Point defect creation by proton and carbon irradiation of α-Ga2O3
Vladimir I. Nikolaev
2, 3
,
IGOR N. MESHKOV
4
,
K. Siemek
4
,
Petr B Lagov
1, 5
,
K. D. Shcherbachev
1, 6
,
A. I. Pechnikov
2, 3
,
Oleg S Orlov
4
,
Alexey A Sidorin
4
,
Sergey I Stepanov
2, 3
,
Ivan V. Shchemerov
1
,
A. Vasilev
1
,
A. M. Chernykh
1
,
Anton A Losev
7
,
Alexandr D Miliachenko
7
,
Igor A Khrisanov
7
,
Yu S Pavlov
5
,
U A Kobets
8
,
3
Perfect Crystals LLC 3 , 28 Politekhnicheskaya Str., 194064 St. Petersburg, Russia
|
7
8
Publication type: Journal Article
Publication date: 2022-07-15
scimago Q2
wos Q3
SJR: 0.580
CiteScore: 5.1
Impact factor: 2.5
ISSN: 00218979, 10897550
General Physics and Astronomy
Abstract
Films of α-Ga2O3 grown by Halide Vapor Phase Epitaxy (HVPE) were irradiated with protons at energies of 330, 400, and 460 keV with fluences 6 × 1015 cm−2 and with 7 MeV C4+ ions with a fluence of 1.3 × 1013 cm−2 and characterized by a suite of measurements, including Photoinduced Transient Current Spectroscopy (PICTS), Thermally Stimulated Current (TSC), Microcathodoluminescence (MCL), Capacitance–frequency (C–f), photocapacitance and Admittance Spectroscopy (AS), as well as by Positron Annihilation Spectroscopy (PAS). Proton irradiation creates a conducting layer near the peak of the ion distribution and vacancy defects distribution and introduces deep traps at Ec-0.25, 0.8, and 1.4 eV associated with Ga interstitials, gallium–oxygen divacancies VGa–VO, and oxygen vacancies VO. Similar defects were observed in C implanted samples. The PAS results can also be interpreted by assuming that the observed changes are due to the introduction of VGa and VGa–VO.
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GOST
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Polyakov A. Y. et al. Point defect creation by proton and carbon irradiation of α-Ga2O3 // Journal of Applied Physics. 2022. Vol. 132. No. 3. p. 35701.
GOST all authors (up to 50)
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Polyakov A. Y., Nikolaev V. I., MESHKOV I. N., Siemek K., Lagov P. B., Shcherbachev K. D., Pechnikov A. I., Orlov O. S., Sidorin A. A., Stepanov S. I., Shchemerov I. V., Vasilev A., Chernykh A. M., Losev A. A., Miliachenko A. D., Khrisanov I. A., Pavlov Yu. S., Kobets U. A., Pearton S. J. Point defect creation by proton and carbon irradiation of α-Ga2O3 // Journal of Applied Physics. 2022. Vol. 132. No. 3. p. 35701.
Cite this
RIS
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TY - JOUR
DO - 10.1063/5.0100359
UR - https://pubs.aip.org/jap/article/132/3/035701/2837197/Point-defect-creation-by-proton-and-carbon
TI - Point defect creation by proton and carbon irradiation of α-Ga2O3
T2 - Journal of Applied Physics
AU - Polyakov, Alexander Y
AU - Nikolaev, Vladimir I.
AU - MESHKOV, IGOR N.
AU - Siemek, K.
AU - Lagov, Petr B
AU - Shcherbachev, K. D.
AU - Pechnikov, A. I.
AU - Orlov, Oleg S
AU - Sidorin, Alexey A
AU - Stepanov, Sergey I
AU - Shchemerov, Ivan V.
AU - Vasilev, A.
AU - Chernykh, A. M.
AU - Losev, Anton A
AU - Miliachenko, Alexandr D
AU - Khrisanov, Igor A
AU - Pavlov, Yu S
AU - Kobets, U A
AU - Pearton, Stephen J.
PY - 2022
DA - 2022/07/15
PB - AIP Publishing
SP - 35701
IS - 3
VL - 132
SN - 0021-8979
SN - 1089-7550
ER -
Cite this
BibTex (up to 50 authors)
Copy
@article{2022_Polyakov,
author = {Alexander Y Polyakov and Vladimir I. Nikolaev and IGOR N. MESHKOV and K. Siemek and Petr B Lagov and K. D. Shcherbachev and A. I. Pechnikov and Oleg S Orlov and Alexey A Sidorin and Sergey I Stepanov and Ivan V. Shchemerov and A. Vasilev and A. M. Chernykh and Anton A Losev and Alexandr D Miliachenko and Igor A Khrisanov and Yu S Pavlov and U A Kobets and Stephen J. Pearton},
title = {Point defect creation by proton and carbon irradiation of α-Ga2O3},
journal = {Journal of Applied Physics},
year = {2022},
volume = {132},
publisher = {AIP Publishing},
month = {jul},
url = {https://pubs.aip.org/jap/article/132/3/035701/2837197/Point-defect-creation-by-proton-and-carbon},
number = {3},
pages = {35701},
doi = {10.1063/5.0100359}
}
Cite this
MLA
Copy
Polyakov, Alexander Y., et al. “Point defect creation by proton and carbon irradiation of α-Ga2O3.” Journal of Applied Physics, vol. 132, no. 3, Jul. 2022, p. 35701. https://pubs.aip.org/jap/article/132/3/035701/2837197/Point-defect-creation-by-proton-and-carbon.