Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

American Vacuum Society
American Vacuum Society
ISSN: 10711023, 15208567

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journal names
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Publications
2 211
Citations
32 788
h-index
61
Top-3 organizations
Top-3 countries
USA (956 publications)
Japan (310 publications)
China (306 publications)

Most cited in 5 years

from 3 chars
Publications found: 0

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Publishing countries

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USA, 956, 43.24%
Japan, 310, 14.02%
China, 306, 13.84%
Republic of Korea, 180, 8.14%
Germany, 145, 6.56%
France, 102, 4.61%
United Kingdom, 92, 4.16%
Netherlands, 54, 2.44%
Belgium, 53, 2.4%
Singapore, 53, 2.4%
Italy, 45, 2.04%
Mexico, 39, 1.76%
Switzerland, 38, 1.72%
Canada, 36, 1.63%
Spain, 25, 1.13%
Russia, 21, 0.95%
Sweden, 21, 0.95%
Finland, 16, 0.72%
India, 15, 0.68%
Australia, 14, 0.63%
Austria, 14, 0.63%
Brazil, 14, 0.63%
Denmark, 13, 0.59%
Poland, 10, 0.45%
Turkey, 8, 0.36%
Ireland, 7, 0.32%
Thailand, 7, 0.32%
New Zealand, 6, 0.27%
Slovakia, 6, 0.27%
Greece, 5, 0.23%
Israel, 5, 0.23%
Iraq, 5, 0.23%
Iran, 5, 0.23%
Bulgaria, 4, 0.18%
Vietnam, 3, 0.14%
Norway, 3, 0.14%
Puerto Rico, 3, 0.14%
Romania, 3, 0.14%
Ukraine, 2, 0.09%
Estonia, 2, 0.09%
Portugal, 2, 0.09%
Georgia, 2, 0.09%
Colombia, 2, 0.09%
Slovenia, 2, 0.09%
Philippines, 2, 0.09%
Argentina, 1, 0.05%
Hungary, 1, 0.05%
Egypt, 1, 0.05%
Lebanon, 1, 0.05%
Malaysia, 1, 0.05%
Pakistan, 1, 0.05%
Tunisia, 1, 0.05%
Croatia, 1, 0.05%
Czech Republic, 1, 0.05%
South Africa, 1, 0.05%
Show all (25 more)
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