Superconductor Science and Technology, volume 33, issue 6, pages 65005
Planar MoRe-based direct current nanoSQUID
Publication type: Journal Article
Publication date: 2020-05-07
Quartile SCImago
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Quartile WOS
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Impact factor: 3.6
ISSN: 09532048, 13616668
Materials Chemistry
Metals and Alloys
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Abstract
We have developed planar nanoSQUID with nanobridge-type Josephson junctions based on the oxidation resistant and high H c2 MoRe alloy. The objective of the research was to reduce size of the SQUID loop with the aim being to reduce magnetic flux noise and improve the spatial resolution of the SQUID sensors. Employing RF-magnetron sputtering, electron-beam lithography, and reactive ion etching in CHF3 + O2 plasma using Al hard masks, we have realized nanoSQUIDs with Josephson junctions in the form of 30 - 50 nm wide nanobridges and an effective magnetic flux capture radius of ∼ 95 nm. The critical temperature of the fabricated devices was T c = 7.9 K. The I(V)-characteristics demonstrated critical current I 0≃ 114 µA at 4.2 K and modulation period in magnetic fields of ∼ 700 Oe.
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Shishkin A. G. et al. Planar MoRe-based direct current nanoSQUID // Superconductor Science and Technology. 2020. Vol. 33. No. 6. p. 65005.
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Shishkin A. G., Skryabina O., Gurtovoi V. L., Dizhur S. E., Faley M., Golubov A. A., Stolyarov V. S. Planar MoRe-based direct current nanoSQUID // Superconductor Science and Technology. 2020. Vol. 33. No. 6. p. 65005.
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TY - JOUR
DO - 10.1088/1361-6668/ab877c
UR - https://doi.org/10.1088/1361-6668/ab877c
TI - Planar MoRe-based direct current nanoSQUID
T2 - Superconductor Science and Technology
AU - Shishkin, Andrey G.
AU - Skryabina, O.V.
AU - Gurtovoi, V L
AU - Dizhur, S E
AU - Faley, M.I.
AU - Golubov, Alexander A.
AU - Stolyarov, V. S.
PY - 2020
DA - 2020/05/07
PB - IOP Publishing
SP - 65005
IS - 6
VL - 33
SN - 0953-2048
SN - 1361-6668
ER -
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@article{2020_Shishkin,
author = {Andrey G. Shishkin and O.V. Skryabina and V L Gurtovoi and S E Dizhur and M.I. Faley and Alexander A. Golubov and V. S. Stolyarov},
title = {Planar MoRe-based direct current nanoSQUID},
journal = {Superconductor Science and Technology},
year = {2020},
volume = {33},
publisher = {IOP Publishing},
month = {may},
url = {https://doi.org/10.1088/1361-6668/ab877c},
number = {6},
pages = {65005},
doi = {10.1088/1361-6668/ab877c}
}
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MLA
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Shishkin, Andrey G., et al. “Planar MoRe-based direct current nanoSQUID.” Superconductor Science and Technology, vol. 33, no. 6, May. 2020, p. 65005. https://doi.org/10.1088/1361-6668/ab877c.