Journal of Micro/Nanopatterning Materials and Metrology

SPIE-Intl Soc Optical Eng
SPIE-Intl Soc Optical Eng
ISSN: 27088340
Years of issue
2024
journal names
Journal of Micro/Nanopatterning Materials and Metrology
Publications
275
Citations
633
h-index
11
Publications
274
Citations
616
Top-3 countries
USA (91 publications)
Belgium (45 publications)
Japan (35 publications)
USA (91 publications)
Belgium (45 publications)
Japan (35 publications)

Most cited in 5 years

Found 
from chars
Publications found: 0

Top-100

Citing journals

10
20
30
40
50
60
70
80
Journal of Micro/Nanopatterning Materials and Metrology
78 citations, 12.32%
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
34 citations, 5.37%
Optics Express
29 citations, 4.58%
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
15 citations, 2.37%
Applied Optics
12 citations, 1.9%
Journal of Applied Physics
12 citations, 1.9%
Journal of Photopolymer Science and Technology
9 citations, 1.42%
Micro and Nano Engineering
8 citations, 1.26%
IEEE Transactions on Electron Devices
7 citations, 1.11%
Applied Sciences (Switzerland)
6 citations, 0.95%
ACS applied materials & interfaces
5 citations, 0.79%
ACS Applied Nano Materials
5 citations, 0.79%
Applied Physics Letters
5 citations, 0.79%
Plasma Sources Science and Technology
5 citations, 0.79%
Nanotechnology
5 citations, 0.79%
IEEE Transactions on Semiconductor Manufacturing
4 citations, 0.63%
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
4 citations, 0.63%
ACS Nano
4 citations, 0.63%
Nano Letters
4 citations, 0.63%
Journal Physics D: Applied Physics
4 citations, 0.63%
Journal of the Optical Society of America A: Optics and Image Science, and Vision
4 citations, 0.63%
Applied Physics Express
4 citations, 0.63%
IEEE Electron Devices Magazine
4 citations, 0.63%
Micromachines
3 citations, 0.47%
Chemistry of Materials
3 citations, 0.47%
Advances in Colloid and Interface Science
3 citations, 0.47%
Measurement Science and Technology
3 citations, 0.47%
Langmuir
3 citations, 0.47%
Environmental Science & Technology
3 citations, 0.47%
AEJ - Alexandria Engineering Journal
3 citations, 0.47%
Solid-State Electronics
2 citations, 0.32%
Journal of the American Chemical Society
2 citations, 0.32%
Review of Scientific Instruments
2 citations, 0.32%
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
2 citations, 0.32%
Applied Surface Science
2 citations, 0.32%
Physical Review Accelerators and Beams
2 citations, 0.32%
Scientific Reports
2 citations, 0.32%
Chinese Journal of Lasers
2 citations, 0.32%
Current Applied Physics
2 citations, 0.32%
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
2 citations, 0.32%
Precision Engineering
2 citations, 0.32%
IEEE Access
2 citations, 0.32%
Engineering Research Express
2 citations, 0.32%
Discover Nano
2 citations, 0.32%
Plasma Science and Technology
1 citation, 0.16%
Surface Science
1 citation, 0.16%
Journal of Chemical Physics
1 citation, 0.16%
Optics Letters
1 citation, 0.16%
ACS Macro Letters
1 citation, 0.16%
IEEE Journal of the Electron Devices Society
1 citation, 0.16%
Journal of Cleaner Production
1 citation, 0.16%
Science of the Total Environment
1 citation, 0.16%
Organic Letters
1 citation, 0.16%
Journal of Physics: Conference Series
1 citation, 0.16%
IEEE Transactions on Circuits and Systems I: Regular Papers
1 citation, 0.16%
Materials Research Express
1 citation, 0.16%
Journal of Alloys and Compounds
1 citation, 0.16%
Journal of Modern Optics
1 citation, 0.16%
IEEE Photonics Technology Letters
1 citation, 0.16%
Extreme Mechanics Letters
1 citation, 0.16%
iScience
1 citation, 0.16%
International Communications in Heat and Mass Transfer
1 citation, 0.16%
Membranes
1 citation, 0.16%
AIP Advances
1 citation, 0.16%
Expert Systems with Applications
1 citation, 0.16%
Optics and Laser Technology
1 citation, 0.16%
Journal of Physical Chemistry C
1 citation, 0.16%
ECS Journal of Solid State Science and Technology
1 citation, 0.16%
Optical Materials Express
1 citation, 0.16%
Corrosion Science
1 citation, 0.16%
Frontiers in Physics
1 citation, 0.16%
Nanomaterials
1 citation, 0.16%
Composites Part B: Engineering
1 citation, 0.16%
IEEE Transactions on Device and Materials Reliability
1 citation, 0.16%
IEEE Transactions on Instrumentation and Measurement
1 citation, 0.16%
ACS Photonics
1 citation, 0.16%
Photonics
1 citation, 0.16%
Coordination Chemistry Reviews
1 citation, 0.16%
Bulletin of the Lebedev Physics Institute
1 citation, 0.16%
Physics of Fluids
1 citation, 0.16%
Water Research
1 citation, 0.16%
Progress in Polymer Science
1 citation, 0.16%
Crystals
1 citation, 0.16%
Optik
1 citation, 0.16%
Nanoscale Advances
1 citation, 0.16%
IEEE Transactions on Medical Imaging
1 citation, 0.16%
Computers and Fluids
1 citation, 0.16%
Optical and Quantum Electronics
1 citation, 0.16%
Journal of Semiconductors
1 citation, 0.16%
Journal of Manufacturing Systems
1 citation, 0.16%
Sensors
1 citation, 0.16%
APL Photonics
1 citation, 0.16%
ACS Omega
1 citation, 0.16%
Nano-Structures and Nano-Objects
1 citation, 0.16%
Nanoscale Research Letters
1 citation, 0.16%
npj Computational Materials
1 citation, 0.16%
Key Engineering Materials
1 citation, 0.16%
Processes
1 citation, 0.16%
Applied Mathematical Modelling
1 citation, 0.16%
Macromolecules
1 citation, 0.16%
10
20
30
40
50
60
70
80

Citing publishers

50
100
150
200
250
SPIE-Intl Soc Optical Eng
220 citations, 34.76%
Elsevier
53 citations, 8.37%
Optica Publishing Group
47 citations, 7.42%
Institute of Electrical and Electronics Engineers (IEEE)
47 citations, 7.42%
IOP Publishing
41 citations, 6.48%
American Chemical Society (ACS)
38 citations, 6%
Japan Society of Applied Physics
25 citations, 3.95%
AIP Publishing
23 citations, 3.63%
American Vacuum Society
23 citations, 3.63%
MDPI
18 citations, 2.84%
Springer Nature
9 citations, 1.42%
The Technical Association of Photopolymers, Japan
9 citations, 1.42%
Association for Computing Machinery (ACM)
2 citations, 0.32%
American Physical Society (APS)
2 citations, 0.32%
Shanghai Institute of Optics and Fine Mechanics
2 citations, 0.32%
Taylor & Francis
1 citation, 0.16%
Pleiades Publishing
1 citation, 0.16%
Trans Tech Publications
1 citation, 0.16%
Royal Society of Chemistry (RSC)
1 citation, 0.16%
Frontiers Media S.A.
1 citation, 0.16%
Beilstein-Institut
1 citation, 0.16%
The Electrochemical Society
1 citation, 0.16%
Hans Publishers
1 citation, 0.16%
50
100
150
200
250

Publishing organizations

5
10
15
20
25
30
35
40
45
Interuniversity Microelectronics Centre
41 publications, 14.91%
Katholieke Universiteit Leuven
15 publications, 5.45%
Lawrence Berkeley National Laboratory
9 publications, 3.27%
Paul Scherrer Institute
8 publications, 2.91%
Fraunhofer Institute for Integrated Systems and Device Technology
7 publications, 2.55%
Hanyang University
6 publications, 2.18%
Beijing Institute of Technology
4 publications, 1.45%
Samsung
4 publications, 1.45%
Tokyo Institute of Technology
4 publications, 1.45%
University of Chinese Academy of Sciences
3 publications, 1.09%
Fudan University
3 publications, 1.09%
Karlsruhe Institute of Technology
3 publications, 1.09%
Grenoble Alpes University
3 publications, 1.09%
National Taiwan University
3 publications, 1.09%
University of California, Berkeley
3 publications, 1.09%
University of Erlangen–Nuremberg
3 publications, 1.09%
Physikalisch-Technische Bundesanstalt
3 publications, 1.09%
Lomonosov Moscow State University
2 publications, 0.73%
University of Manchester
2 publications, 0.73%
Hefei University of Technology
2 publications, 0.73%
Anhui University of Science and Technology
2 publications, 0.73%
National Tsing Hua University
2 publications, 0.73%
National Institute of Advanced Industrial Science and Technology
2 publications, 0.73%
Vrije Universiteit Amsterdam
2 publications, 0.73%
RWTH Aachen University
2 publications, 0.73%
Texas A&M University
2 publications, 0.73%
Birla Institute of Technology and Science, Pilani
1 publication, 0.36%
University of Tabriz
1 publication, 0.36%
Indian Institute of Technology Mandi
1 publication, 0.36%
Payame Noor University
1 publication, 0.36%
Vietnam Academy of Science and Technology
1 publication, 0.36%
Hanoi University of Science and Technology
1 publication, 0.36%
Urmia University of Medical Sciences
1 publication, 0.36%
Technion – Israel Institute of Technology
1 publication, 0.36%
Eskisehir Technical University
1 publication, 0.36%
University of Twente
1 publication, 0.36%
Ghent University
1 publication, 0.36%
Technical University of Munich
1 publication, 0.36%
Indian Space Research Organisation
1 publication, 0.36%
Eindhoven University of Technology
1 publication, 0.36%
Hebei University of Technology
1 publication, 0.36%
Tianjin University of Science and Technology
1 publication, 0.36%
Shanghai University
1 publication, 0.36%
University of Southern California
1 publication, 0.36%
National Institutes for Quantum Science and Technology
1 publication, 0.36%
National Taitung University
1 publication, 0.36%
National Applied Research Laboratories
1 publication, 0.36%
National Yang Ming Chiao Tung University
1 publication, 0.36%
Qufu Normal University
1 publication, 0.36%
California Institute of Technology
1 publication, 0.36%
Brookhaven National Laboratory
1 publication, 0.36%
Seoul National University
1 publication, 0.36%
Sungkyunkwan University
1 publication, 0.36%
National Institute of Standards and Technology
1 publication, 0.36%
North Carolina State University
1 publication, 0.36%
Chonnam National University
1 publication, 0.36%
Chungnam National University
1 publication, 0.36%
Myongji University
1 publication, 0.36%
University of Arizona
1 publication, 0.36%
University of Texas at Austin
1 publication, 0.36%
Rensselaer Polytechnic Institute
1 publication, 0.36%
University of Central Florida
1 publication, 0.36%
University of Texas at Dallas
1 publication, 0.36%
Aristotle University of Thessaloniki
1 publication, 0.36%
Institute of Chemistry, Chinese Academy of Sciences
1 publication, 0.36%
National Centre of Scientific Research "Demokritos"
1 publication, 0.36%
Fraunhofer Institute for Applied Optics and Precision Engineering
1 publication, 0.36%
University of Michigan
1 publication, 0.36%
Fraunhofer Institute for Laser Technology
1 publication, 0.36%
Fraunhofer Research Institution for Microsystems and Solid State Technologies
1 publication, 0.36%
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
1 publication, 0.36%
Kiel University
1 publication, 0.36%
Sony Group Corporation
1 publication, 0.36%
Kyushu Institute of Technology
1 publication, 0.36%
High Energy Accelerator Research Organization
1 publication, 0.36%
Shinshu University
1 publication, 0.36%
Ain Shams University
1 publication, 0.36%
Royal Philips
1 publication, 0.36%
University of Pennsylvania
1 publication, 0.36%
University of Toronto
1 publication, 0.36%
University of Tennessee
1 publication, 0.36%
San Jose State University
1 publication, 0.36%
5
10
15
20
25
30
35
40
45

Publishing organizations in 5 years

5
10
15
20
25
30
35
40
45
Interuniversity Microelectronics Centre
41 publications, 14.96%
Katholieke Universiteit Leuven
15 publications, 5.47%
Lawrence Berkeley National Laboratory
9 publications, 3.28%
Paul Scherrer Institute
8 publications, 2.92%
Fraunhofer Institute for Integrated Systems and Device Technology
7 publications, 2.55%
Hanyang University
6 publications, 2.19%
Beijing Institute of Technology
4 publications, 1.46%
Samsung
4 publications, 1.46%
Tokyo Institute of Technology
4 publications, 1.46%
University of Chinese Academy of Sciences
3 publications, 1.09%
Fudan University
3 publications, 1.09%
Karlsruhe Institute of Technology
3 publications, 1.09%
Grenoble Alpes University
3 publications, 1.09%
National Taiwan University
3 publications, 1.09%
University of California, Berkeley
3 publications, 1.09%
University of Erlangen–Nuremberg
3 publications, 1.09%
Physikalisch-Technische Bundesanstalt
3 publications, 1.09%
Lomonosov Moscow State University
2 publications, 0.73%
University of Manchester
2 publications, 0.73%
Hefei University of Technology
2 publications, 0.73%
Anhui University of Science and Technology
2 publications, 0.73%
National Tsing Hua University
2 publications, 0.73%
National Institute of Advanced Industrial Science and Technology
2 publications, 0.73%
Vrije Universiteit Amsterdam
2 publications, 0.73%
RWTH Aachen University
2 publications, 0.73%
Texas A&M University
2 publications, 0.73%
Birla Institute of Technology and Science, Pilani
1 publication, 0.36%
University of Tabriz
1 publication, 0.36%
Indian Institute of Technology Mandi
1 publication, 0.36%
Payame Noor University
1 publication, 0.36%
Vietnam Academy of Science and Technology
1 publication, 0.36%
Hanoi University of Science and Technology
1 publication, 0.36%
Urmia University of Medical Sciences
1 publication, 0.36%
Technion – Israel Institute of Technology
1 publication, 0.36%
Eskisehir Technical University
1 publication, 0.36%
University of Twente
1 publication, 0.36%
Ghent University
1 publication, 0.36%
Technical University of Munich
1 publication, 0.36%
Indian Space Research Organisation
1 publication, 0.36%
Eindhoven University of Technology
1 publication, 0.36%
Hebei University of Technology
1 publication, 0.36%
Tianjin University of Science and Technology
1 publication, 0.36%
Shanghai University
1 publication, 0.36%
University of Southern California
1 publication, 0.36%
National Institutes for Quantum Science and Technology
1 publication, 0.36%
National Taitung University
1 publication, 0.36%
National Applied Research Laboratories
1 publication, 0.36%
National Yang Ming Chiao Tung University
1 publication, 0.36%
Qufu Normal University
1 publication, 0.36%
California Institute of Technology
1 publication, 0.36%
Brookhaven National Laboratory
1 publication, 0.36%
Seoul National University
1 publication, 0.36%
Sungkyunkwan University
1 publication, 0.36%
National Institute of Standards and Technology
1 publication, 0.36%
North Carolina State University
1 publication, 0.36%
Chonnam National University
1 publication, 0.36%
Chungnam National University
1 publication, 0.36%
Myongji University
1 publication, 0.36%
University of Arizona
1 publication, 0.36%
University of Texas at Austin
1 publication, 0.36%
Rensselaer Polytechnic Institute
1 publication, 0.36%
University of Central Florida
1 publication, 0.36%
University of Texas at Dallas
1 publication, 0.36%
Aristotle University of Thessaloniki
1 publication, 0.36%
Institute of Chemistry, Chinese Academy of Sciences
1 publication, 0.36%
National Centre of Scientific Research "Demokritos"
1 publication, 0.36%
Fraunhofer Institute for Applied Optics and Precision Engineering
1 publication, 0.36%
University of Michigan
1 publication, 0.36%
Fraunhofer Institute for Laser Technology
1 publication, 0.36%
Fraunhofer Research Institution for Microsystems and Solid State Technologies
1 publication, 0.36%
Kiel University
1 publication, 0.36%
Sony Group Corporation
1 publication, 0.36%
Kyushu Institute of Technology
1 publication, 0.36%
High Energy Accelerator Research Organization
1 publication, 0.36%
Shinshu University
1 publication, 0.36%
Ain Shams University
1 publication, 0.36%
Royal Philips
1 publication, 0.36%
University of Pennsylvania
1 publication, 0.36%
University of Toronto
1 publication, 0.36%
University of Tennessee
1 publication, 0.36%
San Jose State University
1 publication, 0.36%
5
10
15
20
25
30
35
40
45

Publishing countries

10
20
30
40
50
60
70
80
90
100
USA, 91, 33.09%
USA
91 publications, 33.09%
Belgium, 45, 16.36%
Belgium
45 publications, 16.36%
Japan, 35, 12.73%
Japan
35 publications, 12.73%
Germany, 32, 11.64%
Germany
32 publications, 11.64%
China, 32, 11.64%
China
32 publications, 11.64%
Netherlands, 21, 7.64%
Netherlands
21 publications, 7.64%
Republic of Korea, 12, 4.36%
Republic of Korea
12 publications, 4.36%
Switzerland, 8, 2.91%
Switzerland
8 publications, 2.91%
France, 6, 2.18%
France
6 publications, 2.18%
Israel, 5, 1.82%
Israel
5 publications, 1.82%
United Kingdom, 3, 1.09%
United Kingdom
3 publications, 1.09%
Russia, 2, 0.73%
Russia
2 publications, 0.73%
Vietnam, 2, 0.73%
Vietnam
2 publications, 0.73%
India, 2, 0.73%
India
2 publications, 0.73%
Austria, 1, 0.36%
Austria
1 publication, 0.36%
Hungary, 1, 0.36%
Hungary
1 publication, 0.36%
Greece, 1, 0.36%
Greece
1 publication, 0.36%
Egypt, 1, 0.36%
Egypt
1 publication, 0.36%
Iran, 1, 0.36%
Iran
1 publication, 0.36%
Canada, 1, 0.36%
Canada
1 publication, 0.36%
Latvia, 1, 0.36%
Latvia
1 publication, 0.36%
Mexico, 1, 0.36%
Mexico
1 publication, 0.36%
UAE, 1, 0.36%
UAE
1 publication, 0.36%
Turkey, 1, 0.36%
Turkey
1 publication, 0.36%
10
20
30
40
50
60
70
80
90
100

Publishing countries in 5 years

10
20
30
40
50
60
70
80
90
100
USA, 91, 33.21%
USA
91 publications, 33.21%
Belgium, 45, 16.42%
Belgium
45 publications, 16.42%
Japan, 35, 12.77%
Japan
35 publications, 12.77%
Germany, 32, 11.68%
Germany
32 publications, 11.68%
China, 31, 11.31%
China
31 publications, 11.31%
Netherlands, 21, 7.66%
Netherlands
21 publications, 7.66%
Republic of Korea, 12, 4.38%
Republic of Korea
12 publications, 4.38%
Switzerland, 8, 2.92%
Switzerland
8 publications, 2.92%
France, 6, 2.19%
France
6 publications, 2.19%
Israel, 5, 1.82%
Israel
5 publications, 1.82%
United Kingdom, 3, 1.09%
United Kingdom
3 publications, 1.09%
Russia, 2, 0.73%
Russia
2 publications, 0.73%
Vietnam, 2, 0.73%
Vietnam
2 publications, 0.73%
India, 2, 0.73%
India
2 publications, 0.73%
Austria, 1, 0.36%
Austria
1 publication, 0.36%
Hungary, 1, 0.36%
Hungary
1 publication, 0.36%
Greece, 1, 0.36%
Greece
1 publication, 0.36%
Egypt, 1, 0.36%
Egypt
1 publication, 0.36%
Iran, 1, 0.36%
Iran
1 publication, 0.36%
Canada, 1, 0.36%
Canada
1 publication, 0.36%
Latvia, 1, 0.36%
Latvia
1 publication, 0.36%
Mexico, 1, 0.36%
Mexico
1 publication, 0.36%
UAE, 1, 0.36%
UAE
1 publication, 0.36%
Turkey, 1, 0.36%
Turkey
1 publication, 0.36%
10
20
30
40
50
60
70
80
90
100