Technical Physics

, том 64 , издание 12 , страницы 1742-1748

Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes

Тип публикации: Journal Article

Дата публикации: 2019-12-01

Pleiades Publishing

Technical Physics

scimago Q4

wos Q4

white level БС2

SJR: 0.165

CiteScore: 0.7

Impact factor: 0.7

ISSN: 10637842, 10906525, 1726748X

DOI: 10.1134/s1063784219120053

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Physics and Astronomy (miscellaneous)

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The technological prospects for the creation of a system of microfocus X-ray tubes with the use of silicon field emission of nanocathodes have been discussed. A numerical analysis of the field-emission current from a nanoscale semiconductor cathode regulated by voltage on a grid electrode has been carried out on the basis of which a scheme for controlling the elements of the matrix of field-emission cathode assemblies has been proposed. The current–voltage characteristics of silicon field emission nanocathodes have been measured. They are in good agreement with the theoretical estimates of the field-emission current. A full technological cycle of the development of elements of microfocus X-ray tubes (a set of field-emission cathode assemblies and a set of anode assemblies) has been performed. The results can be used to create systems of microfocus X-ray tubes for nanolithographic equipment of a new generation.

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2021 34th International Vacuum Nanoelectronics Conference (IVNC)	2021 34th International Vacuum Nanoelectronics Conference (IVNC), 2, 15.38% 2021 34th International Vacuum Nanoelectronics Conference (IVNC) 2 публикации, 15.38%
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ACS applied materials & interfaces	ACS applied materials & interfaces, 1, 7.69% ACS applied materials & interfaces 1 публикация, 7.69%
Semiconductors	Semiconductors, 1, 7.69% Semiconductors 1 публикация, 7.69%
Nanomaterials	Nanomaterials, 1, 7.69% Nanomaterials 1 публикация, 7.69%
Journal of Vacuum Science and Technology B	Journal of Vacuum Science and Technology B, 1, 7.69% Journal of Vacuum Science and Technology B 1 публикация, 7.69%
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Djuzhev N. A. et al. Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes // Technical Physics. 2019. Vol. 64. No. 12. pp. 1742-1748.

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Djuzhev N. A., Demin G. D., Filippov N. A., Evsikov I. D., Glagolev P. Yu., Makhiboroda M. A., Chkhalo N. I., Salashchenko N. N., Filippov S. V., Kolosko A. G., Popov E. O., Bespalov V. A. Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes // Technical Physics. 2019. Vol. 64. No. 12. pp. 1742-1748.

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TY - JOUR

DO - 10.1134/s1063784219120053

UR - https://doi.org/10.1134/s1063784219120053

TI - Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes

T2 - Technical Physics

AU - Djuzhev, N. A.

AU - Demin, G D

AU - Filippov, N A

AU - Evsikov, I D

AU - Glagolev, P Yu

AU - Makhiboroda, M A

AU - Chkhalo, N I

AU - Salashchenko, N N

AU - Filippov, S. V.

AU - Kolosko, A. G.

AU - Popov, E. O.

AU - Bespalov, V. A.

PY - 2019

DA - 2019/12/01

PB - Pleiades Publishing

SP - 1742-1748

IS - 12

VL - 64

SN - 1063-7842

SN - 1090-6525

SN - 1726-748X

ER -

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@article{2019_Djuzhev,

author = {N. A. Djuzhev and G D Demin and N A Filippov and I D Evsikov and P Yu Glagolev and M A Makhiboroda and N I Chkhalo and N N Salashchenko and S. V. Filippov and A. G. Kolosko and E. O. Popov and V. A. Bespalov},

title = {Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes},

journal = {Technical Physics},

year = {2019},

volume = {64},

publisher = {Pleiades Publishing},

month = {dec},

url = {https://doi.org/10.1134/s1063784219120053},

number = {12},

pages = {1742--1748},

doi = {10.1134/s1063784219120053}

}

MLA

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Djuzhev, N. A., et al. “Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes.” Technical Physics, vol. 64, no. 12, Dec. 2019, pp. 1742-1748. https://doi.org/10.1134/s1063784219120053.

Издатель

Pleiades Publishing

Журнал

Technical Physics

scimago Q4

wos Q4

white level БС2

SJR

0.165

CiteScore

0.7

Impact factor