Journal of Micro/Nanopatterning Materials and Metrology

SPIE-Intl Soc Optical Eng
SPIE-Intl Soc Optical Eng
ISSN: 27088340

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Years of issue
2024-2025
journal names
Journal of Micro/Nanopatterning Materials and Metrology
Publications
345
Citations
970
h-index
14
Publications
344
Citations
964

Most cited in 5 years

Found 
Found 

Top-100

Citing journals

20
40
60
80
100
120
Journal of Micro/Nanopatterning Materials and Metrology
105 citations, 10.82%
Optics Express
43 citations, 4.43%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
38 citations, 3.92%
ACS applied materials & interfaces
22 citations, 2.27%
IEEE Transactions on Semiconductor Manufacturing
18 citations, 1.86%
Journal of Applied Physics
18 citations, 1.86%
Applied Optics
17 citations, 1.75%
Journal of Vacuum Science and Technology B
16 citations, 1.65%
Journal of Photopolymer Science and Technology
11 citations, 1.13%
Chemistry of Materials
11 citations, 1.13%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
10 citations, 1.03%
IEEE Transactions on Electron Devices
10 citations, 1.03%
ACS Applied Nano Materials
8 citations, 0.82%
Micro and Nano Engineering
8 citations, 0.82%
Plasma Sources Science and Technology
8 citations, 0.82%
Nanotechnology
8 citations, 0.82%
Applied Physics Letters
7 citations, 0.72%
Journal Physics D: Applied Physics
7 citations, 0.72%
Measurement Science and Technology
7 citations, 0.72%
Langmuir
7 citations, 0.72%
Nano Letters
6 citations, 0.62%
Applied Sciences (Switzerland)
6 citations, 0.62%
AIP Advances
5 citations, 0.52%
ACS Nano
5 citations, 0.52%
Environmental Science & Technology
5 citations, 0.52%
IEEE Access
5 citations, 0.52%
ACS Applied Polymer Materials
5 citations, 0.52%
Applied Physics Reviews
4 citations, 0.41%
Micromachines
4 citations, 0.41%
Physics of Plasmas
4 citations, 0.41%
Scientific Reports
4 citations, 0.41%
Acta Optica Sinica
4 citations, 0.41%
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
4 citations, 0.41%
Journal of the Optical Society of America A: Optics and Image Science, and Vision
4 citations, 0.41%
Applied Physics Express
4 citations, 0.41%
ACS Applied Electronic Materials
4 citations, 0.41%
IEEE Electron Devices Magazine
4 citations, 0.41%
Review of Scientific Instruments
3 citations, 0.31%
Physical Review Accelerators and Beams
3 citations, 0.31%
Advances in Colloid and Interface Science
3 citations, 0.31%
Physica Scripta
3 citations, 0.31%
Macromolecules
3 citations, 0.31%
AEJ - Alexandria Engineering Journal
3 citations, 0.31%
Machine Learning: Science and Technology
3 citations, 0.31%
Optics Continuum
3 citations, 0.31%
IEEE Electron Devices Reviews
3 citations, 0.31%
ACS Macro Letters
2 citations, 0.21%
IEEE Journal of the Electron Devices Society
2 citations, 0.21%
Solid-State Electronics
2 citations, 0.21%
Journal of Modern Optics
2 citations, 0.21%
Journal of the American Chemical Society
2 citations, 0.21%
Optics and Laser Technology
2 citations, 0.21%
ACS Sensors
2 citations, 0.21%
ECS Journal of Solid State Science and Technology
2 citations, 0.21%
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
2 citations, 0.21%
Rapid Communications in Mass Spectrometry
2 citations, 0.21%
Applied Surface Science
2 citations, 0.21%
ACS Photonics
2 citations, 0.21%
Photonics
2 citations, 0.21%
Physics of Fluids
2 citations, 0.21%
Chinese Journal of Lasers
2 citations, 0.21%
Optica
2 citations, 0.21%
APL Photonics
2 citations, 0.21%
Current Applied Physics
2 citations, 0.21%
Precision Engineering
2 citations, 0.21%
Journal of Instrumentation
2 citations, 0.21%
Journal of Micromechanics and Microengineering
2 citations, 0.21%
Light Advanced Manufacturing
2 citations, 0.21%
ACS ES&T Water
2 citations, 0.21%
Micro and Nanostructures
2 citations, 0.21%
Engineering Research Express
2 citations, 0.21%
Discover Nano
2 citations, 0.21%
Moore and More
2 citations, 0.21%
Nanoscale
1 citation, 0.1%
Plasma Science and Technology
1 citation, 0.1%
Surface Science
1 citation, 0.1%
Journal of Chemical Physics
1 citation, 0.1%
Optics Letters
1 citation, 0.1%
Materials Today Chemistry
1 citation, 0.1%
Journal of Cleaner Production
1 citation, 0.1%
Science of the Total Environment
1 citation, 0.1%
Organic Letters
1 citation, 0.1%
Journal of Physics: Conference Series
1 citation, 0.1%
IEEE Transactions on Circuits and Systems I: Regular Papers
1 citation, 0.1%
Materials Research Express
1 citation, 0.1%
Journal of Alloys and Compounds
1 citation, 0.1%
IEEE Photonics Technology Letters
1 citation, 0.1%
Extreme Mechanics Letters
1 citation, 0.1%
iScience
1 citation, 0.1%
International Communications in Heat and Mass Transfer
1 citation, 0.1%
Membranes
1 citation, 0.1%
Silicon
1 citation, 0.1%
Expert Systems with Applications
1 citation, 0.1%
Journal of Physical Chemistry C
1 citation, 0.1%
Optical Materials Express
1 citation, 0.1%
Corrosion Science
1 citation, 0.1%
Nano Futures
1 citation, 0.1%
Frontiers in Physics
1 citation, 0.1%
Nanomaterials
1 citation, 0.1%
Composites Part B: Engineering
1 citation, 0.1%
20
40
60
80
100
120

Citing publishers

50
100
150
200
250
300
350
SPIE-Intl Soc Optical Eng
334 citations, 34.43%
Institute of Electrical and Electronics Engineers (IEEE)
92 citations, 9.48%
American Chemical Society (ACS)
91 citations, 9.38%
Optica Publishing Group
71 citations, 7.32%
IOP Publishing
67 citations, 6.91%
Elsevier
61 citations, 6.29%
AIP Publishing
47 citations, 4.85%
American Vacuum Society
29 citations, 2.99%
Japan Society of Applied Physics
25 citations, 2.58%
MDPI
21 citations, 2.16%
Springer Nature
18 citations, 1.86%
The Technical Association of Photopolymers, Japan
11 citations, 1.13%
Wiley
8 citations, 0.82%
Association for Computing Machinery (ACM)
6 citations, 0.62%
Shanghai Institute of Optics and Fine Mechanics
6 citations, 0.62%
American Physical Society (APS)
4 citations, 0.41%
Royal Society of Chemistry (RSC)
3 citations, 0.31%
Taylor & Francis
2 citations, 0.21%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
2 citations, 0.21%
The Electrochemical Society
2 citations, 0.21%
Walter de Gruyter
1 citation, 0.1%
Pleiades Publishing
1 citation, 0.1%
Trans Tech Publications
1 citation, 0.1%
Frontiers Media S.A.
1 citation, 0.1%
International Union of Crystallography (IUCr)
1 citation, 0.1%
Fuji Technology Press
1 citation, 0.1%
Beilstein-Institut
1 citation, 0.1%
Science in China Press
1 citation, 0.1%
ASME International
1 citation, 0.1%
The Surface Science Society of Japan
1 citation, 0.1%
IntechOpen
1 citation, 0.1%
Hans Publishers
1 citation, 0.1%
The Japan Society for Precision Engineering
1 citation, 0.1%
Kazakh-British Technical University
1 citation, 0.1%
50
100
150
200
250
300
350

Publishing organizations

10
20
30
40
50
60
Interuniversity Microelectronics Centre
54 publications, 15.65%
Katholieke Universiteit Leuven
25 publications, 7.25%
Lawrence Berkeley National Laboratory
15 publications, 4.35%
Paul Scherrer Institute
9 publications, 2.61%
Samsung
9 publications, 2.61%
Institute of Microelectronics, Chinese Academy of Sciences
9 publications, 2.61%
Fraunhofer Institute for Integrated Systems and Device Technology
8 publications, 2.32%
Hanyang University
7 publications, 2.03%
Beijing Institute of Technology
5 publications, 1.45%
University of Chinese Academy of Sciences
4 publications, 1.16%
Fudan University
4 publications, 1.16%
National Taiwan University
4 publications, 1.16%
Tokyo Institute of Technology
4 publications, 1.16%
Zhejiang University
3 publications, 0.87%
Karlsruhe Institute of Technology
3 publications, 0.87%
Grenoble Alpes University
3 publications, 0.87%
Shanghai University
3 publications, 0.87%
Hefei University of Technology
3 publications, 0.87%
Anhui University of Science and Technology
3 publications, 0.87%
National Tsing Hua University
3 publications, 0.87%
University of California, Berkeley
3 publications, 0.87%
National Institute of Advanced Industrial Science and Technology
3 publications, 0.87%
Vrije Universiteit Amsterdam
3 publications, 0.87%
RWTH Aachen University
3 publications, 0.87%
University of Erlangen–Nuremberg
3 publications, 0.87%
Physikalisch-Technische Bundesanstalt
3 publications, 0.87%
Université Clermont Auvergne
3 publications, 0.87%
California State University, Northridge
3 publications, 0.87%
Eskisehir Technical University
2 publications, 0.58%
University of Manchester
2 publications, 0.58%
University of Southern California
2 publications, 0.58%
Brookhaven National Laboratory
2 publications, 0.58%
Sungkyunkwan University
2 publications, 0.58%
National Institute of Standards and Technology
2 publications, 0.58%
University of Texas at Dallas
2 publications, 0.58%
Fraunhofer Institute for Laser Technology
2 publications, 0.58%
Siemens AG
2 publications, 0.58%
Texas A&M University
2 publications, 0.58%
San Jose State University
2 publications, 0.58%
Watson Research Center
2 publications, 0.58%
Ningbo Institute of Industrial Technology, Chinese Academy of Sciences
2 publications, 0.58%
Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
2 publications, 0.58%
Birla Institute of Technology and Science, Pilani
1 publication, 0.29%
University of Tabriz
1 publication, 0.29%
Indian Institute of Technology Mandi
1 publication, 0.29%
Payame Noor University
1 publication, 0.29%
Vietnam Academy of Science and Technology
1 publication, 0.29%
Hanoi University of Science and Technology
1 publication, 0.29%
Urmia University of Medical Sciences
1 publication, 0.29%
Zhejiang University of Technology
1 publication, 0.29%
Shanghai Jiao Tong University
1 publication, 0.29%
Technion – Israel Institute of Technology
1 publication, 0.29%
University of Twente
1 publication, 0.29%
Ghent University
1 publication, 0.29%
Technical University of Munich
1 publication, 0.29%
Indian Space Research Organisation
1 publication, 0.29%
Fuzhou University
1 publication, 0.29%
Eindhoven University of Technology
1 publication, 0.29%
Hebei University of Technology
1 publication, 0.29%
Tianjin University of Science and Technology
1 publication, 0.29%
ShanghaiTech University
1 publication, 0.29%
Technical University of Denmark
1 publication, 0.29%
National Institutes for Quantum Science and Technology
1 publication, 0.29%
National Taitung University
1 publication, 0.29%
National Applied Research Laboratories
1 publication, 0.29%
Stony Brook University
1 publication, 0.29%
National Yang Ming Chiao Tung University
1 publication, 0.29%
Qufu Normal University
1 publication, 0.29%
California Institute of Technology
1 publication, 0.29%
China Jiliang University
1 publication, 0.29%
Seoul National University
1 publication, 0.29%
North Carolina State University
1 publication, 0.29%
Chonnam National University
1 publication, 0.29%
Chungnam National University
1 publication, 0.29%
Gyeongsang National University
1 publication, 0.29%
Myongji University
1 publication, 0.29%
University of California, Los Angeles
1 publication, 0.29%
University of Arizona
1 publication, 0.29%
Hanbat National University
1 publication, 0.29%
University of Chicago
1 publication, 0.29%
Vienna University of Technology
1 publication, 0.29%
Nagoya University
1 publication, 0.29%
University of Texas at Austin
1 publication, 0.29%
Rensselaer Polytechnic Institute
1 publication, 0.29%
University of Central Florida
1 publication, 0.29%
Aristotle University of Thessaloniki
1 publication, 0.29%
Institute of Chemistry, Chinese Academy of Sciences
1 publication, 0.29%
National Centre of Scientific Research "Demokritos"
1 publication, 0.29%
FORTH Institute of Electronic Structure and Laser
1 publication, 0.29%
National Hellenic Research Foundation
1 publication, 0.29%
Jiujiang University
1 publication, 0.29%
University of Illinois Urbana-Champaign
1 publication, 0.29%
Fraunhofer Institute for Applied Optics and Precision Engineering
1 publication, 0.29%
University of Michigan
1 publication, 0.29%
Industrial Technology Research Institute
1 publication, 0.29%
Fraunhofer Research Institution for Microsystems and Solid State Technologies
1 publication, 0.29%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
1 publication, 0.29%
University of Groningen
1 publication, 0.29%
Kiel University
1 publication, 0.29%
Sony Group Corporation
1 publication, 0.29%
10
20
30
40
50
60

Publishing organizations in 5 years

10
20
30
40
50
60
Interuniversity Microelectronics Centre
54 publications, 15.7%
Katholieke Universiteit Leuven
25 publications, 7.27%
Lawrence Berkeley National Laboratory
15 publications, 4.36%
Paul Scherrer Institute
9 publications, 2.62%
Samsung
9 publications, 2.62%
Institute of Microelectronics, Chinese Academy of Sciences
9 publications, 2.62%
Fraunhofer Institute for Integrated Systems and Device Technology
8 publications, 2.33%
Hanyang University
7 publications, 2.03%
Beijing Institute of Technology
5 publications, 1.45%
University of Chinese Academy of Sciences
4 publications, 1.16%
Fudan University
4 publications, 1.16%
National Taiwan University
4 publications, 1.16%
Tokyo Institute of Technology
4 publications, 1.16%
Karlsruhe Institute of Technology
3 publications, 0.87%
Grenoble Alpes University
3 publications, 0.87%
Shanghai University
3 publications, 0.87%
Hefei University of Technology
3 publications, 0.87%
Anhui University of Science and Technology
3 publications, 0.87%
National Tsing Hua University
3 publications, 0.87%
University of California, Berkeley
3 publications, 0.87%
National Institute of Advanced Industrial Science and Technology
3 publications, 0.87%
Vrije Universiteit Amsterdam
3 publications, 0.87%
RWTH Aachen University
3 publications, 0.87%
University of Erlangen–Nuremberg
3 publications, 0.87%
Physikalisch-Technische Bundesanstalt
3 publications, 0.87%
Université Clermont Auvergne
3 publications, 0.87%
California State University, Northridge
3 publications, 0.87%
Zhejiang University
2 publications, 0.58%
Eskisehir Technical University
2 publications, 0.58%
University of Manchester
2 publications, 0.58%
University of Southern California
2 publications, 0.58%
Brookhaven National Laboratory
2 publications, 0.58%
Sungkyunkwan University
2 publications, 0.58%
National Institute of Standards and Technology
2 publications, 0.58%
University of Texas at Dallas
2 publications, 0.58%
Fraunhofer Institute for Laser Technology
2 publications, 0.58%
Siemens AG
2 publications, 0.58%
Texas A&M University
2 publications, 0.58%
San Jose State University
2 publications, 0.58%
Watson Research Center
2 publications, 0.58%
Ningbo Institute of Industrial Technology, Chinese Academy of Sciences
2 publications, 0.58%
Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
2 publications, 0.58%
Birla Institute of Technology and Science, Pilani
1 publication, 0.29%
University of Tabriz
1 publication, 0.29%
Indian Institute of Technology Mandi
1 publication, 0.29%
Payame Noor University
1 publication, 0.29%
Vietnam Academy of Science and Technology
1 publication, 0.29%
Hanoi University of Science and Technology
1 publication, 0.29%
Urmia University of Medical Sciences
1 publication, 0.29%
Zhejiang University of Technology
1 publication, 0.29%
Shanghai Jiao Tong University
1 publication, 0.29%
Technion – Israel Institute of Technology
1 publication, 0.29%
University of Twente
1 publication, 0.29%
Ghent University
1 publication, 0.29%
Technical University of Munich
1 publication, 0.29%
Indian Space Research Organisation
1 publication, 0.29%
Fuzhou University
1 publication, 0.29%
Eindhoven University of Technology
1 publication, 0.29%
Hebei University of Technology
1 publication, 0.29%
Tianjin University of Science and Technology
1 publication, 0.29%
ShanghaiTech University
1 publication, 0.29%
Technical University of Denmark
1 publication, 0.29%
National Institutes for Quantum Science and Technology
1 publication, 0.29%
National Taitung University
1 publication, 0.29%
National Applied Research Laboratories
1 publication, 0.29%
Stony Brook University
1 publication, 0.29%
National Yang Ming Chiao Tung University
1 publication, 0.29%
Qufu Normal University
1 publication, 0.29%
California Institute of Technology
1 publication, 0.29%
China Jiliang University
1 publication, 0.29%
Seoul National University
1 publication, 0.29%
North Carolina State University
1 publication, 0.29%
Chonnam National University
1 publication, 0.29%
Chungnam National University
1 publication, 0.29%
Gyeongsang National University
1 publication, 0.29%
Myongji University
1 publication, 0.29%
University of California, Los Angeles
1 publication, 0.29%
University of Arizona
1 publication, 0.29%
Hanbat National University
1 publication, 0.29%
University of Chicago
1 publication, 0.29%
Vienna University of Technology
1 publication, 0.29%
Nagoya University
1 publication, 0.29%
University of Texas at Austin
1 publication, 0.29%
Rensselaer Polytechnic Institute
1 publication, 0.29%
University of Central Florida
1 publication, 0.29%
Aristotle University of Thessaloniki
1 publication, 0.29%
Institute of Chemistry, Chinese Academy of Sciences
1 publication, 0.29%
National Centre of Scientific Research "Demokritos"
1 publication, 0.29%
FORTH Institute of Electronic Structure and Laser
1 publication, 0.29%
National Hellenic Research Foundation
1 publication, 0.29%
Jiujiang University
1 publication, 0.29%
University of Illinois Urbana-Champaign
1 publication, 0.29%
Fraunhofer Institute for Applied Optics and Precision Engineering
1 publication, 0.29%
University of Michigan
1 publication, 0.29%
Industrial Technology Research Institute
1 publication, 0.29%
Fraunhofer Research Institution for Microsystems and Solid State Technologies
1 publication, 0.29%
University of Groningen
1 publication, 0.29%
Kiel University
1 publication, 0.29%
Sony Group Corporation
1 publication, 0.29%
Kyushu Institute of Technology
1 publication, 0.29%
10
20
30
40
50
60

Publishing countries

20
40
60
80
100
120
USA, 104, 30.14%
USA
104 publications, 30.14%
Belgium, 56, 16.23%
Belgium
56 publications, 16.23%
China, 46, 13.33%
China
46 publications, 13.33%
Japan, 38, 11.01%
Japan
38 publications, 11.01%
Germany, 34, 9.86%
Germany
34 publications, 9.86%
Netherlands, 25, 7.25%
Netherlands
25 publications, 7.25%
Republic of Korea, 13, 3.77%
Republic of Korea
13 publications, 3.77%
France, 10, 2.9%
France
10 publications, 2.9%
Switzerland, 8, 2.32%
Switzerland
8 publications, 2.32%
Israel, 5, 1.45%
Israel
5 publications, 1.45%
United Kingdom, 3, 0.87%
United Kingdom
3 publications, 0.87%
Russia, 2, 0.58%
Russia
2 publications, 0.58%
Austria, 2, 0.58%
Austria
2 publications, 0.58%
Vietnam, 2, 0.58%
Vietnam
2 publications, 0.58%
India, 2, 0.58%
India
2 publications, 0.58%
Hungary, 1, 0.29%
Hungary
1 publication, 0.29%
Greece, 1, 0.29%
Greece
1 publication, 0.29%
Egypt, 1, 0.29%
Egypt
1 publication, 0.29%
Iran, 1, 0.29%
Iran
1 publication, 0.29%
Canada, 1, 0.29%
Canada
1 publication, 0.29%
Latvia, 1, 0.29%
Latvia
1 publication, 0.29%
Mexico, 1, 0.29%
Mexico
1 publication, 0.29%
UAE, 1, 0.29%
UAE
1 publication, 0.29%
Turkey, 1, 0.29%
Turkey
1 publication, 0.29%
20
40
60
80
100
120

Publishing countries in 5 years

20
40
60
80
100
120
USA, 104, 30.23%
USA
104 publications, 30.23%
Belgium, 56, 16.28%
Belgium
56 publications, 16.28%
China, 45, 13.08%
China
45 publications, 13.08%
Japan, 38, 11.05%
Japan
38 publications, 11.05%
Germany, 34, 9.88%
Germany
34 publications, 9.88%
Netherlands, 25, 7.27%
Netherlands
25 publications, 7.27%
Republic of Korea, 13, 3.78%
Republic of Korea
13 publications, 3.78%
France, 10, 2.91%
France
10 publications, 2.91%
Switzerland, 8, 2.33%
Switzerland
8 publications, 2.33%
Israel, 5, 1.45%
Israel
5 publications, 1.45%
United Kingdom, 3, 0.87%
United Kingdom
3 publications, 0.87%
Russia, 2, 0.58%
Russia
2 publications, 0.58%
Austria, 2, 0.58%
Austria
2 publications, 0.58%
Vietnam, 2, 0.58%
Vietnam
2 publications, 0.58%
India, 2, 0.58%
India
2 publications, 0.58%
Hungary, 1, 0.29%
Hungary
1 publication, 0.29%
Greece, 1, 0.29%
Greece
1 publication, 0.29%
Egypt, 1, 0.29%
Egypt
1 publication, 0.29%
Iran, 1, 0.29%
Iran
1 publication, 0.29%
Canada, 1, 0.29%
Canada
1 publication, 0.29%
Latvia, 1, 0.29%
Latvia
1 publication, 0.29%
Mexico, 1, 0.29%
Mexico
1 publication, 0.29%
UAE, 1, 0.29%
UAE
1 publication, 0.29%
Turkey, 1, 0.29%
Turkey
1 publication, 0.29%
20
40
60
80
100
120