Journal of Vacuum Science and Technology

American Vacuum Society
American Vacuum Society
ISSN: 00225355

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journal names
Journal of Vacuum Science and Technology
Publications
5 283
Citations
107 529
h-index
119
Publications
0
Citations
6 045
Top-3 citing journals
Surface Science
Surface Science (8227 citations)
Journal of Applied Physics
Journal of Applied Physics (5970 citations)
Thin Solid Films
Thin Solid Films (5779 citations)
Top-3 organizations
Watson Research Center
Watson Research Center (199 publications)
Stanford University
Stanford University (106 publications)
Top-3 countries
USA (3245 publications)
Germany (182 publications)
Japan (182 publications)

Most cited in 5 years

Found 
Found 

Top-100

Citing journals

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Surface Science
8227 citations, 7.65%
Journal of Applied Physics
5970 citations, 5.55%
Thin Solid Films
5779 citations, 5.37%
Physical Review B
5371 citations, 4.99%
Applied Physics Letters
2854 citations, 2.65%
Vacuum
2600 citations, 2.42%
MRS Proceedings
2275 citations, 2.12%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
1919 citations, 1.78%
Applied Surface Science
1592 citations, 1.48%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
1277 citations, 1.19%
Surface and Coatings Technology
1247 citations, 1.16%
Journal of Chemical Physics
1164 citations, 1.08%
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
1043 citations, 0.97%
Physical Review Letters
966 citations, 0.9%
Journal of Crystal Growth
933 citations, 0.87%
Review of Scientific Instruments
875 citations, 0.81%
Solid State Communications
862 citations, 0.8%
Surface and Interface Analysis
852 citations, 0.79%
Applications of Surface Science
804 citations, 0.75%
Journal of Nuclear Materials
764 citations, 0.71%
Journal Physics D: Applied Physics
701 citations, 0.65%
Journal of Electron Spectroscopy and Related Phenomena
686 citations, 0.64%
phys stat sol (a)
663 citations, 0.62%
Progress in Surface Science
643 citations, 0.6%
Journal of Materials Science
626 citations, 0.58%
Microelectronic Engineering
565 citations, 0.53%
Applied Physics A: Materials Science and Processing
544 citations, 0.51%
Journal of Electronic Materials
537 citations, 0.5%
Solid-State Electronics
531 citations, 0.49%
Surface Science Reports
484 citations, 0.45%
VLSI Electronics Microstructure Science
423 citations, 0.39%
Surface Science Letters
408 citations, 0.38%
Journal of Physics C Solid State Physics
397 citations, 0.37%
Applied Optics
394 citations, 0.37%
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
386 citations, 0.36%
Semiconductor Science and Technology
374 citations, 0.35%
Journal of Materials Research
358 citations, 0.33%
Critical Reviews in Solid State and Materials Sciences
340 citations, 0.32%
Journal of Physics E Scientific Instruments
337 citations, 0.31%
Springer Series in Surface Sciences
334 citations, 0.31%
Chemical Physics Letters
318 citations, 0.3%
IEEE Transactions on Electron Devices
314 citations, 0.29%
Solar Energy Materials
297 citations, 0.28%
IEEE Transactions on Magnetics
296 citations, 0.28%
Journal of Physics Condensed Matter
293 citations, 0.27%
Journal of Physical Chemistry C
292 citations, 0.27%
Journal of Non-Crystalline Solids
272 citations, 0.25%
Springer Series in Chemical Physics
271 citations, 0.25%
Studies in Surface Science and Catalysis
263 citations, 0.24%
Physica Status Solidi (B): Basic Research
263 citations, 0.24%
Reports on Progress in Physics
258 citations, 0.24%
Nuclear Instruments and Methods in Physics Research
258 citations, 0.24%
Physica Scripta
256 citations, 0.24%
Topics in Applied Physics
239 citations, 0.22%
Dry Etching for Microelectronics
230 citations, 0.21%
Journal of Vacuum Science and Technology B
224 citations, 0.21%
Ultramicroscopy
220 citations, 0.2%
Journal of Physics and Chemistry of Solids
215 citations, 0.2%
Journal of Physical Chemistry B
214 citations, 0.2%
Advances in Electronics and Electron Physics Volume 89
214 citations, 0.2%
Radiation Effects
213 citations, 0.2%
Journal of Alloys and Compounds
211 citations, 0.2%
Journal of the Electrochemical Society
207 citations, 0.19%
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
203 citations, 0.19%
Corrosion Science
182 citations, 0.17%
Nuclear Instruments and Methods
182 citations, 0.17%
Revue de Physique Appliquée
175 citations, 0.16%
Crystal Research and Technology
169 citations, 0.16%
Materials Chemistry and Physics
164 citations, 0.15%
Semiconductors and Semimetals
162 citations, 0.15%
International Journal of Mass Spectrometry and Ion Physics
161 citations, 0.15%
Sensors and Actuators, B: Chemical
160 citations, 0.15%
Plasma Chemistry and Plasma Processing
157 citations, 0.15%
Materials Letters
154 citations, 0.14%
Quantum Hall Effect: A Perspective
153 citations, 0.14%
Diamond and Related Materials
152 citations, 0.14%
Nanotechnology
148 citations, 0.14%
Acta Materialia
145 citations, 0.13%
Electrochimica Acta
145 citations, 0.13%
Solar Energy Materials and Solar Cells
143 citations, 0.13%
Physica B+C
143 citations, 0.13%
Plasma Sources Science and Technology
142 citations, 0.13%
Journal of Electroanalytical Chemistry and Interfacial Electrochemistry
142 citations, 0.13%
IEEE Transactions on Nuclear Science
139 citations, 0.13%
Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
139 citations, 0.13%
Nuclear Fusion
138 citations, 0.13%
Journal of the American Ceramic Society
137 citations, 0.13%
Materials Science and Engineering
137 citations, 0.13%
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
134 citations, 0.12%
Physics Letters, Section A: General, Atomic and Solid State Physics
132 citations, 0.12%
Journal of Magnetism and Magnetic Materials
130 citations, 0.12%
Journal of Materials Science Letters
128 citations, 0.12%
Springer Series in Materials Science
127 citations, 0.12%
Atomic Clusters: From Gas Phase to Deposited
127 citations, 0.12%
C R C Critical Reviews in Solid State Sciences
125 citations, 0.12%
Langmuir
123 citations, 0.11%
WFT Werkstoff-Forschung und -Technik
120 citations, 0.11%
Fusion Technology
113 citations, 0.11%
Superlattices and Microstructures
112 citations, 0.1%
Fusion Science and Technology
111 citations, 0.1%
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9000

Citing publishers

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Elsevier
42739 citations, 39.75%
AIP Publishing
11791 citations, 10.97%
Springer Nature
8016 citations, 7.45%
American Physical Society (APS)
6684 citations, 6.22%
Wiley
4628 citations, 4.3%
IOP Publishing
4244 citations, 3.95%
Taylor & Francis
2640 citations, 2.46%
Institute of Electrical and Electronics Engineers (IEEE)
2545 citations, 2.37%
Japan Society of Applied Physics
1961 citations, 1.82%
American Chemical Society (ACS)
1768 citations, 1.64%
American Vacuum Society
1639 citations, 1.52%
1283 citations, 1.19%
Optica Publishing Group
620 citations, 0.58%
MDPI
564 citations, 0.52%
Royal Society of Chemistry (RSC)
557 citations, 0.52%
Pleiades Publishing
473 citations, 0.44%
Cambridge University Press
413 citations, 0.38%
The Electrochemical Society
305 citations, 0.28%
EDP Sciences
258 citations, 0.24%
Trans Tech Publications
176 citations, 0.16%
SAGE
165 citations, 0.15%
Japan Institute of Metals
130 citations, 0.12%
Hindawi Limited
127 citations, 0.12%
World Scientific
112 citations, 0.1%
Physical Society of Japan
109 citations, 0.1%
SPIE-Intl Soc Optical Eng
102 citations, 0.09%
Walter de Gruyter
101 citations, 0.09%
American Institute of Aeronautics and Astronautics (AIAA)
101 citations, 0.09%
American Association for the Advancement of Science (AAAS)
97 citations, 0.09%
Oxford University Press
75 citations, 0.07%
The Surface Science Society of Japan
59 citations, 0.05%
Iron and Steel Institute of Japan
42 citations, 0.04%
ASME International
40 citations, 0.04%
SAE International
40 citations, 0.04%
The Royal Society
39 citations, 0.04%
ASM International
38 citations, 0.04%
Uspekhi Fizicheskikh Nauk Journal
37 citations, 0.03%
Beilstein-Institut
35 citations, 0.03%
Vacuum Society of Japan
34 citations, 0.03%
Annual Reviews
32 citations, 0.03%
Institution of Engineering and Technology (IET)
31 citations, 0.03%
The Chemical Society of Japan
30 citations, 0.03%
Frontiers Media S.A.
29 citations, 0.03%
The Magnetics Society of Japan
26 citations, 0.02%
Emerald
21 citations, 0.02%
IntechOpen
21 citations, 0.02%
American Geophysical Union
20 citations, 0.02%
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
20 citations, 0.02%
Japan Society for Analytical Chemistry
19 citations, 0.02%
18 citations, 0.02%
National Academy of Sciences of Ukraine - Institute of Semiconductor Physics
18 citations, 0.02%
Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii
17 citations, 0.02%
Societa Italiana di Fisica
16 citations, 0.01%
Proceedings of the National Academy of Sciences (PNAS)
14 citations, 0.01%
Korean Institute of Metals and Materials
14 citations, 0.01%
Scientific Research Publishing
13 citations, 0.01%
Institute of Physics, Polish Academy of Sciences
12 citations, 0.01%
The Korean Vacuum Society
11 citations, 0.01%
Institute of Electrical Engineers of Japan (IEE Japan)
11 citations, 0.01%
The Technical Association of Photopolymers, Japan
11 citations, 0.01%
Wuhan University of Technology
10 citations, 0.01%
Science in China Press
10 citations, 0.01%
The Surface Finishing Society of Japan
10 citations, 0.01%
International Centre for Diffraction Data
10 citations, 0.01%
Canadian Science Publishing
9 citations, 0.01%
The Surface Analysis Society of Japan
9 citations, 0.01%
8 citations, 0.01%
Materials Research Society of Korea
8 citations, 0.01%
Japan Society of Colour Material
8 citations, 0.01%
International Union of Crystallography (IUCr)
7 citations, 0.01%
Korean Ceramic Society
7 citations, 0.01%
The Korean Institute of Electrical and Electronic Material Engineers
7 citations, 0.01%
Optical Society of India
7 citations, 0.01%
The Russian Academy of Sciences
7 citations, 0.01%
The Japan Society of Plasma Science and Nuclear Fusion Research (JSPF)
6 citations, 0.01%
Copernicus
6 citations, 0.01%
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka) (Publications)
6 citations, 0.01%
Japan Society of Powder and Powder Metallurgy
6 citations, 0.01%
Pensoft Publishers
5 citations, 0%
Tsinghua University Press
5 citations, 0%
University of Science and Technology Beijing
5 citations, 0%
5 citations, 0%
The Electrochemical Society of Japan
5 citations, 0%
American Astronomical Society
5 citations, 0%
Ovid Technologies (Wolters Kluwer Health)
4 citations, 0%
4 citations, 0%
Japan Society of Mechanical Engineers
4 citations, 0%
4 citations, 0%
Higher Education Press
4 citations, 0%
Public Library of Science (PLoS)
4 citations, 0%
Laser Institute of America
4 citations, 0%
4 citations, 0%
NACE International
4 citations, 0%
Association for Computing Machinery (ACM)
4 citations, 0%
Nonferrous Metals Society of China
4 citations, 0%
Japan Society of Corrosion Engineering
4 citations, 0%
The Society of Materials Science, Japan
4 citations, 0%
The Japan Society for Precision Engineering
4 citations, 0%
Bentham Science Publishers Ltd.
3 citations, 0%
Georg Thieme Verlag KG
3 citations, 0%
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45000

Publishing organizations

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Watson Research Center
199 publications, 3.77%
Stanford University
106 publications, 2.01%
California Institute of Technology
92 publications, 1.74%
Massachusetts Institute of Technology
74 publications, 1.4%
University of Illinois Urbana-Champaign
69 publications, 1.31%
Princeton University
66 publications, 1.25%
Cornell University
57 publications, 1.08%
National Institute of Standards and Technology
57 publications, 1.08%
University of California, Berkeley
52 publications, 0.98%
United States Naval Research Laboratory
49 publications, 0.93%
Oak Ridge National Laboratory
46 publications, 0.87%
Pennsylvania State University
38 publications, 0.72%
Colorado State University
36 publications, 0.68%
Brookhaven National Laboratory
34 publications, 0.64%
Lawrence Livermore National Laboratory
33 publications, 0.62%
Lawrence Berkeley National Laboratory
32 publications, 0.61%
University of California, Los Angeles
31 publications, 0.59%
University of Wisconsin–Madison
30 publications, 0.57%
Ames Research Center
28 publications, 0.53%
Brown University
22 publications, 0.42%
Jet Propulsion Laboratory
21 publications, 0.4%
University of Wisconsin–Milwaukee
21 publications, 0.4%
Rensselaer Polytechnic Institute
20 publications, 0.38%
Texas Instruments
20 publications, 0.38%
Royal Philips
20 publications, 0.38%
University of Southern California
19 publications, 0.36%
Argonne National Laboratory
19 publications, 0.36%
Missouri University of Science and Technology
19 publications, 0.36%
University of Minnesota
19 publications, 0.36%
University of Cambridge
18 publications, 0.34%
University of Pennsylvania
18 publications, 0.34%
Rutgers, The State University of New Jersey
17 publications, 0.32%
University of Sydney
16 publications, 0.3%
Sandia National Laboratories
16 publications, 0.3%
Case Western Reserve University
15 publications, 0.28%
Osaka University
15 publications, 0.28%
National Research Council Canada
15 publications, 0.28%
European Organization for Nuclear Research
14 publications, 0.27%
University of Maryland, College Park
14 publications, 0.27%
Washington State University
13 publications, 0.25%
Max Planck Institute for Plasma Physics
13 publications, 0.25%
National Renewable Energy Laboratory
13 publications, 0.25%
Stanford Synchrotron Radiation Lightsource
12 publications, 0.23%
Purdue University
12 publications, 0.23%
North Carolina State University
11 publications, 0.21%
Syracuse University
11 publications, 0.21%
University of Rochester
11 publications, 0.21%
SLAC National Accelerator Laboratory
10 publications, 0.19%
University of Florida
10 publications, 0.19%
Yale University
9 publications, 0.17%
Montana State University
9 publications, 0.17%
University of Maine
9 publications, 0.17%
Northwestern University
8 publications, 0.15%
Virginia Tech
8 publications, 0.15%
Harvard University
8 publications, 0.15%
University of Delaware
8 publications, 0.15%
Technical University of Munich
7 publications, 0.13%
Carnegie Mellon University
7 publications, 0.13%
Pacific Northwest National Laboratory
7 publications, 0.13%
University of California, San Diego
7 publications, 0.13%
Max Planck Institute for Solid State Research
7 publications, 0.13%
Leibniz University Hannover
7 publications, 0.13%
University of Alberta
7 publications, 0.13%
Goddard Space Flight Center
7 publications, 0.13%
Fudan University
6 publications, 0.11%
Polytechnic University of Milan
6 publications, 0.11%
Sorbonne University
6 publications, 0.11%
Arizona State University
6 publications, 0.11%
University of California, Santa Barbara
6 publications, 0.11%
Southern Methodist University
6 publications, 0.11%
Nagoya Institute of Technology
6 publications, 0.11%
University of Texas at Austin
6 publications, 0.11%
McMaster University
6 publications, 0.11%
Hokkaido University
6 publications, 0.11%
Darmstadt University of Applied Sciences
6 publications, 0.11%
Old Dominion University
6 publications, 0.11%
Marshall Space Flight Center
6 publications, 0.11%
Atomic Energy of Canada Limited
6 publications, 0.11%
University at Albany, State University of New York
6 publications, 0.11%
University of New South Wales
5 publications, 0.09%
Max-Planck Institute for Medical Research
5 publications, 0.09%
University of Arizona
5 publications, 0.09%
University of Chicago
5 publications, 0.09%
Tohoku University
5 publications, 0.09%
Fritz Haber Institute of the Max Planck Society
5 publications, 0.09%
University of Michigan
5 publications, 0.09%
University of Duisburg-Essen
5 publications, 0.09%
University of Tokyo
5 publications, 0.09%
University of Nebraska–Lincoln
5 publications, 0.09%
University of Houston
5 publications, 0.09%
Culham Centre for Fusion Energy
5 publications, 0.09%
University of Missouri
5 publications, 0.09%
Brooklyn College
5 publications, 0.09%
University of Pittsburgh
5 publications, 0.09%
Rochester Institute of Technology
5 publications, 0.09%
Indian Institute of Technology Madras
4 publications, 0.08%
Hebrew University of Jerusalem
4 publications, 0.08%
Linköping University
4 publications, 0.08%
ETH Zurich
4 publications, 0.08%
Imperial College London
4 publications, 0.08%
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Publishing countries

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USA, 3245, 61.42%
USA
3245 publications, 61.42%
Germany, 182, 3.45%
Germany
182 publications, 3.45%
Japan, 182, 3.45%
Japan
182 publications, 3.45%
Mexico, 162, 3.07%
Mexico
162 publications, 3.07%
United Kingdom, 123, 2.33%
United Kingdom
123 publications, 2.33%
Canada, 119, 2.25%
Canada
119 publications, 2.25%
France, 56, 1.06%
France
56 publications, 1.06%
Italy, 43, 0.81%
Italy
43 publications, 0.81%
Switzerland, 34, 0.64%
Switzerland
34 publications, 0.64%
Australia, 33, 0.62%
Australia
33 publications, 0.62%
Netherlands, 31, 0.59%
Netherlands
31 publications, 0.59%
China, 18, 0.34%
China
18 publications, 0.34%
India, 18, 0.34%
India
18 publications, 0.34%
Liechtenstein, 17, 0.32%
Liechtenstein
17 publications, 0.32%
Austria, 13, 0.25%
Austria
13 publications, 0.25%
Brazil, 13, 0.25%
Brazil
13 publications, 0.25%
Sweden, 13, 0.25%
Sweden
13 publications, 0.25%
Denmark, 10, 0.19%
Denmark
10 publications, 0.19%
Israel, 9, 0.17%
Israel
9 publications, 0.17%
Belgium, 7, 0.13%
Belgium
7 publications, 0.13%
Spain, 6, 0.11%
Spain
6 publications, 0.11%
Russia, 5, 0.09%
Russia
5 publications, 0.09%
Hungary, 5, 0.09%
Hungary
5 publications, 0.09%
Czechoslovakia, 5, 0.09%
Czechoslovakia
5 publications, 0.09%
Poland, 4, 0.08%
Poland
4 publications, 0.08%
Romania, 3, 0.06%
Romania
3 publications, 0.06%
Czech Republic, 3, 0.06%
Czech Republic
3 publications, 0.06%
South Africa, 3, 0.06%
South Africa
3 publications, 0.06%
Iran, 2, 0.04%
Iran
2 publications, 0.04%
Finland, 2, 0.04%
Finland
2 publications, 0.04%
USSR, 2, 0.04%
USSR
2 publications, 0.04%
Ukraine, 1, 0.02%
Ukraine
1 publication, 0.02%
Ireland, 1, 0.02%
Ireland
1 publication, 0.02%
New Zealand, 1, 0.02%
New Zealand
1 publication, 0.02%
Norway, 1, 0.02%
Norway
1 publication, 0.02%
Pakistan, 1, 0.02%
Pakistan
1 publication, 0.02%
Republic of Korea, 1, 0.02%
Republic of Korea
1 publication, 0.02%
Saudi Arabia, 1, 0.02%
Saudi Arabia
1 publication, 0.02%
Slovakia, 1, 0.02%
Slovakia
1 publication, 0.02%
Slovenia, 1, 0.02%
Slovenia
1 publication, 0.02%
Turkey, 1, 0.02%
Turkey
1 publication, 0.02%
Yugoslavia, 1, 0.02%
Yugoslavia
1 publication, 0.02%
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