Applied Physics Letters

, том 43 , издание 11 , страницы 1076-1078

Metal film removal and patterning using a XeCl laser

Тип публикации: Journal Article

Дата публикации: 1983-12-01

AIP Publishing

Applied Physics Letters

scimago Q1

wos Q2

БС1

SJR: 0.976

CiteScore: 6.4

Impact factor: 3.6

ISSN: 00036951, 10773118

DOI: 10.1063/1.94204

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Physics and Astronomy (miscellaneous)

Краткое описание

Single-shot removal of thin metal films on various substrates has been studied using a XeCl laser and thresholds compared with theoretical modeling of the interaction. Low thresholds and potential for micron resolution with large area projection patterning techniques are demonstrated.

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ГОСТ |

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ГОСТ Скопировать

Andrew J. et al. Metal film removal and patterning using a XeCl laser // Applied Physics Letters. 1983. Vol. 43. No. 11. pp. 1076-1078.

ГОСТ со всеми авторами (до 50) Скопировать

Andrew J., Dyer P., Greenough R., Key P. Metal film removal and patterning using a XeCl laser // Applied Physics Letters. 1983. Vol. 43. No. 11. pp. 1076-1078.

RIS |

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RIS Скопировать

TY - JOUR

DO - 10.1063/1.94204

UR - https://doi.org/10.1063/1.94204

TI - Metal film removal and patterning using a XeCl laser

T2 - Applied Physics Letters

AU - Andrew, J.E

AU - Dyer, P.E.

AU - Greenough, R.D.

AU - Key, P.H.

PY - 1983

DA - 1983/12/01

PB - AIP Publishing

SP - 1076-1078

IS - 11

VL - 43

SN - 0003-6951

SN - 1077-3118

ER -

BibTex |

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BibTex (до 50 авторов) Скопировать

@article{1983_Andrew,

author = {J.E Andrew and P.E. Dyer and R.D. Greenough and P.H. Key},

title = {Metal film removal and patterning using a XeCl laser},

journal = {Applied Physics Letters},

year = {1983},

volume = {43},

publisher = {AIP Publishing},

month = {dec},

url = {https://doi.org/10.1063/1.94204},

number = {11},

pages = {1076--1078},

doi = {10.1063/1.94204}

}

MLA

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MLA Скопировать

Andrew, J.E, et al. “Metal film removal and patterning using a XeCl laser.” Applied Physics Letters, vol. 43, no. 11, Dec. 1983, pp. 1076-1078. https://doi.org/10.1063/1.94204.

Издатель

AIP Publishing

Журнал

Applied Physics Letters

scimago Q1

wos Q2

БС1

SJR

0.976

CiteScore

6.4

Impact factor

3.6

ISSN

00036951 (Print)

10773118 (Electronic)