citations, 0.01%
Nonferrous Metals Society of China
3 citations, 0.01%
Electromagnetics Academy
3 citations, 0.01%
Chinese Ceramic Society
3 citations, 0.01%
Polymer Society of Korea
3 citations, 0.01%
National Academy of Sciences of Ukraine - Institute of Semiconductor Physics
3 citations, 0.01%
Optical Society of India
3 citations, 0.01%
The Korean Vacuum Society
3 citations, 0.01%
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka) (Publications)
3 citations, 0.01%
Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii
3 citations, 0.01%
Mary Ann Liebert
2 citations, 0.01%
2 citations, 0.01%
Higher Education Press
2 citations, 0.01%
2 citations, 0.01%
2 citations, 0.01%
Scientific Publishers
2 citations, 0.01%
IWA Publishing
2 citations, 0.01%
Tsinghua University Press
2 citations, 0.01%
2 citations, 0.01%
Korean Ceramic Society
2 citations, 0.01%
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Publishing organizations

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Massachusetts Institute of Technology
53 publications, 2.4%
Lawrence Berkeley National Laboratory
47 publications, 2.13%
University of Florida
44 publications, 1.99%
Delft University of Technology
41 publications, 1.85%
Interuniversity Microelectronics Centre
36 publications, 1.63%
National Cheng Kung University
34 publications, 1.54%
Osaka University
34 publications, 1.54%
National Tsing Hua University
33 publications, 1.49%
Katholieke Universiteit Leuven
32 publications, 1.45%
Samsung
32 publications, 1.45%
National Institute of Advanced Industrial Science and Technology
30 publications, 1.36%
Stanford University
28 publications, 1.27%
Tohoku University
26 publications, 1.18%
University of Illinois Urbana-Champaign
25 publications, 1.13%
University of Michigan
25 publications, 1.13%
United States Naval Research Laboratory
25 publications, 1.13%
National University of Singapore
24 publications, 1.09%
National Yang Ming Chiao Tung University
24 publications, 1.09%
Georgia Institute of technology
24 publications, 1.09%
University of Texas at Austin
24 publications, 1.09%
Hanyang University
23 publications, 1.04%
Seoul National University
22 publications, 1%
Arizona State University
22 publications, 1%
National Taiwan University
21 publications, 0.95%
Ohio State University
21 publications, 0.95%
Japan Science and Technology Agency
21 publications, 0.95%
Columbia University
19 publications, 0.86%
Tianjin University
18 publications, 0.81%
Cornell University
18 publications, 0.81%
National Institute of Standards and Technology
18 publications, 0.81%
North Carolina State University
18 publications, 0.81%
University of Maryland, College Park
18 publications, 0.81%
University of Houston
18 publications, 0.81%
University of Cambridge
17 publications, 0.77%
Korea University
17 publications, 0.77%
University of California, Berkeley
17 publications, 0.77%
Paul Scherrer Institute
16 publications, 0.72%
Nanyang Technological University
16 publications, 0.72%
Pennsylvania State University
16 publications, 0.72%
Chungnam National University
16 publications, 0.72%
Kyoto University
14 publications, 0.63%
University of Texas at Dallas
14 publications, 0.63%
Harbin Institute of Technology
13 publications, 0.59%
École Polytechnique Fédérale de Lausanne
13 publications, 0.59%
Tokyo University of Science
13 publications, 0.59%
Pohang University of Science and Technology
13 publications, 0.59%
University of Tokyo
13 publications, 0.59%
University of Wisconsin–Madison
13 publications, 0.59%
Texas A&M University
13 publications, 0.59%
University of Glasgow
12 publications, 0.54%
Argonne National Laboratory
12 publications, 0.54%
Sungkyunkwan University
12 publications, 0.54%
Ajou University
12 publications, 0.54%
Hokkaido University
12 publications, 0.54%
University of Wuppertal
12 publications, 0.54%
Autonomous University of Barcelona
11 publications, 0.5%
Northwestern University
11 publications, 0.5%
Vanderbilt University
11 publications, 0.5%
Duke University
10 publications, 0.45%
National Renewable Energy Laboratory
10 publications, 0.45%
Purdue University
10 publications, 0.45%
RIKEN-Institute of Physical and Chemical Research
10 publications, 0.45%
University of Cincinnati
10 publications, 0.45%
Institute of Rare Metals
9 publications, 0.41%
Peking University
9 publications, 0.41%
Fudan University
9 publications, 0.41%
Technical University of Denmark
9 publications, 0.41%
National Taipei University of Technology
9 publications, 0.41%
Tokyo Institute of Technology
9 publications, 0.41%
University of Notre Dame
9 publications, 0.41%
Oak Ridge National Laboratory
9 publications, 0.41%
KTH Royal Institute of Technology
8 publications, 0.36%
Southeast University
8 publications, 0.36%
University of Padua
8 publications, 0.36%
University of Catania
8 publications, 0.36%
Princeton University
8 publications, 0.36%
City University of Hong Kong
8 publications, 0.36%
Vienna University of Technology
8 publications, 0.36%
Leipzig University
8 publications, 0.36%
Texas Instruments
8 publications, 0.36%
University of Kentucky
8 publications, 0.36%
University of Chinese Academy of Sciences
7 publications, 0.32%
Australian National University
7 publications, 0.32%
National University of Tainan
7 publications, 0.32%
University of Tsukuba
7 publications, 0.32%
Tokyo University of Agriculture and Technology
7 publications, 0.32%
Korea Advanced Institute of Science and Technology
7 publications, 0.32%
Electronics and Telecommunications Research Institute
7 publications, 0.32%
University of Ulsan
7 publications, 0.32%
Lawrence Livermore National Laboratory
7 publications, 0.32%
West Virginia University
7 publications, 0.32%
Nagoya University
7 publications, 0.32%
Rensselaer Polytechnic Institute
7 publications, 0.32%
Agency for Science, Technology and Research
7 publications, 0.32%
Technical University of Darmstadt
7 publications, 0.32%
University of North Carolina at Chapel Hill
7 publications, 0.32%
Sandia National Laboratories California
7 publications, 0.32%
Lomonosov Moscow State University
6 publications, 0.27%
University of Tübingen
6 publications, 0.27%
University of Twente
6 publications, 0.27%
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Publishing countries

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USA, 956, 43.24%
USA
956 publications, 43.24%
Japan, 310, 14.02%
Japan
310 publications, 14.02%
China, 306, 13.84%
China
306 publications, 13.84%
Republic of Korea, 180, 8.14%
Republic of Korea
180 publications, 8.14%
Germany, 145, 6.56%
Germany
145 publications, 6.56%
France, 102, 4.61%
France
102 publications, 4.61%
United Kingdom, 92, 4.16%
United Kingdom
92 publications, 4.16%
Netherlands, 54, 2.44%
Netherlands
54 publications, 2.44%
Belgium, 53, 2.4%
Belgium
53 publications, 2.4%
Singapore, 53, 2.4%
Singapore
53 publications, 2.4%
Italy, 45, 2.04%
Italy
45 publications, 2.04%
Mexico, 39, 1.76%
Mexico
39 publications, 1.76%
Switzerland, 38, 1.72%
Switzerland
38 publications, 1.72%
Canada, 36, 1.63%
Canada
36 publications, 1.63%
Spain, 25, 1.13%
Spain
25 publications, 1.13%
Russia, 21, 0.95%
Russia
21 publications, 0.95%
Sweden, 21, 0.95%
Sweden
21 publications, 0.95%
Finland, 16, 0.72%
Finland
16 publications, 0.72%
India, 15, 0.68%
India
15 publications, 0.68%
Australia, 14, 0.63%
Australia
14 publications, 0.63%
Austria, 14, 0.63%
Austria
14 publications, 0.63%
Brazil, 14, 0.63%
Brazil
14 publications, 0.63%
Denmark, 13, 0.59%
Denmark
13 publications, 0.59%
Poland, 10, 0.45%
Poland
10 publications, 0.45%
Turkey, 8, 0.36%
Turkey
8 publications, 0.36%
Ireland, 7, 0.32%
Ireland
7 publications, 0.32%
Thailand, 7, 0.32%
Thailand
7 publications, 0.32%
New Zealand, 6, 0.27%
New Zealand
6 publications, 0.27%
Slovakia, 6, 0.27%
Slovakia
6 publications, 0.27%
Greece, 5, 0.23%
Greece
5 publications, 0.23%
Israel, 5, 0.23%
Israel
5 publications, 0.23%
Iraq, 5, 0.23%
Iraq
5 publications, 0.23%
Iran, 5, 0.23%
Iran
5 publications, 0.23%
Bulgaria, 4, 0.18%
Bulgaria
4 publications, 0.18%
Vietnam, 3, 0.14%
Vietnam
3 publications, 0.14%
Norway, 3, 0.14%
Norway
3 publications, 0.14%
Puerto Rico, 3, 0.14%
Puerto Rico
3 publications, 0.14%
Romania, 3, 0.14%
Romania
3 publications, 0.14%
Ukraine, 2, 0.09%
Ukraine
2 publications, 0.09%
Estonia, 2, 0.09%
Estonia
2 publications, 0.09%
Portugal, 2, 0.09%
Portugal
2 publications, 0.09%
Georgia, 2, 0.09%
Georgia
2 publications, 0.09%
Colombia, 2, 0.09%
Colombia
2 publications, 0.09%
Slovenia, 2, 0.09%
Slovenia
2 publications, 0.09%
Philippines, 2, 0.09%
Philippines
2 publications, 0.09%
Argentina, 1, 0.05%
Argentina
1 publication, 0.05%
Hungary, 1, 0.05%
Hungary
1 publication, 0.05%
Egypt, 1, 0.05%
Egypt
1 publication, 0.05%
Lebanon, 1, 0.05%
Lebanon
1 publication, 0.05%
Malaysia, 1, 0.05%
Malaysia
1 publication, 0.05%
Pakistan, 1, 0.05%
Pakistan
1 publication, 0.05%
Tunisia, 1, 0.05%
Tunisia
1 publication, 0.05%
Croatia, 1, 0.05%
Croatia
1 publication, 0.05%
Czech Republic, 1, 0.05%
Czech Republic
1 publication, 0.05%
South Africa, 1, 0.05%
South Africa
1 publication, 0.05%
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