Technical Physics, volume 64, issue 12, pages 1742-1748
Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes
Djuzhev N. A.
1
,
Demin G D
1
,
Filippov N A
1
,
Evsikov I D
1
,
Glagolev P Yu
1
,
Makhiboroda M A
1
,
Chkhalo N I
2
,
Salashchenko N N
2
,
Filippov S. V.
3
,
Kolosko A. G.
3
,
Popov E. O.
3
,
Bespalov V. A.
1
Publication type: Journal Article
Publication date: 2019-12-01
Journal:
Technical Physics
Quartile SCImago
Q3
Quartile WOS
Q4
Impact factor: 0.7
ISSN: 10637842, 10906525, 1726748X
Physics and Astronomy (miscellaneous)
Abstract
The technological prospects for the creation of a system of microfocus X-ray tubes with the use of silicon field emission of nanocathodes have been discussed. A numerical analysis of the field-emission current from a nanoscale semiconductor cathode regulated by voltage on a grid electrode has been carried out on the basis of which a scheme for controlling the elements of the matrix of field-emission cathode assemblies has been proposed. The current–voltage characteristics of silicon field emission nanocathodes have been measured. They are in good agreement with the theoretical estimates of the field-emission current. A full technological cycle of the development of elements of microfocus X-ray tubes (a set of field-emission cathode assemblies and a set of anode assemblies) has been performed. The results can be used to create systems of microfocus X-ray tubes for nanolithographic equipment of a new generation.
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Citations by publishers
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4 publications, 44.44%
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2 publications, 22.22%
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- We do not take into account publications that without a DOI.
- Statistics recalculated only for publications connected to researchers, organizations and labs registered on the platform.
- Statistics recalculated weekly.
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Djuzhev N. A. et al. Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes // Technical Physics. 2019. Vol. 64. No. 12. pp. 1742-1748.
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Djuzhev N. A., Demin G. D., Filippov N. A., Evsikov I. D., Glagolev P. Yu., Makhiboroda M. A., Chkhalo N. I., Salashchenko N. N., Filippov S. V., Kolosko A. G., Popov E. O., Bespalov V. A. Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes // Technical Physics. 2019. Vol. 64. No. 12. pp. 1742-1748.
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TY - JOUR
DO - 10.1134/s1063784219120053
UR - https://doi.org/10.1134%2Fs1063784219120053
TI - Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes
T2 - Technical Physics
AU - Djuzhev, N. A.
AU - Demin, G D
AU - Filippov, N A
AU - Evsikov, I D
AU - Glagolev, P Yu
AU - Makhiboroda, M A
AU - Chkhalo, N I
AU - Salashchenko, N N
AU - Filippov, S. V.
AU - Kolosko, A. G.
AU - Popov, E. O.
AU - Bespalov, V. A.
PY - 2019
DA - 2019/12/01 00:00:00
PB - Pleiades Publishing
SP - 1742-1748
IS - 12
VL - 64
SN - 1063-7842
SN - 1090-6525
SN - 1726-748X
ER -
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@article{2019_Djuzhev,
author = {N. A. Djuzhev and G D Demin and N A Filippov and I D Evsikov and P Yu Glagolev and M A Makhiboroda and N I Chkhalo and N N Salashchenko and S. V. Filippov and A. G. Kolosko and E. O. Popov and V. A. Bespalov},
title = {Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes},
journal = {Technical Physics},
year = {2019},
volume = {64},
publisher = {Pleiades Publishing},
month = {dec},
url = {https://doi.org/10.1134%2Fs1063784219120053},
number = {12},
pages = {1742--1748},
doi = {10.1134/s1063784219120053}
}
Cite this
MLA
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Djuzhev, N. A., et al. “Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes.” Technical Physics, vol. 64, no. 12, Dec. 2019, pp. 1742-1748. https://doi.org/10.1134%2Fs1063784219120053.