Superconductor Science and Technology, volume 33, issue 6, pages 65005

Planar MoRe-based direct current nanoSQUID

Publication typeJournal Article
Publication date2020-05-07
Quartile SCImago
Q1
Quartile WOS
Q2
Impact factor3.6
ISSN09532048, 13616668
Materials Chemistry
Metals and Alloys
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
We have developed planar nanoSQUID with nanobridge-type Josephson junctions based on the oxidation resistant and high H c2 MoRe alloy. The objective of the research was to reduce size of the SQUID loop with the aim being to reduce magnetic flux noise and improve the spatial resolution of the SQUID sensors. Employing RF-magnetron sputtering, electron-beam lithography, and reactive ion etching in CHF3 + O2 plasma using Al hard masks, we have realized nanoSQUIDs with Josephson junctions in the form of 30 - 50 nm wide nanobridges and an effective magnetic flux capture radius of ∼ 95 nm. The critical temperature of the fabricated devices was T c = 7.9 K. The I(V)-characteristics demonstrated critical current I 0≃ 114 µA at 4.2 K and modulation period in magnetic fields of ∼ 700 Oe.

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GOST Copy
Shishkin A. G. et al. Planar MoRe-based direct current nanoSQUID // Superconductor Science and Technology. 2020. Vol. 33. No. 6. p. 65005.
GOST all authors (up to 50) Copy
Shishkin A. G., Skryabina O., Gurtovoi V. L., Dizhur S. E., Faley M., Golubov A. A., Stolyarov V. S. Planar MoRe-based direct current nanoSQUID // Superconductor Science and Technology. 2020. Vol. 33. No. 6. p. 65005.
RIS |
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RIS Copy
TY - JOUR
DO - 10.1088/1361-6668/ab877c
UR - https://doi.org/10.1088%2F1361-6668%2Fab877c
TI - Planar MoRe-based direct current nanoSQUID
T2 - Superconductor Science and Technology
AU - Shishkin, Andrey G.
AU - Skryabina, O.V.
AU - Gurtovoi, V L
AU - Dizhur, S E
AU - Faley, M.I.
AU - Golubov, Alexander A.
AU - Stolyarov, V. S.
PY - 2020
DA - 2020/05/07 00:00:00
PB - IOP Publishing
SP - 65005
IS - 6
VL - 33
SN - 0953-2048
SN - 1361-6668
ER -
BibTex |
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BibTex Copy
@article{2020_Shishkin
author = {Andrey G. Shishkin and O.V. Skryabina and V L Gurtovoi and S E Dizhur and M.I. Faley and Alexander A. Golubov and V. S. Stolyarov},
title = {Planar MoRe-based direct current nanoSQUID},
journal = {Superconductor Science and Technology},
year = {2020},
volume = {33},
publisher = {IOP Publishing},
month = {may},
url = {https://doi.org/10.1088%2F1361-6668%2Fab877c},
number = {6},
pages = {65005},
doi = {10.1088/1361-6668/ab877c}
}
MLA
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MLA Copy
Shishkin, Andrey G., et al. “Planar MoRe-based direct current nanoSQUID.” Superconductor Science and Technology, vol. 33, no. 6, May. 2020, p. 65005. https://doi.org/10.1088%2F1361-6668%2Fab877c.
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