Journal of Micro/Nanopatterning Materials and Metrology

SPIE-Intl Soc Optical Eng
SPIE-Intl Soc Optical Eng
ISSN: 27088340

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Years of issue
2024-2025
journal names
Journal of Micro/Nanopatterning Materials and Metrology
Publications
351
Citations
1 004
h-index
15
Publications
350
Citations
993

Most cited in 5 years

Found 
Found 

Top-100

Citing journals

20
40
60
80
100
120
Journal of Micro/Nanopatterning Materials and Metrology
105 citations, 10.46%
Optics Express
46 citations, 4.58%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
39 citations, 3.88%
ACS applied materials & interfaces
23 citations, 2.29%
IEEE Transactions on Semiconductor Manufacturing
18 citations, 1.79%
Applied Optics
18 citations, 1.79%
Journal of Applied Physics
18 citations, 1.79%
Journal of Vacuum Science and Technology B
16 citations, 1.59%
Scientia Sinica Technologica
14 citations, 1.39%
Journal of Photopolymer Science and Technology
11 citations, 1.1%
Chemistry of Materials
11 citations, 1.1%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
10 citations, 1%
IEEE Transactions on Electron Devices
10 citations, 1%
ACS Applied Nano Materials
8 citations, 0.8%
Micro and Nano Engineering
8 citations, 0.8%
Plasma Sources Science and Technology
8 citations, 0.8%
Nanotechnology
8 citations, 0.8%
Applied Physics Letters
7 citations, 0.7%
Journal Physics D: Applied Physics
7 citations, 0.7%
Measurement Science and Technology
7 citations, 0.7%
Langmuir
7 citations, 0.7%
ACS Applied Polymer Materials
7 citations, 0.7%
Nano Letters
6 citations, 0.6%
Applied Sciences (Switzerland)
6 citations, 0.6%
AIP Advances
5 citations, 0.5%
ACS Nano
5 citations, 0.5%
Scientific Reports
5 citations, 0.5%
Environmental Science & Technology
5 citations, 0.5%
IEEE Access
5 citations, 0.5%
Applied Physics Reviews
4 citations, 0.4%
Micromachines
4 citations, 0.4%
Physics of Plasmas
4 citations, 0.4%
Acta Optica Sinica
4 citations, 0.4%
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
4 citations, 0.4%
Journal of the Optical Society of America A: Optics and Image Science, and Vision
4 citations, 0.4%
Applied Physics Express
4 citations, 0.4%
ACS Applied Electronic Materials
4 citations, 0.4%
IEEE Electron Devices Magazine
4 citations, 0.4%
Review of Scientific Instruments
3 citations, 0.3%
Physical Review Accelerators and Beams
3 citations, 0.3%
Advances in Colloid and Interface Science
3 citations, 0.3%
Physica Scripta
3 citations, 0.3%
Macromolecules
3 citations, 0.3%
AEJ - Alexandria Engineering Journal
3 citations, 0.3%
Machine Learning: Science and Technology
3 citations, 0.3%
Optics Continuum
3 citations, 0.3%
IEEE Electron Devices Reviews
3 citations, 0.3%
ACS Macro Letters
2 citations, 0.2%
IEEE Journal of the Electron Devices Society
2 citations, 0.2%
Solid-State Electronics
2 citations, 0.2%
Journal of Modern Optics
2 citations, 0.2%
Journal of the American Chemical Society
2 citations, 0.2%
Expert Systems with Applications
2 citations, 0.2%
Optics and Laser Technology
2 citations, 0.2%
ACS Sensors
2 citations, 0.2%
Journal of Physical Chemistry C
2 citations, 0.2%
ECS Journal of Solid State Science and Technology
2 citations, 0.2%
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
2 citations, 0.2%
Rapid Communications in Mass Spectrometry
2 citations, 0.2%
Applied Surface Science
2 citations, 0.2%
ACS Photonics
2 citations, 0.2%
Photonics
2 citations, 0.2%
Physics of Fluids
2 citations, 0.2%
Chinese Journal of Lasers
2 citations, 0.2%
Optica
2 citations, 0.2%
APL Photonics
2 citations, 0.2%
Current Applied Physics
2 citations, 0.2%
Precision Engineering
2 citations, 0.2%
Journal of Instrumentation
2 citations, 0.2%
Journal of Micromechanics and Microengineering
2 citations, 0.2%
Light Advanced Manufacturing
2 citations, 0.2%
ACS ES&T Water
2 citations, 0.2%
Micro and Nanostructures
2 citations, 0.2%
Engineering Research Express
2 citations, 0.2%
Discover Nano
2 citations, 0.2%
Moore and More
2 citations, 0.2%
Vacuum and Surface Science
2 citations, 0.2%
Nanoscale
1 citation, 0.1%
Plasma Science and Technology
1 citation, 0.1%
Surface Science
1 citation, 0.1%
Journal of Chemical Physics
1 citation, 0.1%
Optics Letters
1 citation, 0.1%
Measurement: Journal of the International Measurement Confederation
1 citation, 0.1%
Materials Today Chemistry
1 citation, 0.1%
Journal of Cleaner Production
1 citation, 0.1%
Science of the Total Environment
1 citation, 0.1%
Organic Letters
1 citation, 0.1%
Journal of Physics: Conference Series
1 citation, 0.1%
IEEE Transactions on Circuits and Systems I: Regular Papers
1 citation, 0.1%
Materials Research Express
1 citation, 0.1%
Journal of Alloys and Compounds
1 citation, 0.1%
IEEE Photonics Technology Letters
1 citation, 0.1%
Extreme Mechanics Letters
1 citation, 0.1%
iScience
1 citation, 0.1%
International Communications in Heat and Mass Transfer
1 citation, 0.1%
Membranes
1 citation, 0.1%
Silicon
1 citation, 0.1%
Optical Materials Express
1 citation, 0.1%
Corrosion Science
1 citation, 0.1%
Nano Futures
1 citation, 0.1%
20
40
60
80
100
120

Citing publishers

50
100
150
200
250
300
350
SPIE-Intl Soc Optical Eng
334 citations, 33.27%
American Chemical Society (ACS)
95 citations, 9.46%
Institute of Electrical and Electronics Engineers (IEEE)
93 citations, 9.26%
Optica Publishing Group
75 citations, 7.47%
IOP Publishing
68 citations, 6.77%
Elsevier
64 citations, 6.37%
AIP Publishing
47 citations, 4.68%
American Vacuum Society
29 citations, 2.89%
Japan Society of Applied Physics
25 citations, 2.49%
MDPI
21 citations, 2.09%
Springer Nature
19 citations, 1.89%
Science in China Press
15 citations, 1.49%
The Technical Association of Photopolymers, Japan
11 citations, 1.1%
Wiley
9 citations, 0.9%
Association for Computing Machinery (ACM)
7 citations, 0.7%
Shanghai Institute of Optics and Fine Mechanics
6 citations, 0.6%
American Physical Society (APS)
4 citations, 0.4%
Royal Society of Chemistry (RSC)
3 citations, 0.3%
Taylor & Francis
2 citations, 0.2%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
2 citations, 0.2%
The Electrochemical Society
2 citations, 0.2%
The Surface Science Society of Japan
2 citations, 0.2%
Walter de Gruyter
1 citation, 0.1%
Pleiades Publishing
1 citation, 0.1%
Trans Tech Publications
1 citation, 0.1%
Frontiers Media S.A.
1 citation, 0.1%
International Union of Crystallography (IUCr)
1 citation, 0.1%
Fuji Technology Press
1 citation, 0.1%
Beilstein-Institut
1 citation, 0.1%
Hindawi Limited
1 citation, 0.1%
ASME International
1 citation, 0.1%
IntechOpen
1 citation, 0.1%
Hans Publishers
1 citation, 0.1%
The Japan Society for Precision Engineering
1 citation, 0.1%
Kazakh-British Technical University
1 citation, 0.1%
50
100
150
200
250
300
350

Publishing organizations

10
20
30
40
50
60
Interuniversity Microelectronics Centre
55 publications, 15.67%
Katholieke Universiteit Leuven
26 publications, 7.41%
Lawrence Berkeley National Laboratory
15 publications, 4.27%
Paul Scherrer Institute
9 publications, 2.56%
Samsung
9 publications, 2.56%
Institute of Microelectronics, Chinese Academy of Sciences
9 publications, 2.56%
Fraunhofer Institute for Integrated Systems and Device Technology
8 publications, 2.28%
Hanyang University
7 publications, 1.99%
Beijing Institute of Technology
5 publications, 1.42%
University of Chinese Academy of Sciences
4 publications, 1.14%
Fudan University
4 publications, 1.14%
National Taiwan University
4 publications, 1.14%
Tokyo Institute of Technology
4 publications, 1.14%
Zhejiang University
3 publications, 0.85%
Karlsruhe Institute of Technology
3 publications, 0.85%
Grenoble Alpes University
3 publications, 0.85%
Shanghai University
3 publications, 0.85%
Hefei University of Technology
3 publications, 0.85%
Anhui University of Science and Technology
3 publications, 0.85%
National Tsing Hua University
3 publications, 0.85%
University of California, Berkeley
3 publications, 0.85%
National Institute of Advanced Industrial Science and Technology
3 publications, 0.85%
Vrije Universiteit Amsterdam
3 publications, 0.85%
RWTH Aachen University
3 publications, 0.85%
University of Erlangen–Nuremberg
3 publications, 0.85%
Physikalisch-Technische Bundesanstalt
3 publications, 0.85%
Université Clermont Auvergne
3 publications, 0.85%
California State University, Northridge
3 publications, 0.85%
Eskisehir Technical University
2 publications, 0.57%
University of Manchester
2 publications, 0.57%
University of Southern California
2 publications, 0.57%
Brookhaven National Laboratory
2 publications, 0.57%
Sungkyunkwan University
2 publications, 0.57%
National Institute of Standards and Technology
2 publications, 0.57%
University of Texas at Dallas
2 publications, 0.57%
Fraunhofer Institute for Laser Technology
2 publications, 0.57%
Siemens AG
2 publications, 0.57%
Texas A&M University
2 publications, 0.57%
San Jose State University
2 publications, 0.57%
Watson Research Center
2 publications, 0.57%
Ningbo Institute of Industrial Technology, Chinese Academy of Sciences
2 publications, 0.57%
Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
2 publications, 0.57%
Birla Institute of Technology and Science, Pilani
1 publication, 0.28%
University of Tabriz
1 publication, 0.28%
Indian Institute of Technology Gandhinagar
1 publication, 0.28%
Indian Institute of Technology Mandi
1 publication, 0.28%
Payame Noor University
1 publication, 0.28%
Vietnam Academy of Science and Technology
1 publication, 0.28%
Hanoi University of Science and Technology
1 publication, 0.28%
Urmia University of Medical Sciences
1 publication, 0.28%
Zhejiang University of Technology
1 publication, 0.28%
Shanghai Jiao Tong University
1 publication, 0.28%
Technion – Israel Institute of Technology
1 publication, 0.28%
University of Twente
1 publication, 0.28%
Ghent University
1 publication, 0.28%
Technical University of Munich
1 publication, 0.28%
Indian Space Research Organisation
1 publication, 0.28%
Fuzhou University
1 publication, 0.28%
Eindhoven University of Technology
1 publication, 0.28%
Hebei University of Technology
1 publication, 0.28%
Swiss Federal Laboratories for Materials Science and Technology
1 publication, 0.28%
Tianjin University of Science and Technology
1 publication, 0.28%
ShanghaiTech University
1 publication, 0.28%
Technical University of Denmark
1 publication, 0.28%
National Institutes for Quantum Science and Technology
1 publication, 0.28%
National Taitung University
1 publication, 0.28%
National Applied Research Laboratories
1 publication, 0.28%
Stony Brook University
1 publication, 0.28%
National Yang Ming Chiao Tung University
1 publication, 0.28%
Qufu Normal University
1 publication, 0.28%
California Institute of Technology
1 publication, 0.28%
China Jiliang University
1 publication, 0.28%
Seoul National University
1 publication, 0.28%
North Carolina State University
1 publication, 0.28%
Chonnam National University
1 publication, 0.28%
Chungnam National University
1 publication, 0.28%
Gyeongsang National University
1 publication, 0.28%
Myongji University
1 publication, 0.28%
University of California, Los Angeles
1 publication, 0.28%
University of Arizona
1 publication, 0.28%
Hanbat National University
1 publication, 0.28%
University of Chicago
1 publication, 0.28%
Vienna University of Technology
1 publication, 0.28%
Nagoya University
1 publication, 0.28%
University of Texas at Austin
1 publication, 0.28%
Rensselaer Polytechnic Institute
1 publication, 0.28%
University of Central Florida
1 publication, 0.28%
Aristotle University of Thessaloniki
1 publication, 0.28%
Institute of Chemistry, Chinese Academy of Sciences
1 publication, 0.28%
National Centre of Scientific Research "Demokritos"
1 publication, 0.28%
FORTH Institute of Electronic Structure and Laser
1 publication, 0.28%
National Hellenic Research Foundation
1 publication, 0.28%
Jiujiang University
1 publication, 0.28%
University of Illinois Urbana-Champaign
1 publication, 0.28%
Fraunhofer Institute for Applied Optics and Precision Engineering
1 publication, 0.28%
University of Michigan
1 publication, 0.28%
Industrial Technology Research Institute
1 publication, 0.28%
Fraunhofer Research Institution for Microsystems and Solid State Technologies
1 publication, 0.28%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
1 publication, 0.28%
University of Groningen
1 publication, 0.28%
10
20
30
40
50
60

Publishing organizations in 5 years

10
20
30
40
50
60
Interuniversity Microelectronics Centre
55 publications, 15.71%
Katholieke Universiteit Leuven
26 publications, 7.43%
Lawrence Berkeley National Laboratory
15 publications, 4.29%
Paul Scherrer Institute
9 publications, 2.57%
Samsung
9 publications, 2.57%
Institute of Microelectronics, Chinese Academy of Sciences
9 publications, 2.57%
Fraunhofer Institute for Integrated Systems and Device Technology
8 publications, 2.29%
Hanyang University
7 publications, 2%
Beijing Institute of Technology
5 publications, 1.43%
University of Chinese Academy of Sciences
4 publications, 1.14%
Fudan University
4 publications, 1.14%
National Taiwan University
4 publications, 1.14%
Tokyo Institute of Technology
4 publications, 1.14%
Karlsruhe Institute of Technology
3 publications, 0.86%
Grenoble Alpes University
3 publications, 0.86%
Shanghai University
3 publications, 0.86%
Hefei University of Technology
3 publications, 0.86%
Anhui University of Science and Technology
3 publications, 0.86%
National Tsing Hua University
3 publications, 0.86%
University of California, Berkeley
3 publications, 0.86%
National Institute of Advanced Industrial Science and Technology
3 publications, 0.86%
Vrije Universiteit Amsterdam
3 publications, 0.86%
RWTH Aachen University
3 publications, 0.86%
University of Erlangen–Nuremberg
3 publications, 0.86%
Physikalisch-Technische Bundesanstalt
3 publications, 0.86%
Université Clermont Auvergne
3 publications, 0.86%
California State University, Northridge
3 publications, 0.86%
Zhejiang University
2 publications, 0.57%
Eskisehir Technical University
2 publications, 0.57%
University of Manchester
2 publications, 0.57%
University of Southern California
2 publications, 0.57%
Brookhaven National Laboratory
2 publications, 0.57%
Sungkyunkwan University
2 publications, 0.57%
National Institute of Standards and Technology
2 publications, 0.57%
University of Texas at Dallas
2 publications, 0.57%
Fraunhofer Institute for Laser Technology
2 publications, 0.57%
Siemens AG
2 publications, 0.57%
Texas A&M University
2 publications, 0.57%
San Jose State University
2 publications, 0.57%
Watson Research Center
2 publications, 0.57%
Ningbo Institute of Industrial Technology, Chinese Academy of Sciences
2 publications, 0.57%
Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
2 publications, 0.57%
Birla Institute of Technology and Science, Pilani
1 publication, 0.29%
University of Tabriz
1 publication, 0.29%
Indian Institute of Technology Gandhinagar
1 publication, 0.29%
Indian Institute of Technology Mandi
1 publication, 0.29%
Payame Noor University
1 publication, 0.29%
Vietnam Academy of Science and Technology
1 publication, 0.29%
Hanoi University of Science and Technology
1 publication, 0.29%
Urmia University of Medical Sciences
1 publication, 0.29%
Zhejiang University of Technology
1 publication, 0.29%
Shanghai Jiao Tong University
1 publication, 0.29%
Technion – Israel Institute of Technology
1 publication, 0.29%
University of Twente
1 publication, 0.29%
Ghent University
1 publication, 0.29%
Technical University of Munich
1 publication, 0.29%
Indian Space Research Organisation
1 publication, 0.29%
Fuzhou University
1 publication, 0.29%
Eindhoven University of Technology
1 publication, 0.29%
Hebei University of Technology
1 publication, 0.29%
Swiss Federal Laboratories for Materials Science and Technology
1 publication, 0.29%
Tianjin University of Science and Technology
1 publication, 0.29%
ShanghaiTech University
1 publication, 0.29%
Technical University of Denmark
1 publication, 0.29%
National Institutes for Quantum Science and Technology
1 publication, 0.29%
National Taitung University
1 publication, 0.29%
National Applied Research Laboratories
1 publication, 0.29%
Stony Brook University
1 publication, 0.29%
National Yang Ming Chiao Tung University
1 publication, 0.29%
Qufu Normal University
1 publication, 0.29%
California Institute of Technology
1 publication, 0.29%
China Jiliang University
1 publication, 0.29%
Seoul National University
1 publication, 0.29%
North Carolina State University
1 publication, 0.29%
Chonnam National University
1 publication, 0.29%
Chungnam National University
1 publication, 0.29%
Gyeongsang National University
1 publication, 0.29%
Myongji University
1 publication, 0.29%
University of California, Los Angeles
1 publication, 0.29%
University of Arizona
1 publication, 0.29%
Hanbat National University
1 publication, 0.29%
University of Chicago
1 publication, 0.29%
Vienna University of Technology
1 publication, 0.29%
Nagoya University
1 publication, 0.29%
University of Texas at Austin
1 publication, 0.29%
Rensselaer Polytechnic Institute
1 publication, 0.29%
University of Central Florida
1 publication, 0.29%
Aristotle University of Thessaloniki
1 publication, 0.29%
Institute of Chemistry, Chinese Academy of Sciences
1 publication, 0.29%
National Centre of Scientific Research "Demokritos"
1 publication, 0.29%
FORTH Institute of Electronic Structure and Laser
1 publication, 0.29%
National Hellenic Research Foundation
1 publication, 0.29%
Jiujiang University
1 publication, 0.29%
University of Illinois Urbana-Champaign
1 publication, 0.29%
Fraunhofer Institute for Applied Optics and Precision Engineering
1 publication, 0.29%
University of Michigan
1 publication, 0.29%
Industrial Technology Research Institute
1 publication, 0.29%
Fraunhofer Research Institution for Microsystems and Solid State Technologies
1 publication, 0.29%
University of Groningen
1 publication, 0.29%
Kiel University
1 publication, 0.29%
10
20
30
40
50
60

Publishing countries

20
40
60
80
100
120
USA, 105, 29.91%
USA
105 publications, 29.91%
Belgium, 57, 16.24%
Belgium
57 publications, 16.24%
China, 49, 13.96%
China
49 publications, 13.96%
Japan, 38, 10.83%
Japan
38 publications, 10.83%
Germany, 34, 9.69%
Germany
34 publications, 9.69%
Netherlands, 25, 7.12%
Netherlands
25 publications, 7.12%
Republic of Korea, 13, 3.7%
Republic of Korea
13 publications, 3.7%
France, 10, 2.85%
France
10 publications, 2.85%
Switzerland, 8, 2.28%
Switzerland
8 publications, 2.28%
Israel, 5, 1.42%
Israel
5 publications, 1.42%
United Kingdom, 3, 0.85%
United Kingdom
3 publications, 0.85%
Russia, 2, 0.57%
Russia
2 publications, 0.57%
Austria, 2, 0.57%
Austria
2 publications, 0.57%
Vietnam, 2, 0.57%
Vietnam
2 publications, 0.57%
India, 2, 0.57%
India
2 publications, 0.57%
Hungary, 1, 0.28%
Hungary
1 publication, 0.28%
Greece, 1, 0.28%
Greece
1 publication, 0.28%
Egypt, 1, 0.28%
Egypt
1 publication, 0.28%
Iran, 1, 0.28%
Iran
1 publication, 0.28%
Canada, 1, 0.28%
Canada
1 publication, 0.28%
Latvia, 1, 0.28%
Latvia
1 publication, 0.28%
Mexico, 1, 0.28%
Mexico
1 publication, 0.28%
UAE, 1, 0.28%
UAE
1 publication, 0.28%
Turkey, 1, 0.28%
Turkey
1 publication, 0.28%
20
40
60
80
100
120

Publishing countries in 5 years

20
40
60
80
100
120
USA, 105, 30%
USA
105 publications, 30%
Belgium, 57, 16.29%
Belgium
57 publications, 16.29%
China, 48, 13.71%
China
48 publications, 13.71%
Japan, 38, 10.86%
Japan
38 publications, 10.86%
Germany, 34, 9.71%
Germany
34 publications, 9.71%
Netherlands, 25, 7.14%
Netherlands
25 publications, 7.14%
Republic of Korea, 13, 3.71%
Republic of Korea
13 publications, 3.71%
France, 10, 2.86%
France
10 publications, 2.86%
Switzerland, 8, 2.29%
Switzerland
8 publications, 2.29%
Israel, 5, 1.43%
Israel
5 publications, 1.43%
United Kingdom, 3, 0.86%
United Kingdom
3 publications, 0.86%
Russia, 2, 0.57%
Russia
2 publications, 0.57%
Austria, 2, 0.57%
Austria
2 publications, 0.57%
Vietnam, 2, 0.57%
Vietnam
2 publications, 0.57%
India, 2, 0.57%
India
2 publications, 0.57%
Hungary, 1, 0.29%
Hungary
1 publication, 0.29%
Greece, 1, 0.29%
Greece
1 publication, 0.29%
Egypt, 1, 0.29%
Egypt
1 publication, 0.29%
Iran, 1, 0.29%
Iran
1 publication, 0.29%
Canada, 1, 0.29%
Canada
1 publication, 0.29%
Latvia, 1, 0.29%
Latvia
1 publication, 0.29%
Mexico, 1, 0.29%
Mexico
1 publication, 0.29%
UAE, 1, 0.29%
UAE
1 publication, 0.29%
Turkey, 1, 0.29%
Turkey
1 publication, 0.29%
20
40
60
80
100
120